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Global Overlay Metrology Systems Market Research Report 2025

Published Date: April 2025

Report Code: QYRE-Auto-0D14818

Global Overlay Metrology Systems Market Research Report 2023

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Global Overlay Metrology Systems Market Research Report 2025

Code: QYRE-Auto-0D14818

Report

April 2025

Pages:97

QYResearch

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DESCRIPTION

TABLE OF CONTENT

TABLES & FIGURES

FEATURED COMPANIES

Advanced Spectral Technology

Onto Innovation

Tokyo Aircraft Instrument

Muetec

TASMIT

Soluris

Netzer Precision Position Sensors

TZTek

Chroma ATE

Nikon

Chotest Technology

Yuweitek

Zeiss

KLA

ASML

Overlay Metrology Systems Market

The global market for Overlay Metrology Systems was valued at US$ million in the year 2024 and is projected to reach a revised size of US$ million by 2031, growing at a CAGR of %during the forecast period.

Overlay metrology systems provide accurate feedback of on-product overlay error for fast technology ramps and stable production of leading-edge memory and logic devices. Wavelength tunability with high resolution delivers accurate and robust overlay error measurements in the presence of production process variations.

North American market for Overlay Metrology Systems is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.

Asia-Pacific market for Overlay Metrology Systems is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.

The major global manufacturers of Overlay Metrology Systems include KLA, ASML, Advanced Spectral Technology, Onto Innovation, Tokyo Aircraft Instrument, ZEISS, MueTec, TASMIT, Soluris, Netzer Precision Position Sensors, etc. In 2024, the world's top three vendors accounted for approximately % of the revenue.

Report Scope

This report aims to provide a comprehensive presentation of the global market for Overlay Metrology Systems, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Overlay Metrology Systems.

The Overlay Metrology Systems market size, estimations, and forecasts are provided in terms of output/shipments (Units) and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global Overlay Metrology Systems market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.

For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.

The report will help the Overlay Metrology Systems manufacturers, new entrants, and industry chain related companies in this market with information on the revenues, production, and average price for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.

Market Segmentation

Scope of Overlay Metrology Systems Market Report

Report Metric	Details
Report Name	Overlay Metrology Systems Market
by Type	Vertical Horizontal
by Application	300 mm Wafer 200 mm Wafer Other
Production by Region	North America Europe China Japan
Consumption by Region	North America (United States, Canada) Europe (Germany, France, UK, Italy, Russia) Asia-Pacific (China, Japan, South Korea, Taiwan) Southeast Asia (India) Latin America (Mexico, Brazil)
By Company	KLA, ASML, Advanced Spectral Technology, Onto Innovation, Tokyo Aircraft Instrument, ZEISS, MueTec, TASMIT, Soluris, Netzer Precision Position Sensors, TZTEK, Chroma ATE, Nikon, Chotest Technology, YUWEITEK
Forecast units	USD million in value
Report coverage	Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
Chapter 2: Detailed analysis of Overlay Metrology Systems manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
Chapter 3: Production/output, value of Overlay Metrology Systems by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
Chapter 4: Consumption of Overlay Metrology Systems in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
Chapter 5: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 10: The main points and conclusions of the report.

FAQ for this report

Who are the main players in the Overlay Metrology Systems Market report?

Ans: The main players in the Overlay Metrology Systems Market are KLA, ASML, Advanced Spectral Technology, Onto Innovation, Tokyo Aircraft Instrument, ZEISS, MueTec, TASMIT, Soluris, Netzer Precision Position Sensors, TZTEK, Chroma ATE, Nikon, Chotest Technology, YUWEITEK

What are the Application segmentation covered in the Overlay Metrology Systems Market report?

Ans: The Applications covered in the Overlay Metrology Systems Market report are 300 mm Wafer, 200 mm Wafer, Other

What are the Type segmentation covered in the Overlay Metrology Systems Market report?

Ans: The Types covered in the Overlay Metrology Systems Market report are Vertical, Horizontal

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1 Overlay Metrology Systems Market Overview

1.1 Product Definition

1.2 Overlay Metrology Systems by Type

1.2.1 Global Overlay Metrology Systems Market Value Growth Rate Analysis by Type: 2024 VS 2031

1.2.2 Vertical

1.2.3 Horizontal

1.3 Overlay Metrology Systems by Application

1.3.1 Global Overlay Metrology Systems Market Value Growth Rate Analysis by Application: 2024 VS 2031

1.3.2 300 mm Wafer

1.3.3 200 mm Wafer

1.3.4 Other

1.4 Global Market Growth Prospects

1.4.1 Global Overlay Metrology Systems Production Value Estimates and Forecasts (2020-2031)

1.4.2 Global Overlay Metrology Systems Production Capacity Estimates and Forecasts (2020-2031)

1.4.3 Global Overlay Metrology Systems Production Estimates and Forecasts (2020-2031)

1.4.4 Global Overlay Metrology Systems Market Average Price Estimates and Forecasts (2020-2031)

1.5 Assumptions and Limitations

2 Market Competition by Manufacturers

2.1 Global Overlay Metrology Systems Production Market Share by Manufacturers (2020-2025)

2.2 Global Overlay Metrology Systems Production Value Market Share by Manufacturers (2020-2025)

2.3 Global Key Players of Overlay Metrology Systems, Industry Ranking, 2023 VS 2024

2.4 Global Overlay Metrology Systems Market Share by Company Type (Tier 1, Tier 2, and Tier 3)

2.5 Global Overlay Metrology Systems Average Price by Manufacturers (2020-2025)

2.6 Global Key Manufacturers of Overlay Metrology Systems, Manufacturing Base Distribution and Headquarters

2.7 Global Key Manufacturers of Overlay Metrology Systems, Product Offered and Application

2.8 Global Key Manufacturers of Overlay Metrology Systems, Date of Enter into This Industry

2.9 Overlay Metrology Systems Market Competitive Situation and Trends

2.9.1 Overlay Metrology Systems Market Concentration Rate

2.9.2 Global 5 and 10 Largest Overlay Metrology Systems Players Market Share by Revenue

2.10 Mergers & Acquisitions, Expansion

3 Overlay Metrology Systems Production by Region

3.1 Global Overlay Metrology Systems Production Value Estimates and Forecasts by Region: 2020 VS 2024 VS 2031

3.2 Global Overlay Metrology Systems Production Value by Region (2020-2031)

3.2.1 Global Overlay Metrology Systems Production Value by Region (2020-2025)

3.2.2 Global Forecasted Production Value of Overlay Metrology Systems by Region (2026-2031)

3.3 Global Overlay Metrology Systems Production Estimates and Forecasts by Region: 2020 VS 2024 VS 2031

3.4 Global Overlay Metrology Systems Production Volume by Region (2020-2031)

3.4.1 Global Overlay Metrology Systems Production by Region (2020-2025)

3.4.2 Global Forecasted Production of Overlay Metrology Systems by Region (2026-2031)

3.5 Global Overlay Metrology Systems Market Price Analysis by Region (2020-2025)

3.6 Global Overlay Metrology Systems Production and Value, Year-over-Year Growth

3.6.1 North America Overlay Metrology Systems Production Value Estimates and Forecasts (2020-2031)

3.6.2 Europe Overlay Metrology Systems Production Value Estimates and Forecasts (2020-2031)

3.6.3 China Overlay Metrology Systems Production Value Estimates and Forecasts (2020-2031)

3.6.4 Japan Overlay Metrology Systems Production Value Estimates and Forecasts (2020-2031)

4 Overlay Metrology Systems Consumption by Region

4.1 Global Overlay Metrology Systems Consumption Estimates and Forecasts by Region: 2020 VS 2024 VS 2031

4.2 Global Overlay Metrology Systems Consumption by Region (2020-2031)

4.2.1 Global Overlay Metrology Systems Consumption by Region (2020-2025)

4.2.2 Global Overlay Metrology Systems Forecasted Consumption by Region (2026-2031)

4.3 North America

4.3.1 North America Overlay Metrology Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031

4.3.2 North America Overlay Metrology Systems Consumption by Country (2020-2031)

4.3.3 U.S.

4.3.4 Canada

4.4 Europe

4.4.1 Europe Overlay Metrology Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031

4.4.2 Europe Overlay Metrology Systems Consumption by Country (2020-2031)

4.4.3 Germany

4.4.4 France

4.4.5 U.K.

4.4.6 Italy

4.4.7 Netherlands

4.5 Asia Pacific

4.5.1 Asia Pacific Overlay Metrology Systems Consumption Growth Rate by Region: 2020 VS 2024 VS 2031

4.5.2 Asia Pacific Overlay Metrology Systems Consumption by Region (2020-2031)

4.5.3 China

4.5.4 Japan

4.5.5 South Korea

4.5.6 China Taiwan

4.5.7 Southeast Asia

4.5.8 India

4.6 Latin America, Middle East & Africa

4.6.1 Latin America, Middle East & Africa Overlay Metrology Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031

4.6.2 Latin America, Middle East & Africa Overlay Metrology Systems Consumption by Country (2020-2031)

4.6.3 Mexico

4.6.4 Brazil

4.6.5 Turkey

4.6.6 GCC Countries

5 Segment by Type

5.1 Global Overlay Metrology Systems Production by Type (2020-2031)

5.1.1 Global Overlay Metrology Systems Production by Type (2020-2025)

5.1.2 Global Overlay Metrology Systems Production by Type (2026-2031)

5.1.3 Global Overlay Metrology Systems Production Market Share by Type (2020-2031)

5.2 Global Overlay Metrology Systems Production Value by Type (2020-2031)

5.2.1 Global Overlay Metrology Systems Production Value by Type (2020-2025)

5.2.2 Global Overlay Metrology Systems Production Value by Type (2026-2031)

5.2.3 Global Overlay Metrology Systems Production Value Market Share by Type (2020-2031)

5.3 Global Overlay Metrology Systems Price by Type (2020-2031)

6 Segment by Application

6.1 Global Overlay Metrology Systems Production by Application (2020-2031)

6.1.1 Global Overlay Metrology Systems Production by Application (2020-2025)

6.1.2 Global Overlay Metrology Systems Production by Application (2026-2031)

6.1.3 Global Overlay Metrology Systems Production Market Share by Application (2020-2031)

6.2 Global Overlay Metrology Systems Production Value by Application (2020-2031)

6.2.1 Global Overlay Metrology Systems Production Value by Application (2020-2025)

6.2.2 Global Overlay Metrology Systems Production Value by Application (2026-2031)

6.2.3 Global Overlay Metrology Systems Production Value Market Share by Application (2020-2031)

6.3 Global Overlay Metrology Systems Price by Application (2020-2031)

7 Key Companies Profiled

7.1 KLA

7.1.1 KLA Overlay Metrology Systems Company Information

7.1.2 KLA Overlay Metrology Systems Product Portfolio

7.1.3 KLA Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.1.4 KLA Main Business and Markets Served

7.1.5 KLA Recent Developments/Updates

7.2 ASML

7.2.1 ASML Overlay Metrology Systems Company Information

7.2.2 ASML Overlay Metrology Systems Product Portfolio

7.2.3 ASML Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.2.4 ASML Main Business and Markets Served

7.2.5 ASML Recent Developments/Updates

7.3 Advanced Spectral Technology

7.3.1 Advanced Spectral Technology Overlay Metrology Systems Company Information

7.3.2 Advanced Spectral Technology Overlay Metrology Systems Product Portfolio

7.3.3 Advanced Spectral Technology Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.3.4 Advanced Spectral Technology Main Business and Markets Served

7.3.5 Advanced Spectral Technology Recent Developments/Updates

7.4 Onto Innovation

7.4.1 Onto Innovation Overlay Metrology Systems Company Information

7.4.2 Onto Innovation Overlay Metrology Systems Product Portfolio

7.4.3 Onto Innovation Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.4.4 Onto Innovation Main Business and Markets Served

7.4.5 Onto Innovation Recent Developments/Updates

7.5 Tokyo Aircraft Instrument

7.5.1 Tokyo Aircraft Instrument Overlay Metrology Systems Company Information

7.5.2 Tokyo Aircraft Instrument Overlay Metrology Systems Product Portfolio

7.5.3 Tokyo Aircraft Instrument Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.5.4 Tokyo Aircraft Instrument Main Business and Markets Served

7.5.5 Tokyo Aircraft Instrument Recent Developments/Updates

7.6 ZEISS

7.6.1 ZEISS Overlay Metrology Systems Company Information

7.6.2 ZEISS Overlay Metrology Systems Product Portfolio

7.6.3 ZEISS Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.6.4 ZEISS Main Business and Markets Served

7.6.5 ZEISS Recent Developments/Updates

7.7 MueTec

7.7.1 MueTec Overlay Metrology Systems Company Information

7.7.2 MueTec Overlay Metrology Systems Product Portfolio

7.7.3 MueTec Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.7.4 MueTec Main Business and Markets Served

7.7.5 MueTec Recent Developments/Updates

7.8 TASMIT

7.8.1 TASMIT Overlay Metrology Systems Company Information

7.8.2 TASMIT Overlay Metrology Systems Product Portfolio

7.8.3 TASMIT Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.8.4 TASMIT Main Business and Markets Served

7.8.5 TASMIT Recent Developments/Updates

7.9 Soluris

7.9.1 Soluris Overlay Metrology Systems Company Information

7.9.2 Soluris Overlay Metrology Systems Product Portfolio

7.9.3 Soluris Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.9.4 Soluris Main Business and Markets Served

7.9.5 Soluris Recent Developments/Updates

7.10 Netzer Precision Position Sensors

7.10.1 Netzer Precision Position Sensors Overlay Metrology Systems Company Information

7.10.2 Netzer Precision Position Sensors Overlay Metrology Systems Product Portfolio

7.10.3 Netzer Precision Position Sensors Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.10.4 Netzer Precision Position Sensors Main Business and Markets Served

7.10.5 Netzer Precision Position Sensors Recent Developments/Updates

7.11 TZTEK

7.11.1 TZTEK Overlay Metrology Systems Company Information

7.11.2 TZTEK Overlay Metrology Systems Product Portfolio

7.11.3 TZTEK Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.11.4 TZTEK Main Business and Markets Served

7.11.5 TZTEK Recent Developments/Updates

7.12 Chroma ATE

7.12.1 Chroma ATE Overlay Metrology Systems Company Information

7.12.2 Chroma ATE Overlay Metrology Systems Product Portfolio

7.12.3 Chroma ATE Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.12.4 Chroma ATE Main Business and Markets Served

7.12.5 Chroma ATE Recent Developments/Updates

7.13 Nikon

7.13.1 Nikon Overlay Metrology Systems Company Information

7.13.2 Nikon Overlay Metrology Systems Product Portfolio

7.13.3 Nikon Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.13.4 Nikon Main Business and Markets Served

7.13.5 Nikon Recent Developments/Updates

7.14 Chotest Technology

7.14.1 Chotest Technology Overlay Metrology Systems Company Information

7.14.2 Chotest Technology Overlay Metrology Systems Product Portfolio

7.14.3 Chotest Technology Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.14.4 Chotest Technology Main Business and Markets Served

7.14.5 Chotest Technology Recent Developments/Updates

7.15 YUWEITEK

7.15.1 YUWEITEK Overlay Metrology Systems Company Information

7.15.2 YUWEITEK Overlay Metrology Systems Product Portfolio

7.15.3 YUWEITEK Overlay Metrology Systems Production, Value, Price and Gross Margin (2020-2025)

7.15.4 YUWEITEK Main Business and Markets Served

7.15.5 YUWEITEK Recent Developments/Updates

8 Industry Chain and Sales Channels Analysis

8.1 Overlay Metrology Systems Industry Chain Analysis

8.2 Overlay Metrology Systems Raw Material Supply Analysis

8.2.1 Key Raw Materials

8.2.2 Raw Materials Key Suppliers

8.3 Overlay Metrology Systems Production Mode & Process Analysis

8.4 Overlay Metrology Systems Sales and Marketing

8.4.1 Overlay Metrology Systems Sales Channels

8.4.2 Overlay Metrology Systems Distributors

8.5 Overlay Metrology Systems Customer Analysis

9 Overlay Metrology Systems Market Dynamics

9.1 Overlay Metrology Systems Industry Trends

9.2 Overlay Metrology Systems Market Drivers

9.3 Overlay Metrology Systems Market Challenges

9.4 Overlay Metrology Systems Market Restraints

10 Research Findings and Conclusion

11 Methodology and Data Source

11.1 Methodology/Research Approach

11.1.1 Research Programs/Design

11.1.2 Market Size Estimation

11.1.3 Market Breakdown and Data Triangulation

11.2 Data Source

11.2.1 Secondary Sources

11.2.2 Primary Sources

11.3 Author List

11.4 Disclaimer

FEATURED COMPANIES

Advanced Spectral Technology

Onto Innovation

Tokyo Aircraft Instrument

Muetec

TASMIT

Soluris

Netzer Precision Position Sensors

TZTek

Chroma ATE

Nikon

Chotest Technology

Yuweitek

Zeiss

KLA

ASML

List of Tables

Table 1. Global Overlay Metrology Systems Market Value by Type, (US$ Million) & (2024 VS 2031)

Table 2. Global Overlay Metrology Systems Market Value by Application, (US$ Million) & (2024 VS 2031)

Table 3. Global Overlay Metrology Systems Production Capacity (Units) by Manufacturers in 2024

Table 4. Global Overlay Metrology Systems Production by Manufacturers (2020-2025) & (Units)

Table 5. Global Overlay Metrology Systems Production Market Share by Manufacturers (2020-2025)

Table 6. Global Overlay Metrology Systems Production Value by Manufacturers (2020-2025) & (US$ Million)

Table 7. Global Overlay Metrology Systems Production Value Share by Manufacturers (2020-2025)

Table 8. Global Key Players of Overlay Metrology Systems, Industry Ranking, 2023 VS 2024

Table 9. Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value in Overlay Metrology Systems as of 2024)

Table 10. Global Market Overlay Metrology Systems Average Price by Manufacturers (US$/Unit) & (2020-2025)

Table 11. Global Key Manufacturers of Overlay Metrology Systems, Manufacturing Base Distribution and Headquarters

Table 12. Global Key Manufacturers of Overlay Metrology Systems, Product Offered and Application

Table 13. Global Key Manufacturers of Overlay Metrology Systems, Date of Enter into This Industry

Table 14. Global Overlay Metrology Systems Manufacturers Market Concentration Ratio (CR5 and HHI)

Table 15. Mergers & Acquisitions, Expansion Plans

Table 16. Global Overlay Metrology Systems Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)

Table 17. Global Overlay Metrology Systems Production Value (US$ Million) by Region (2020-2025)

Table 18. Global Overlay Metrology Systems Production Value Market Share by Region (2020-2025)

Table 19. Global Overlay Metrology Systems Production Value (US$ Million) Forecast by Region (2026-2031)

Table 20. Global Overlay Metrology Systems Production Value Market Share Forecast by Region (2026-2031)

Table 21. Global Overlay Metrology Systems Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)

Table 22. Global Overlay Metrology Systems Production (Units) by Region (2020-2025)

Table 23. Global Overlay Metrology Systems Production Market Share by Region (2020-2025)

Table 24. Global Overlay Metrology Systems Production (Units) Forecast by Region (2026-2031)

Table 25. Global Overlay Metrology Systems Production Market Share Forecast by Region (2026-2031)

Table 26. Global Overlay Metrology Systems Market Average Price (US$/Unit) by Region (2020-2025)

Table 27. Global Overlay Metrology Systems Market Average Price (US$/Unit) by Region (2026-2031)

Table 28. Global Overlay Metrology Systems Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)

Table 29. Global Overlay Metrology Systems Consumption by Region (2020-2025) & (Units)

Table 30. Global Overlay Metrology Systems Consumption Market Share by Region (2020-2025)

Table 31. Global Overlay Metrology Systems Forecasted Consumption by Region (2026-2031) & (Units)

Table 32. Global Overlay Metrology Systems Forecasted Consumption Market Share by Region (2026-2031)

Table 33. North America Overlay Metrology Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)

Table 34. North America Overlay Metrology Systems Consumption by Country (2020-2025) & (Units)

Table 35. North America Overlay Metrology Systems Consumption by Country (2026-2031) & (Units)

Table 36. Europe Overlay Metrology Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)

Table 37. Europe Overlay Metrology Systems Consumption by Country (2020-2025) & (Units)

Table 38. Europe Overlay Metrology Systems Consumption by Country (2026-2031) & (Units)

Table 39. Asia Pacific Overlay Metrology Systems Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)

Table 40. Asia Pacific Overlay Metrology Systems Consumption by Region (2020-2025) & (Units)

Table 41. Asia Pacific Overlay Metrology Systems Consumption by Region (2026-2031) & (Units)

Table 42. Latin America, Middle East & Africa Overlay Metrology Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)

Table 43. Latin America, Middle East & Africa Overlay Metrology Systems Consumption by Country (2020-2025) & (Units)

Table 44. Latin America, Middle East & Africa Overlay Metrology Systems Consumption by Country (2026-2031) & (Units)

Table 45. Global Overlay Metrology Systems Production (Units) by Type (2020-2025)

Table 46. Global Overlay Metrology Systems Production (Units) by Type (2026-2031)

Table 47. Global Overlay Metrology Systems Production Market Share by Type (2020-2025)

Table 48. Global Overlay Metrology Systems Production Market Share by Type (2026-2031)

Table 49. Global Overlay Metrology Systems Production Value (US$ Million) by Type (2020-2025)

Table 50. Global Overlay Metrology Systems Production Value (US$ Million) by Type (2026-2031)

Table 51. Global Overlay Metrology Systems Production Value Market Share by Type (2020-2025)

Table 52. Global Overlay Metrology Systems Production Value Market Share by Type (2026-2031)

Table 53. Global Overlay Metrology Systems Price (US$/Unit) by Type (2020-2025)

Table 54. Global Overlay Metrology Systems Price (US$/Unit) by Type (2026-2031)

Table 55. Global Overlay Metrology Systems Production (Units) by Application (2020-2025)

Table 56. Global Overlay Metrology Systems Production (Units) by Application (2026-2031)

Table 57. Global Overlay Metrology Systems Production Market Share by Application (2020-2025)

Table 58. Global Overlay Metrology Systems Production Market Share by Application (2026-2031)

Table 59. Global Overlay Metrology Systems Production Value (US$ Million) by Application (2020-2025)

Table 60. Global Overlay Metrology Systems Production Value (US$ Million) by Application (2026-2031)

Table 61. Global Overlay Metrology Systems Production Value Market Share by Application (2020-2025)

Table 62. Global Overlay Metrology Systems Production Value Market Share by Application (2026-2031)

Table 63. Global Overlay Metrology Systems Price (US$/Unit) by Application (2020-2025)

Table 64. Global Overlay Metrology Systems Price (US$/Unit) by Application (2026-2031)

Table 65. KLA Overlay Metrology Systems Company Information

Table 66. KLA Overlay Metrology Systems Specification and Application

Table 67. KLA Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 68. KLA Main Business and Markets Served

Table 69. KLA Recent Developments/Updates

Table 70. ASML Overlay Metrology Systems Company Information

Table 71. ASML Overlay Metrology Systems Specification and Application

Table 72. ASML Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 73. ASML Main Business and Markets Served

Table 74. ASML Recent Developments/Updates

Table 75. Advanced Spectral Technology Overlay Metrology Systems Company Information

Table 76. Advanced Spectral Technology Overlay Metrology Systems Specification and Application

Table 77. Advanced Spectral Technology Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 78. Advanced Spectral Technology Main Business and Markets Served

Table 79. Advanced Spectral Technology Recent Developments/Updates

Table 80. Onto Innovation Overlay Metrology Systems Company Information

Table 81. Onto Innovation Overlay Metrology Systems Specification and Application

Table 82. Onto Innovation Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 83. Onto Innovation Main Business and Markets Served

Table 84. Onto Innovation Recent Developments/Updates

Table 85. Tokyo Aircraft Instrument Overlay Metrology Systems Company Information

Table 86. Tokyo Aircraft Instrument Overlay Metrology Systems Specification and Application

Table 87. Tokyo Aircraft Instrument Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 88. Tokyo Aircraft Instrument Main Business and Markets Served

Table 89. Tokyo Aircraft Instrument Recent Developments/Updates

Table 90. ZEISS Overlay Metrology Systems Company Information

Table 91. ZEISS Overlay Metrology Systems Specification and Application

Table 92. ZEISS Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 93. ZEISS Main Business and Markets Served

Table 94. ZEISS Recent Developments/Updates

Table 95. MueTec Overlay Metrology Systems Company Information

Table 96. MueTec Overlay Metrology Systems Specification and Application

Table 97. MueTec Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 98. MueTec Main Business and Markets Served

Table 99. MueTec Recent Developments/Updates

Table 100. TASMIT Overlay Metrology Systems Company Information

Table 101. TASMIT Overlay Metrology Systems Specification and Application

Table 102. TASMIT Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 103. TASMIT Main Business and Markets Served

Table 104. TASMIT Recent Developments/Updates

Table 105. Soluris Overlay Metrology Systems Company Information

Table 106. Soluris Overlay Metrology Systems Specification and Application

Table 107. Soluris Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 108. Soluris Main Business and Markets Served

Table 109. Soluris Recent Developments/Updates

Table 110. Netzer Precision Position Sensors Overlay Metrology Systems Company Information

Table 111. Netzer Precision Position Sensors Overlay Metrology Systems Specification and Application

Table 112. Netzer Precision Position Sensors Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 113. Netzer Precision Position Sensors Main Business and Markets Served

Table 114. Netzer Precision Position Sensors Recent Developments/Updates

Table 115. TZTEK Overlay Metrology Systems Company Information

Table 116. TZTEK Overlay Metrology Systems Specification and Application

Table 117. TZTEK Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 118. TZTEK Main Business and Markets Served

Table 119. TZTEK Recent Developments/Updates

Table 120. Chroma ATE Overlay Metrology Systems Company Information

Table 121. Chroma ATE Overlay Metrology Systems Specification and Application

Table 122. Chroma ATE Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 123. Chroma ATE Main Business and Markets Served

Table 124. Chroma ATE Recent Developments/Updates

Table 125. Nikon Overlay Metrology Systems Company Information

Table 126. Nikon Overlay Metrology Systems Specification and Application

Table 127. Nikon Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 128. Nikon Main Business and Markets Served

Table 129. Nikon Recent Developments/Updates

Table 130. Chotest Technology Overlay Metrology Systems Company Information

Table 131. Chotest Technology Overlay Metrology Systems Specification and Application

Table 132. Chotest Technology Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 133. Chotest Technology Main Business and Markets Served

Table 134. Chotest Technology Recent Developments/Updates

Table 135. YUWEITEK Overlay Metrology Systems Company Information

Table 136. YUWEITEK Overlay Metrology Systems Specification and Application

Table 137. YUWEITEK Overlay Metrology Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)

Table 138. YUWEITEK Main Business and Markets Served

Table 139. YUWEITEK Recent Developments/Updates

Table 140. Key Raw Materials Lists

Table 141. Raw Materials Key Suppliers Lists

Table 142. Overlay Metrology Systems Distributors List

Table 143. Overlay Metrology Systems Customers List

Table 144. Overlay Metrology Systems Market Trends

Table 145. Overlay Metrology Systems Market Drivers

Table 146. Overlay Metrology Systems Market Challenges

Table 147. Overlay Metrology Systems Market Restraints

Table 148. Research Programs/Design for This Report

Table 149. Key Data Information from Secondary Sources

Table 150. Key Data Information from Primary Sources

Table 151. Authors List of This Report

List of Figures

Figure 1. Product Picture of Overlay Metrology Systems

Figure 2. Global Overlay Metrology Systems Market Value by Type, (US$ Million) & (2020-2031)

Figure 3. Global Overlay Metrology Systems Market Share by Type: 2024 VS 2031

Figure 4. Vertical Product Picture

Figure 5. Horizontal Product Picture

Figure 6. Global Overlay Metrology Systems Market Value by Application, (US$ Million) & (2020-2031)

Figure 7. Global Overlay Metrology Systems Market Share by Application: 2024 VS 2031

Figure 8. 300 mm Wafer

Figure 9. 200 mm Wafer

Figure 10. Other

Figure 11. Global Overlay Metrology Systems Production Value (US$ Million), 2020 VS 2024 VS 2031

Figure 12. Global Overlay Metrology Systems Production Value (US$ Million) & (2020-2031)

Figure 13. Global Overlay Metrology Systems Production Capacity (Units) & (2020-2031)

Figure 14. Global Overlay Metrology Systems Production (Units) & (2020-2031)

Figure 15. Global Overlay Metrology Systems Average Price (US$/Unit) & (2020-2031)

Figure 16. Overlay Metrology Systems Report Years Considered

Figure 17. Overlay Metrology Systems Production Share by Manufacturers in 2024

Figure 18. Global Overlay Metrology Systems Production Value Share by Manufacturers (2024)

Figure 19. Overlay Metrology Systems Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024

Figure 20. The Global 5 and 10 Largest Players: Market Share by Overlay Metrology Systems Revenue in 2024

Figure 21. Global Overlay Metrology Systems Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)

Figure 22. Global Overlay Metrology Systems Production Value Market Share by Region: 2020 VS 2024 VS 2031

Figure 23. Global Overlay Metrology Systems Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)

Figure 24. Global Overlay Metrology Systems Production Market Share by Region: 2020 VS 2024 VS 2031

Figure 25. North America Overlay Metrology Systems Production Value (US$ Million) Growth Rate (2020-2031)

Figure 26. Europe Overlay Metrology Systems Production Value (US$ Million) Growth Rate (2020-2031)

Figure 27. China Overlay Metrology Systems Production Value (US$ Million) Growth Rate (2020-2031)

Figure 28. Japan Overlay Metrology Systems Production Value (US$ Million) Growth Rate (2020-2031)

Figure 29. Global Overlay Metrology Systems Consumption by Region: 2020 VS 2024 VS 2031 (Units)

Figure 30. Global Overlay Metrology Systems Consumption Market Share by Region: 2020 VS 2024 VS 2031

Figure 31. North America Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 32. North America Overlay Metrology Systems Consumption Market Share by Country (2020-2031)

Figure 33. U.S. Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 34. Canada Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 35. Europe Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 36. Europe Overlay Metrology Systems Consumption Market Share by Country (2020-2031)

Figure 37. Germany Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 38. France Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 39. U.K. Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 40. Italy Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 41. Netherlands Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 42. Asia Pacific Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 43. Asia Pacific Overlay Metrology Systems Consumption Market Share by Region (2020-2031)

Figure 44. China Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 45. Japan Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 46. South Korea Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 47. China Taiwan Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 48. Southeast Asia Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 49. India Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 50. Latin America, Middle East & Africa Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 51. Latin America, Middle East & Africa Overlay Metrology Systems Consumption Market Share by Country (2020-2031)

Figure 52. Mexico Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 53. Brazil Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 54. Turkey Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 55. GCC Countries Overlay Metrology Systems Consumption and Growth Rate (2020-2031) & (Units)

Figure 56. Global Production Market Share of Overlay Metrology Systems by Type (2020-2031)

Figure 57. Global Production Value Market Share of Overlay Metrology Systems by Type (2020-2031)

Figure 58. Global Overlay Metrology Systems Price (US$/Unit) by Type (2020-2031)

Figure 59. Global Production Market Share of Overlay Metrology Systems by Application (2020-2031)

Figure 60. Global Production Value Market Share of Overlay Metrology Systems by Application (2020-2031)

Figure 61. Global Overlay Metrology Systems Price (US$/Unit) by Application (2020-2031)

Figure 62. Overlay Metrology Systems Value Chain

Figure 63. Channels of Distribution (Direct Vs Distribution)

Figure 64. Bottom-up and Top-down Approaches for This Report

Figure 65. Data Triangulation

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