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Global Metal and Hard Mask Etch System Sales Market Report, Competitive Analysis and Regional Opportunities 2025-2031

Published Date: August 2025

Report Code: QYRE-Auto-13O9172

Global Metal and Hard Mask Etch System Market Outlook 2022

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Global Metal and Hard Mask Etch System Sales Market Report, Competitive Analysis and Regional Opportunities 2025-2031

Q: What is the Metal and Hard Mask Etch System Sales Market size in 2031?

The Metal and Hard Mask Etch System Sales Market size in 2031 will be US$ 3689 million.

Q: Who are the main players in the Metal and Hard Mask Etch System Sales Market report?

The main players in the Metal and Hard Mask Etch System Sales Market are Lam Research, Applied Materials, Hitachi High-tech, Tokyo Electron, Oxford Instruments, NAURA Technology Group, SPTS Technologies Ltd., AMEC, Ulvac, Samco, Plasma Therm

Q: What are the Application segmentation covered in the Metal and Hard Mask Etch System Sales Market report?

The Applications covered in the Metal and Hard Mask Etch System Sales Market report are Front End of Line (FEOL), Back End of Line (BEOL)

Q: What are the Type segmentation covered in the Metal and Hard Mask Etch System Sales Market report?

The Types covered in the Metal and Hard Mask Etch System Sales Market report are Silicon Etch Equipment, Dielectric Etch Equipment, Metal Etch Equipment, Hard Mask Etch Equipment

Code: QYRE-Auto-13O9172

Report

August 2025

Pages:95

QYResearch

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DESCRIPTION

TABLE OF CONTENT

TABLES & FIGURES

FEATURED COMPANIES

Hitachi High-tech

Tokyo Electron

NAURA Technology Group

SPTS Technologies Ltd.

AMEC plc

ULVAC

SAMCO

Plasma-Therm

Applied Materials

Lam Research

Oxford-Instruments

Metal and Hard Mask Etch System Sales Market Size

The global Metal and Hard Mask Etch System market size was US$ 1616 million in 2024 and is forecast to a readjusted size of US$ 3689 million by 2031 with a CAGR of 12.7% during the forecast period 2025-2031.

Metal and Hard Mask Etch System Sales Market

By 2025, the evolving U.S. tariff policy is poised to inject considerable uncertainty into the global economic landscape. This report delves into the latest U.S. tariff measures and the corresponding policy responses across the globe, evaluating their impacts on Metal and Hard Mask Etch System market competitiveness, regional economic performance, and supply chain configurations.

An etch system shapes the thin film into a desired patterns using liquid chemicals, reaction gases or ion chemical reaction. An etch system is used in manufacturing lines for semiconductors and other electronic devices. This report mainly covers metal etch and hard mask etch system market.

North America have a larger market share which account for nearly 70%, followed by Japan and Asia-Pacific region. The world TOP 5 players in the Metal and Hard Mask Etch System market are Lam Research, Applied Materials, Hitachi High-tech, Tokyo Electron and Oxford Instruments, which account for more than 65% of the total market share.

Analysis of market driving factors

1. Technology node shrinkage and process upgrade

Demand background: As chip manufacturing processes advance to 3nm and below, traditional photoresist masks are difficult to meet the requirements of line width control (<10nm) and aspect ratio (>50:1).

Technology driver: Hard mask etching systems have become key supporting equipment for extreme ultraviolet lithography (EUV) and double patterning processes through high selectivity and plasma resistance.

2. Explosion of demand for 5G/AIoT and high-performance computing

Market demand: The demand for high-frequency and low-power chips in scenarios such as 5G base stations, AI accelerators, and autonomous driving has surged. Process requirements: Copper interconnect layer: Hard mask ensures the layout accuracy of copper wires and reduces resistance and signal delay. Low dielectric constant (Low-K) materials: Hard mask protects porous ultra-low K dielectrics from plasma damage.

3. Policy support and accelerated domestic substitution

Global policy: US CHIPS Act: Invest $52 billion to support local semiconductor manufacturing, including hard mask material research and development. EU Chip Act: The goal is to increase the share of European chip production capacity to 20% by 2030. China's domestic substitution: policy-driven: The second phase of the National Integrated Circuit Industry Investment Fund (Big Fund) focuses on supporting the localization of etching equipment.

4. Expansion of emerging application fields

Advanced packaging:

TSV (Through Silicon Via): Hard masks are used for high-density vertical interconnection to increase the communication bandwidth between chips.

Fan-Out packaging: Hard masks enable high-precision redistribution layer (RDL) etching.

Third-generation semiconductors:

SiC/GaN devices: Hard masks solve the problem of hard material etching and improve device withstand voltage and switching speed.

5. Industry chain integration and cost optimization

Vertical integration: Leading companies (such as Lam Research) cover the entire process from hard mask material development to etching equipment manufacturing, shortening the R&D cycle.

Cost reduction: Optimize etching parameters (such as power, pressure, gas flow) through AI, reduce consumables consumption, and reduce the cost of single wafers.

3. Market trends and prospects

Technical direction:

High-K hard mask: using materials such as HfO₂ to further reduce thickness to <10nm.

Self-assembled hard mask: using block copolymers to achieve line width control below 5nm.

AI-driven process: optimizing etching uniformity through machine learning and improving yield to more than 99%.

As the core equipment of semiconductor manufacturing, the market demand for metal and hard mask etching systems is jointly driven by the shrinking of technology nodes, the outbreak of 5G/AIoT, policy support and the expansion of emerging application fields. In the future, with the deep integration of industrial chain integration and AI technology, this field will develop in the direction of higher precision, lower cost and more intelligence, providing key support for the upgrading of the global semiconductor industry.

The global Metal and Hard Mask Etch System market is strategically segmented by company, region (country), by Type, and by Application. This report empowers stakeholders to capitalize on emerging opportunities, optimize product strategies, and outperform competitors through data-driven insights on sales, revenue, and forecasts across regions, by Type, and by Application for 2020-2031.

Market Segmentation

Scope of Metal and Hard Mask Etch System Sales Market Report

Report Metric	Details
Report Name	Metal and Hard Mask Etch System Sales Market
Forecasted market size in 2031	US$ 3689 million
CAGR	12.7%
Forecasted years	2025 - 2031
By Type: (Dominant Segment vs High-Margin Innovation)	Silicon Etch Equipment Dielectric Etch Equipment Metal Etch Equipment Hard Mask Etch Equipment
By Application: (Core Demand Driver vs Emerging Opportunity)	Front End of Line (FEOL) Back End of Line (BEOL)
By Region	North America (United States, Canada) Europe (Germany, France, UK, Italy, Russia) Rest of Europe Nordic Countries Asia-Pacific (China, Japan, South Korea) Southeast Asia (India, Australia) Rest of Asia Latin America (Mexico, Brazil) Rest of Latin America Middle East & Africa (Turkey, Saudi Arabia, UAE, Rest of MEA)
By Company:	Lam Research, Applied Materials, Hitachi High-tech, Tokyo Electron, Oxford Instruments, NAURA Technology Group, SPTS Technologies Ltd., AMEC, Ulvac, Samco, Plasma Therm
Forecast units	USD million in value
Report coverage	Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

Chapter 1: Report scope, executive summary, and market evolution scenarios (short/mid/long term).
Chapter 2: Quantitative analysis of Metal and Hard Mask Etch System market size and growth potential at global, regional, and country levels.
Chapter 3: Competitive benchmarking of manufacturers (revenue, market share, M&A, R&D focus).
Chapter 4: Type-based segmentation analysis – Uncovering blue ocean markets (e.g., Dielectric Etch Equipment in China).
Chapter 5: Application-based segmentation analysis – High-growth downstream opportunities (e.g., Back End of Line (BEOL) in India).
Chapter 6: Regional sales and revenue breakdown by company, type, application and customer.
Chapter 7: Key manufacturer profiles – Financials, product portfolios, and strategic developments.
Chapter 8: Market dynamics – Drivers, restraints, regulatory impacts, and risk mitigation strategies.
Chapter 9: Actionable conclusions and strategic recommendations.
Why This Report?
Unlike generic global market reports, this study combines macro-level industry trends with hyper-local operational intelligence, empowering data-driven decisions across the Metal and Hard Mask Etch System value chain, addressing:

FAQ for this report

What is the Metal and Hard Mask Etch System Sales Market size in 2031?

Ans: The Metal and Hard Mask Etch System Sales Market size in 2031 will be US$ 3689 million.

What is the market share of major companies in Metal and Hard Mask Etch System Sales Market?

Ans: The world TOP 5 players in the Metal and Hard Mask Etch System market are Lam Research, Applied Materials, Hitachi High-tech, Tokyo Electron and Oxford Instruments, which account for more than 65% of the total market share.

What is the Metal and Hard Mask Etch System Sales Market production share by region?

Ans: EU Chip Act: The goal is to increase the share of European chip production capacity to 20% by 2030.

Who are the main players in the Metal and Hard Mask Etch System Sales Market report?

Ans: The main players in the Metal and Hard Mask Etch System Sales Market are Lam Research, Applied Materials, Hitachi High-tech, Tokyo Electron, Oxford Instruments, NAURA Technology Group, SPTS Technologies Ltd., AMEC, Ulvac, Samco, Plasma Therm

What are the Application segmentation covered in the Metal and Hard Mask Etch System Sales Market report?

Ans: The Applications covered in the Metal and Hard Mask Etch System Sales Market report are Front End of Line (FEOL), Back End of Line (BEOL)

What are the Type segmentation covered in the Metal and Hard Mask Etch System Sales Market report?

Ans: The Types covered in the Metal and Hard Mask Etch System Sales Market report are Silicon Etch Equipment, Dielectric Etch Equipment, Metal Etch Equipment, Hard Mask Etch Equipment

1 Market Overview

1.1 Metal and Hard Mask Etch System Product Scope

1.2 Metal and Hard Mask Etch System by Type

1.2.1 Global Metal and Hard Mask Etch System Sales by Type (2020 & 2024 & 2031)

1.2.2 Silicon Etch Equipment

1.2.3 Dielectric Etch Equipment

1.2.4 Metal Etch Equipment

1.2.5 Hard Mask Etch Equipment

1.3 Metal and Hard Mask Etch System by Application

1.3.1 Global Metal and Hard Mask Etch System Sales Comparison by Application (2020 & 2024 & 2031)

1.3.2 Front End of Line (FEOL)

1.3.3 Back End of Line (BEOL)

1.4 Global Metal and Hard Mask Etch System Market Estimates and Forecasts (2020-2031)

1.4.1 Global Metal and Hard Mask Etch System Market Size in Value Growth Rate (2020-2031)

1.4.2 Global Metal and Hard Mask Etch System Market Size in Volume Growth Rate (2020-2031)

1.4.3 Global Metal and Hard Mask Etch System Price Trends (2020-2031)

1.5 Assumptions and Limitations

2 Market Size and Prospective by Region

2.1 Global Metal and Hard Mask Etch System Market Size by Region: 2020 VS 2024 VS 2031

2.2 Global Metal and Hard Mask Etch System Retrospective Market Scenario by Region (2020-2025)

2.2.1 Global Metal and Hard Mask Etch System Sales Market Share by Region (2020-2025)

2.2.2 Global Metal and Hard Mask Etch System Revenue Market Share by Region (2020-2025)

2.3 Global Metal and Hard Mask Etch System Market Estimates and Forecasts by Region (2026-2031)

2.3.1 Global Metal and Hard Mask Etch System Sales Estimates and Forecasts by Region (2026-2031)

2.3.2 Global Metal and Hard Mask Etch System Revenue Forecast by Region (2026-2031)

2.4 Major Region and Emerging Market Analysis

2.4.1 North America Metal and Hard Mask Etch System Market Size and Prospective (2020-2031)

2.4.2 Europe Metal and Hard Mask Etch System Market Size and Prospective (2020-2031)

2.4.3 China Metal and Hard Mask Etch System Market Size and Prospective (2020-2031)

2.4.4 Japan Metal and Hard Mask Etch System Market Size and Prospective (2020-2031)

3 Global Market Size by Type

3.1 Global Metal and Hard Mask Etch System Historic Market Review by Type (2020-2025)

3.1.1 Global Metal and Hard Mask Etch System Sales by Type (2020-2025)

3.1.2 Global Metal and Hard Mask Etch System Revenue by Type (2020-2025)

3.1.3 Global Metal and Hard Mask Etch System Price by Type (2020-2025)

3.2 Global Metal and Hard Mask Etch System Market Estimates and Forecasts by Type (2026-2031)

3.2.1 Global Metal and Hard Mask Etch System Sales Forecast by Type (2026-2031)

3.2.2 Global Metal and Hard Mask Etch System Revenue Forecast by Type (2026-2031)

3.2.3 Global Metal and Hard Mask Etch System Price Forecast by Type (2026-2031)

3.3 Different Types Metal and Hard Mask Etch System Representative Players

4 Global Market Size by Application

4.1 Global Metal and Hard Mask Etch System Historic Market Review by Application (2020-2025)

4.1.1 Global Metal and Hard Mask Etch System Sales by Application (2020-2025)

4.1.2 Global Metal and Hard Mask Etch System Revenue by Application (2020-2025)

4.1.3 Global Metal and Hard Mask Etch System Price by Application (2020-2025)

4.2 Global Metal and Hard Mask Etch System Market Estimates and Forecasts by Application (2026-2031)

4.2.1 Global Metal and Hard Mask Etch System Sales Forecast by Application (2026-2031)

4.2.2 Global Metal and Hard Mask Etch System Revenue Forecast by Application (2026-2031)

4.2.3 Global Metal and Hard Mask Etch System Price Forecast by Application (2026-2031)

4.3 New Sources of Growth in Metal and Hard Mask Etch System Application

5 Competition Landscape by Players

5.1 Global Metal and Hard Mask Etch System Sales by Players (2020-2025)

5.2 Global Top Metal and Hard Mask Etch System Players by Revenue (2020-2025)

5.3 Global Metal and Hard Mask Etch System Market Share by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Metal and Hard Mask Etch System as of 2024)

5.4 Global Metal and Hard Mask Etch System Average Price by Company (2020-2025)

5.5 Global Key Manufacturers of Metal and Hard Mask Etch System, Manufacturing Sites & Headquarters

5.6 Global Key Manufacturers of Metal and Hard Mask Etch System, Product Type & Application

5.7 Global Key Manufacturers of Metal and Hard Mask Etch System, Date of Enter into This Industry

5.8 Manufacturers Mergers & Acquisitions, Expansion Plans

6 Region Analysis

6.1 North America Market: Players, Segments, Downstream and Major Customers

6.1.1 North America Metal and Hard Mask Etch System Sales by Company

6.1.1.1 North America Metal and Hard Mask Etch System Sales by Company (2020-2025)

6.1.1.2 North America Metal and Hard Mask Etch System Revenue by Company (2020-2025)

6.1.2 North America Metal and Hard Mask Etch System Sales Breakdown by Type (2020-2025)

6.1.3 North America Metal and Hard Mask Etch System Sales Breakdown by Application (2020-2025)

6.1.4 North America Metal and Hard Mask Etch System Major Customer

6.1.5 North America Market Trend and Opportunities

6.2 Europe Market: Players, Segments, Downstream and Major Customers

6.2.1 Europe Metal and Hard Mask Etch System Sales by Company

6.2.1.1 Europe Metal and Hard Mask Etch System Sales by Company (2020-2025)

6.2.1.2 Europe Metal and Hard Mask Etch System Revenue by Company (2020-2025)

6.2.2 Europe Metal and Hard Mask Etch System Sales Breakdown by Type (2020-2025)

6.2.3 Europe Metal and Hard Mask Etch System Sales Breakdown by Application (2020-2025)

6.2.4 Europe Metal and Hard Mask Etch System Major Customer

6.2.5 Europe Market Trend and Opportunities

6.3 China Market: Players, Segments, Downstream and Major Customers

6.3.1 China Metal and Hard Mask Etch System Sales by Company

6.3.1.1 China Metal and Hard Mask Etch System Sales by Company (2020-2025)

6.3.1.2 China Metal and Hard Mask Etch System Revenue by Company (2020-2025)

6.3.2 China Metal and Hard Mask Etch System Sales Breakdown by Type (2020-2025)

6.3.3 China Metal and Hard Mask Etch System Sales Breakdown by Application (2020-2025)

6.3.4 China Metal and Hard Mask Etch System Major Customer

6.3.5 China Market Trend and Opportunities

6.4 Japan Market: Players, Segments, Downstream and Major Customers

6.4.1 Japan Metal and Hard Mask Etch System Sales by Company

6.4.1.1 Japan Metal and Hard Mask Etch System Sales by Company (2020-2025)

6.4.1.2 Japan Metal and Hard Mask Etch System Revenue by Company (2020-2025)

6.4.2 Japan Metal and Hard Mask Etch System Sales Breakdown by Type (2020-2025)

6.4.3 Japan Metal and Hard Mask Etch System Sales Breakdown by Application (2020-2025)

6.4.4 Japan Metal and Hard Mask Etch System Major Customer

6.4.5 Japan Market Trend and Opportunities

7 Company Profiles and Key Figures

7.1 Lam Research

7.1.1 Lam Research Company Information

7.1.2 Lam Research Business Overview

7.1.3 Lam Research Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.1.4 Lam Research Metal and Hard Mask Etch System Products Offered

7.1.5 Lam Research Recent Development

7.2 Applied Materials

7.2.1 Applied Materials Company Information

7.2.2 Applied Materials Business Overview

7.2.3 Applied Materials Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.2.4 Applied Materials Metal and Hard Mask Etch System Products Offered

7.2.5 Applied Materials Recent Development

7.3 Hitachi High-tech

7.3.1 Hitachi High-tech Company Information

7.3.2 Hitachi High-tech Business Overview

7.3.3 Hitachi High-tech Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.3.4 Hitachi High-tech Metal and Hard Mask Etch System Products Offered

7.3.5 Hitachi High-tech Recent Development

7.4 Tokyo Electron

7.4.1 Tokyo Electron Company Information

7.4.2 Tokyo Electron Business Overview

7.4.3 Tokyo Electron Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.4.4 Tokyo Electron Metal and Hard Mask Etch System Products Offered

7.4.5 Tokyo Electron Recent Development

7.5 Oxford Instruments

7.5.1 Oxford Instruments Company Information

7.5.2 Oxford Instruments Business Overview

7.5.3 Oxford Instruments Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.5.4 Oxford Instruments Metal and Hard Mask Etch System Products Offered

7.5.5 Oxford Instruments Recent Development

7.6 NAURA Technology Group

7.6.1 NAURA Technology Group Company Information

7.6.2 NAURA Technology Group Business Overview

7.6.3 NAURA Technology Group Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.6.4 NAURA Technology Group Metal and Hard Mask Etch System Products Offered

7.6.5 NAURA Technology Group Recent Development

7.7 SPTS Technologies Ltd.

7.7.1 SPTS Technologies Ltd. Company Information

7.7.2 SPTS Technologies Ltd. Business Overview

7.7.3 SPTS Technologies Ltd. Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.7.4 SPTS Technologies Ltd. Metal and Hard Mask Etch System Products Offered

7.7.5 SPTS Technologies Ltd. Recent Development

7.8 AMEC

7.8.1 AMEC Company Information

7.8.2 AMEC Business Overview

7.8.3 AMEC Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.8.4 AMEC Metal and Hard Mask Etch System Products Offered

7.8.5 AMEC Recent Development

7.9 Ulvac

7.9.1 Ulvac Company Information

7.9.2 Ulvac Business Overview

7.9.3 Ulvac Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.9.4 Ulvac Metal and Hard Mask Etch System Products Offered

7.9.5 Ulvac Recent Development

7.10 Samco

7.10.1 Samco Company Information

7.10.2 Samco Business Overview

7.10.3 Samco Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.10.4 Samco Metal and Hard Mask Etch System Products Offered

7.10.5 Samco Recent Development

7.11 Plasma Therm

7.11.1 Plasma Therm Company Information

7.11.2 Plasma Therm Business Overview

7.11.3 Plasma Therm Metal and Hard Mask Etch System Sales, Revenue and Gross Margin (2020-2025)

7.11.4 Plasma Therm Metal and Hard Mask Etch System Products Offered

7.11.5 Plasma Therm Recent Development

8 Metal and Hard Mask Etch System Manufacturing Cost Analysis

8.1 Metal and Hard Mask Etch System Key Raw Materials Analysis

8.1.1 Key Raw Materials

8.1.2 Key Suppliers of Raw Materials

8.2 Proportion of Manufacturing Cost Structure

8.3 Manufacturing Process Analysis of Metal and Hard Mask Etch System

8.4 Metal and Hard Mask Etch System Industrial Chain Analysis

9 Marketing Channel, Distributors and Customers

9.1 Marketing Channel

9.2 Metal and Hard Mask Etch System Distributors List

9.3 Metal and Hard Mask Etch System Customers

10 Metal and Hard Mask Etch System Market Dynamics

10.1 Metal and Hard Mask Etch System Industry Trends

10.2 Metal and Hard Mask Etch System Market Drivers

10.3 Metal and Hard Mask Etch System Market Challenges

10.4 Metal and Hard Mask Etch System Market Restraints

11 Research Findings and Conclusion

12 Appendix

12.1 Research Methodology

12.1.1 Methodology/Research Approach

12.1.1.1 Research Programs/Design

12.1.1.2 Market Size Estimation

12.1.1.3 Market Breakdown and Data Triangulation

12.1.2 Data Source

12.1.2.1 Secondary Sources

12.1.2.2 Primary Sources

12.2 Author Details

12.3 Disclaimer

FEATURED COMPANIES

Hitachi High-tech

Tokyo Electron

NAURA Technology Group

SPTS Technologies Ltd.

AMEC plc

ULVAC

SAMCO

Plasma-Therm

Applied Materials

Lam Research

Oxford-Instruments

List of Tables

Table 1. Global Metal and Hard Mask Etch System Sales (US$ Million) Growth Rate by Type (2020 & 2024 & 2031)

Table 2. Global Metal and Hard Mask Etch System Sales (US$ Million) Comparison by Application (2020 & 2024 & 2031)

Table 3. Global Market Metal and Hard Mask Etch System Market Size (US$ Million) by Region:2020 VS 2024 VS 2031

Table 4. Global Metal and Hard Mask Etch System Sales (Units) by Region (2020-2025)

Table 5. Global Metal and Hard Mask Etch System Sales Market Share by Region (2020-2025)

Table 6. Global Metal and Hard Mask Etch System Revenue (US$ Million) Market Share by Region (2020-2025)

Table 7. Global Metal and Hard Mask Etch System Revenue Share by Region (2020-2025)

Table 8. Global Metal and Hard Mask Etch System Sales (Units) Forecast by Region (2026-2031)

Table 9. Global Metal and Hard Mask Etch System Sales Market Share Forecast by Region (2026-2031)

Table 10. Global Metal and Hard Mask Etch System Revenue (US$ Million) Forecast by Region (2026-2031)

Table 11. Global Metal and Hard Mask Etch System Revenue Share Forecast by Region (2026-2031)

Table 12. Global Metal and Hard Mask Etch System Sales by Type (Units) & (2020-2025)

Table 13. Global Metal and Hard Mask Etch System Sales Share by Type (2020-2025)

Table 14. Global Metal and Hard Mask Etch System Revenue by Type (US$ Million) & (2020-2025)

Table 15. Global Metal and Hard Mask Etch System Price by Type (K USD/Unit) & (2020-2025)

Table 16. Global Metal and Hard Mask Etch System Sales by Type (Units) & (2026-2031)

Table 17. Global Metal and Hard Mask Etch System Revenue by Type (US$ Million) & (2026-2031)

Table 18. Global Metal and Hard Mask Etch System Price by Type (K USD/Unit) & (2026-2031)

Table 19. Representative Players of Each Type

Table 20. Global Metal and Hard Mask Etch System Sales by Application (Units) & (2020-2025)

Table 21. Global Metal and Hard Mask Etch System Sales Share by Application (2020-2025)

Table 22. Global Metal and Hard Mask Etch System Revenue by Application (US$ Million) & (2020-2025)

Table 23. Global Metal and Hard Mask Etch System Price by Application (K USD/Unit) & (2020-2025)

Table 24. Global Metal and Hard Mask Etch System Sales by Application (Units) & (2026-2031)

Table 25. Global Metal and Hard Mask Etch System Revenue Market Share by Application (US$ Million) & (2026-2031)

Table 26. Global Metal and Hard Mask Etch System Price by Application (K USD/Unit) & (2026-2031)

Table 27. New Sources of Growth in Metal and Hard Mask Etch System Application

Table 28. Global Metal and Hard Mask Etch System Sales by Company (Units) & (2020-2025)

Table 29. Global Metal and Hard Mask Etch System Sales Share by Company (2020-2025)

Table 30. Global Metal and Hard Mask Etch System Revenue by Company (US$ Million) & (2020-2025)

Table 31. Global Metal and Hard Mask Etch System Revenue Share by Company (2020-2025)

Table 32. Global Metal and Hard Mask Etch System by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Metal and Hard Mask Etch System as of 2024)

Table 33. Global Market Metal and Hard Mask Etch System Average Price by Company (K USD/Unit) & (2020-2025)

Table 34. Global Key Manufacturers of Metal and Hard Mask Etch System, Manufacturing Sites & Headquarters

Table 35. Global Key Manufacturers of Metal and Hard Mask Etch System, Product Type & Application

Table 36. Global Key Manufacturers of Metal and Hard Mask Etch System, Date of Enter into This Industry

Table 37. Manufacturers Mergers & Acquisitions, Expansion Plans

Table 38. North America Metal and Hard Mask Etch System Sales by Company (2020-2025) & (Units)

Table 39. North America Metal and Hard Mask Etch System Sales Market Share by Company (2020-2025)

Table 40. North America Metal and Hard Mask Etch System Revenue by Company (2020-2025) & (US$ Million)

Table 41. North America Metal and Hard Mask Etch System Revenue Market Share by Company (2020-2025)

Table 42. North America Metal and Hard Mask Etch System Sales by Type (2020-2025) & (Units)

Table 43. North America Metal and Hard Mask Etch System Sales Market Share by Type (2020-2025)

Table 44. North America Metal and Hard Mask Etch System Sales by Application (2020-2025) & (Units)

Table 45. North America Metal and Hard Mask Etch System Sales Market Share by Application (2020-2025)

Table 46. Europe Metal and Hard Mask Etch System Sales by Company (2020-2025) & (Units)

Table 47. Europe Metal and Hard Mask Etch System Sales Market Share by Company (2020-2025)

Table 48. Europe Metal and Hard Mask Etch System Revenue by Company (2020-2025) & (US$ Million)

Table 49. Europe Metal and Hard Mask Etch System Revenue Market Share by Company (2020-2025)

Table 50. Europe Metal and Hard Mask Etch System Sales by Type (2020-2025) & (Units)

Table 51. Europe Metal and Hard Mask Etch System Sales Market Share by Type (2020-2025)

Table 52. Europe Metal and Hard Mask Etch System Sales by Application (2020-2025) & (Units)

Table 53. Europe Metal and Hard Mask Etch System Sales Market Share by Application (2020-2025)

Table 54. China Metal and Hard Mask Etch System Sales by Company (2020-2025) & (Units)

Table 55. China Metal and Hard Mask Etch System Sales Market Share by Company (2020-2025)

Table 56. China Metal and Hard Mask Etch System Revenue by Company (2020-2025) & (US$ Million)

Table 57. China Metal and Hard Mask Etch System Revenue Market Share by Company (2020-2025)

Table 58. China Metal and Hard Mask Etch System Sales by Type (2020-2025) & (Units)

Table 59. China Metal and Hard Mask Etch System Sales Market Share by Type (2020-2025)

Table 60. China Metal and Hard Mask Etch System Sales by Application (2020-2025) & (Units)

Table 61. China Metal and Hard Mask Etch System Sales Market Share by Application (2020-2025)

Table 62. Japan Metal and Hard Mask Etch System Sales by Company (2020-2025) & (Units)

Table 63. Japan Metal and Hard Mask Etch System Sales Market Share by Company (2020-2025)

Table 64. Japan Metal and Hard Mask Etch System Revenue by Company (2020-2025) & (US$ Million)

Table 65. Japan Metal and Hard Mask Etch System Revenue Market Share by Company (2020-2025)

Table 66. Japan Metal and Hard Mask Etch System Sales by Type (2020-2025) & (Units)

Table 67. Japan Metal and Hard Mask Etch System Sales Market Share by Type (2020-2025)

Table 68. Japan Metal and Hard Mask Etch System Sales by Application (2020-2025) & (Units)

Table 69. Japan Metal and Hard Mask Etch System Sales Market Share by Application (2020-2025)

Table 70. Lam Research Company Information

Table 71. Lam Research Description and Business Overview

Table 72. Lam Research Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 73. Lam Research Metal and Hard Mask Etch System Product

Table 74. Lam Research Recent Development

Table 75. Applied Materials Company Information

Table 76. Applied Materials Description and Business Overview

Table 77. Applied Materials Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 78. Applied Materials Metal and Hard Mask Etch System Product

Table 79. Applied Materials Recent Development

Table 80. Hitachi High-tech Company Information

Table 81. Hitachi High-tech Description and Business Overview

Table 82. Hitachi High-tech Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 83. Hitachi High-tech Metal and Hard Mask Etch System Product

Table 84. Hitachi High-tech Recent Development

Table 85. Tokyo Electron Company Information

Table 86. Tokyo Electron Description and Business Overview

Table 87. Tokyo Electron Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 88. Tokyo Electron Metal and Hard Mask Etch System Product

Table 89. Tokyo Electron Recent Development

Table 90. Oxford Instruments Company Information

Table 91. Oxford Instruments Description and Business Overview

Table 92. Oxford Instruments Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 93. Oxford Instruments Metal and Hard Mask Etch System Product

Table 94. Oxford Instruments Recent Development

Table 95. NAURA Technology Group Company Information

Table 96. NAURA Technology Group Description and Business Overview

Table 97. NAURA Technology Group Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 98. NAURA Technology Group Metal and Hard Mask Etch System Product

Table 99. NAURA Technology Group Recent Development

Table 100. SPTS Technologies Ltd. Company Information

Table 101. SPTS Technologies Ltd. Description and Business Overview

Table 102. SPTS Technologies Ltd. Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 103. SPTS Technologies Ltd. Metal and Hard Mask Etch System Product

Table 104. SPTS Technologies Ltd. Recent Development

Table 105. AMEC Company Information

Table 106. AMEC Description and Business Overview

Table 107. AMEC Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 108. AMEC Metal and Hard Mask Etch System Product

Table 109. AMEC Recent Development

Table 110. Ulvac Company Information

Table 111. Ulvac Description and Business Overview

Table 112. Ulvac Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 113. Ulvac Metal and Hard Mask Etch System Product

Table 114. Ulvac Recent Development

Table 115. Samco Company Information

Table 116. Samco Description and Business Overview

Table 117. Samco Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 118. Samco Metal and Hard Mask Etch System Product

Table 119. Samco Recent Development

Table 120. Plasma Therm Company Information

Table 121. Plasma Therm Description and Business Overview

Table 122. Plasma Therm Metal and Hard Mask Etch System Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)

Table 123. Plasma Therm Metal and Hard Mask Etch System Product

Table 124. Plasma Therm Recent Development

Table 125. Production Base and Market Concentration Rate of Raw Material

Table 126. Key Suppliers of Raw Materials

Table 127. Metal and Hard Mask Etch System Distributors List

Table 128. Metal and Hard Mask Etch System Customers List

Table 129. Metal and Hard Mask Etch System Market Trends

Table 130. Metal and Hard Mask Etch System Market Drivers

Table 131. Metal and Hard Mask Etch System Market Challenges

Table 132. Metal and Hard Mask Etch System Market Restraints

Table 133. Research Programs/Design for This Report

Table 134. Key Data Information from Secondary Sources

Table 135. Key Data Information from Primary Sources

List of Figures

Figure 1. Metal and Hard Mask Etch System Product Picture

Figure 2. Global Metal and Hard Mask Etch System Sales (US$ Million) by Type (2020 & 2024 & 2031)

Figure 3. Global Metal and Hard Mask Etch System Sales Market Share by Type in 2024 & 2031

Figure 4. Silicon Etch Equipment Product Picture

Figure 5. Dielectric Etch Equipment Product Picture

Figure 6. Metal Etch Equipment Product Picture

Figure 7. Hard Mask Etch Equipment Product Picture

Figure 8. Global Metal and Hard Mask Etch System Sales (US$ Million) by Application (2020 & 2024 & 2031)

Figure 9. Global Metal and Hard Mask Etch System Sales Market Share by Application in 2024 & 2031

Figure 10. Front End of Line (FEOL) Examples

Figure 11. Back End of Line (BEOL) Examples

Figure 12. Global Metal and Hard Mask Etch System Sales, (US$ Million), 2020 VS 2024 VS 2031

Figure 13. Global Metal and Hard Mask Etch System Sales Growth Rate (2020-2031) & (US$ Million)

Figure 14. Global Metal and Hard Mask Etch System Sales (Units) Growth Rate (2020-2031)

Figure 15. Global Metal and Hard Mask Etch System Price Trends Growth Rate (2020-2031) & (K USD/Unit)

Figure 16. Metal and Hard Mask Etch System Report Years Considered

Figure 17. Global Market Metal and Hard Mask Etch System Market Size (US$ Million) by Region:2020 VS 2024 VS 2031

Figure 18. Global Metal and Hard Mask Etch System Revenue Market Share by Region: 2020 VS 2024

Figure 19. North America Metal and Hard Mask Etch System Revenue (US$ Million) Growth Rate (2020-2031)

Figure 20. North America Metal and Hard Mask Etch System Sales (Units) Growth Rate (2020-2031)

Figure 21. Europe Metal and Hard Mask Etch System Revenue (US$ Million) Growth Rate (2020-2031)

Figure 22. Europe Metal and Hard Mask Etch System Sales (Units) Growth Rate (2020-2031)

Figure 23. China Metal and Hard Mask Etch System Revenue (US$ Million) Growth Rate (2020-2031)

Figure 24. China Metal and Hard Mask Etch System Sales (Units) Growth Rate (2020-2031)

Figure 25. Japan Metal and Hard Mask Etch System Revenue (US$ Million) Growth Rate (2020-2031)

Figure 26. Japan Metal and Hard Mask Etch System Sales (Units) Growth Rate (2020-2031)

Figure 27. Global Metal and Hard Mask Etch System Revenue Share by Type (2020-2025)

Figure 28. Global Metal and Hard Mask Etch System Sales Share by Type (2026-2031)

Figure 29. Global Metal and Hard Mask Etch System Revenue Share by Type (2026-2031)

Figure 30. Global Metal and Hard Mask Etch System Revenue Share by Application (2020-2025)

Figure 31. Global Metal and Hard Mask Etch System Revenue Growth Rate by Application in 2020 & 2024

Figure 32. Global Metal and Hard Mask Etch System Sales Share by Application (2026-2031)

Figure 33. Global Metal and Hard Mask Etch System Revenue Share by Application (2026-2031)

Figure 34. Global Metal and Hard Mask Etch System Sales Share by Company (2024)

Figure 35. Global Metal and Hard Mask Etch System Revenue Share by Company (2024)

Figure 36. Global 5 Largest Metal and Hard Mask Etch System Players Market Share by Revenue in Metal and Hard Mask Etch System: 2020 & 2024

Figure 37. Metal and Hard Mask Etch System Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024

Figure 38. Manufacturing Cost Structure of Metal and Hard Mask Etch System

Figure 39. Manufacturing Process Analysis of Metal and Hard Mask Etch System

Figure 40. Metal and Hard Mask Etch System Industrial Chain

Figure 41. Channels of Distribution (Direct Vs Distribution)

Figure 42. Distributors Profiles

Figure 43. Bottom-up and Top-down Approaches for This Report

Figure 44. Data Triangulation

Figure 45. Key Executives Interviewed

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