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Global Wafer Dry Etch System Market Research Report 2025
Published Date: March 2025
|
Report Code: QYRE-Auto-16G12941
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Global Wafer Dry Etch System Market Research Report 2023
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Global Wafer Dry Etch System Market Research Report 2025

Code: QYRE-Auto-16G12941
Report
March 2025
Pages:103
QYResearch
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DESCRIPTION
TABLE OF CONTENT
TABLES & FIGURES

Wafer Dry Etch System Market

The global market for Wafer Dry Etch System was valued at US$ million in the year 2024 and is projected to reach a revised size of US$ million by 2031, growing at a CAGR of %during the forecast period.
Following a strong growth of 26.2 percent in the year 2021, WSTS revised it down to a single digit growth for the worldwide semiconductor market in 2022 with a total size of US$580 billion, up 4.4 percent. WSTS lowered growth estimation as inflation rises and end markets seeing weaker demand, especially those exposed to consumer spending. While some major categories are still double-digit year-over-year growth in 2022, led by Analog with 20.8 percent, Sensors with 16.3 percent, and Logic with 14.5 percent growth. Memory declined with 12.6 percent year over year. In 2022, all geographical regions showed double-digit growth except Asia Pacific. The largest region, Asia Pacific, declined 2.0 percent. Sales in the Americas were US$142.1 billion, up 17.0% year-on-year, sales in Europe were US$53.8 billion, up 12.6% year-on-year, and sales in Japan were US$48.1 billion, up 10.0% year-on-year. However, sales in the largest Asia-Pacific region were US$336.2 billion, down 2.0% year-on-year.

Report Scope

This report aims to provide a comprehensive presentation of the global market for Wafer Dry Etch System, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Wafer Dry Etch System.
The Wafer Dry Etch System market size, estimations, and forecasts are provided in terms of output/shipments (Units) and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global Wafer Dry Etch System market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the Wafer Dry Etch System manufacturers, new entrants, and industry chain related companies in this market with information on the revenues, production, and average price for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Market Segmentation

Scope of Wafer Dry Etch System Market Report

Report Metric Details
Report Name Wafer Dry Etch System Market
by Type
  • Chemical Etching (Vapor Phase Etching)
  • Physical Etching (Sputter Etching)
  • Chemical & Physical Etching (Reactive Ion Etching-RIE)
by Application
  • MEMS
  • Photonic Device
  • Power Devices
  • RF-IC
  • Others
Production by Region
  • North America
  • Europe
  • China
  • Japan
  • South Korea
Consumption by Region
  • North America (United States, Canada)
  • Europe (Germany, France, UK, Italy, Russia)
  • Asia-Pacific (China, Japan, South Korea, Taiwan)
  • Southeast Asia (India)
  • Latin America (Mexico, Brazil)
By Company Lam Research, TEL, Applied Materials, Hitachi High-Technologies, Oxford Instruments, SPTS Technologies, Plasma-Therm, GigaLane, SAMCO, ULVAC, Inc., SENTECH Instruments GmbH, Trion Technology, AMEC, NAURA
Forecast units USD million in value
Report coverage Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

  • Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
  • Chapter 2: Detailed analysis of Wafer Dry Etch System manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
  • Chapter 3: Production/output, value of Wafer Dry Etch System by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
  • Chapter 4: Consumption of Wafer Dry Etch System in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
  • Chapter 5: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
  • Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
  • Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
  • Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
  • Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
  • Chapter 10: The main points and conclusions of the report.

FAQ for this report

What is the Wafer Dry Etch System Market share by region?

Ans: Sales in the Americas were US$142.1 billion, up 17.0% year-on-year, sales in Europe were US$53.8 billion, up 12.6% year-on-year, and sales in Japan were US$48.1 billion, up 10.0% year-on-year.

Who are the main players in the Wafer Dry Etch System Market report?

Ans: The main players in the Wafer Dry Etch System Market are Lam Research, TEL, Applied Materials, Hitachi High-Technologies, Oxford Instruments, SPTS Technologies, Plasma-Therm, GigaLane, SAMCO, ULVAC, Inc., SENTECH Instruments GmbH, Trion Technology, AMEC, NAURA

What are the Application segmentation covered in the Wafer Dry Etch System Market report?

Ans: The Applications covered in the Wafer Dry Etch System Market report are MEMS, Photonic Device, Power Devices, RF-IC, Others

What are the Type segmentation covered in the Wafer Dry Etch System Market report?

Ans: The Types covered in the Wafer Dry Etch System Market report are Chemical Etching (Vapor Phase Etching), Physical Etching (Sputter Etching), Chemical & Physical Etching (Reactive Ion Etching-RIE)

1 Wafer Dry Etch System Market Overview
1.1 Product Definition
1.2 Wafer Dry Etch System by Type
1.2.1 Global Wafer Dry Etch System Market Value Growth Rate Analysis by Type: 2024 VS 2031
1.2.2 Chemical Etching (Vapor Phase Etching)
1.2.3 Physical Etching (Sputter Etching)
1.2.4 Chemical & Physical Etching (Reactive Ion Etching-RIE)
1.3 Wafer Dry Etch System by Application
1.3.1 Global Wafer Dry Etch System Market Value Growth Rate Analysis by Application: 2024 VS 2031
1.3.2 MEMS
1.3.3 Photonic Device
1.3.4 Power Devices
1.3.5 RF-IC
1.3.6 Others
1.4 Global Market Growth Prospects
1.4.1 Global Wafer Dry Etch System Production Value Estimates and Forecasts (2020-2031)
1.4.2 Global Wafer Dry Etch System Production Capacity Estimates and Forecasts (2020-2031)
1.4.3 Global Wafer Dry Etch System Production Estimates and Forecasts (2020-2031)
1.4.4 Global Wafer Dry Etch System Market Average Price Estimates and Forecasts (2020-2031)
1.5 Assumptions and Limitations
2 Market Competition by Manufacturers
2.1 Global Wafer Dry Etch System Production Market Share by Manufacturers (2020-2025)
2.2 Global Wafer Dry Etch System Production Value Market Share by Manufacturers (2020-2025)
2.3 Global Key Players of Wafer Dry Etch System, Industry Ranking, 2023 VS 2024
2.4 Global Wafer Dry Etch System Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
2.5 Global Wafer Dry Etch System Average Price by Manufacturers (2020-2025)
2.6 Global Key Manufacturers of Wafer Dry Etch System, Manufacturing Base Distribution and Headquarters
2.7 Global Key Manufacturers of Wafer Dry Etch System, Product Offered and Application
2.8 Global Key Manufacturers of Wafer Dry Etch System, Date of Enter into This Industry
2.9 Wafer Dry Etch System Market Competitive Situation and Trends
2.9.1 Wafer Dry Etch System Market Concentration Rate
2.9.2 Global 5 and 10 Largest Wafer Dry Etch System Players Market Share by Revenue
2.10 Mergers & Acquisitions, Expansion
3 Wafer Dry Etch System Production by Region
3.1 Global Wafer Dry Etch System Production Value Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.2 Global Wafer Dry Etch System Production Value by Region (2020-2031)
3.2.1 Global Wafer Dry Etch System Production Value by Region (2020-2025)
3.2.2 Global Forecasted Production Value of Wafer Dry Etch System by Region (2026-2031)
3.3 Global Wafer Dry Etch System Production Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.4 Global Wafer Dry Etch System Production Volume by Region (2020-2031)
3.4.1 Global Wafer Dry Etch System Production by Region (2020-2025)
3.4.2 Global Forecasted Production of Wafer Dry Etch System by Region (2026-2031)
3.5 Global Wafer Dry Etch System Market Price Analysis by Region (2020-2025)
3.6 Global Wafer Dry Etch System Production and Value, Year-over-Year Growth
3.6.1 North America Wafer Dry Etch System Production Value Estimates and Forecasts (2020-2031)
3.6.2 Europe Wafer Dry Etch System Production Value Estimates and Forecasts (2020-2031)
3.6.3 China Wafer Dry Etch System Production Value Estimates and Forecasts (2020-2031)
3.6.4 Japan Wafer Dry Etch System Production Value Estimates and Forecasts (2020-2031)
3.6.5 South Korea Wafer Dry Etch System Production Value Estimates and Forecasts (2020-2031)
4 Wafer Dry Etch System Consumption by Region
4.1 Global Wafer Dry Etch System Consumption Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
4.2 Global Wafer Dry Etch System Consumption by Region (2020-2031)
4.2.1 Global Wafer Dry Etch System Consumption by Region (2020-2025)
4.2.2 Global Wafer Dry Etch System Forecasted Consumption by Region (2026-2031)
4.3 North America
4.3.1 North America Wafer Dry Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.3.2 North America Wafer Dry Etch System Consumption by Country (2020-2031)
4.3.3 U.S.
4.3.4 Canada
4.4 Europe
4.4.1 Europe Wafer Dry Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.4.2 Europe Wafer Dry Etch System Consumption by Country (2020-2031)
4.4.3 Germany
4.4.4 France
4.4.5 U.K.
4.4.6 Italy
4.4.7 Netherlands
4.5 Asia Pacific
4.5.1 Asia Pacific Wafer Dry Etch System Consumption Growth Rate by Region: 2020 VS 2024 VS 2031
4.5.2 Asia Pacific Wafer Dry Etch System Consumption by Region (2020-2031)
4.5.3 China
4.5.4 Japan
4.5.5 South Korea
4.5.6 China Taiwan
4.5.7 Southeast Asia
4.5.8 India
4.6 Latin America, Middle East & Africa
4.6.1 Latin America, Middle East & Africa Wafer Dry Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.6.2 Latin America, Middle East & Africa Wafer Dry Etch System Consumption by Country (2020-2031)
4.6.3 Mexico
4.6.4 Brazil
4.6.5 Israel
5 Segment by Type
5.1 Global Wafer Dry Etch System Production by Type (2020-2031)
5.1.1 Global Wafer Dry Etch System Production by Type (2020-2025)
5.1.2 Global Wafer Dry Etch System Production by Type (2026-2031)
5.1.3 Global Wafer Dry Etch System Production Market Share by Type (2020-2031)
5.2 Global Wafer Dry Etch System Production Value by Type (2020-2031)
5.2.1 Global Wafer Dry Etch System Production Value by Type (2020-2025)
5.2.2 Global Wafer Dry Etch System Production Value by Type (2026-2031)
5.2.3 Global Wafer Dry Etch System Production Value Market Share by Type (2020-2031)
5.3 Global Wafer Dry Etch System Price by Type (2020-2031)
6 Segment by Application
6.1 Global Wafer Dry Etch System Production by Application (2020-2031)
6.1.1 Global Wafer Dry Etch System Production by Application (2020-2025)
6.1.2 Global Wafer Dry Etch System Production by Application (2026-2031)
6.1.3 Global Wafer Dry Etch System Production Market Share by Application (2020-2031)
6.2 Global Wafer Dry Etch System Production Value by Application (2020-2031)
6.2.1 Global Wafer Dry Etch System Production Value by Application (2020-2025)
6.2.2 Global Wafer Dry Etch System Production Value by Application (2026-2031)
6.2.3 Global Wafer Dry Etch System Production Value Market Share by Application (2020-2031)
6.3 Global Wafer Dry Etch System Price by Application (2020-2031)
7 Key Companies Profiled
7.1 Lam Research
7.1.1 Lam Research Wafer Dry Etch System Company Information
7.1.2 Lam Research Wafer Dry Etch System Product Portfolio
7.1.3 Lam Research Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.1.4 Lam Research Main Business and Markets Served
7.1.5 Lam Research Recent Developments/Updates
7.2 TEL
7.2.1 TEL Wafer Dry Etch System Company Information
7.2.2 TEL Wafer Dry Etch System Product Portfolio
7.2.3 TEL Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.2.4 TEL Main Business and Markets Served
7.2.5 TEL Recent Developments/Updates
7.3 Applied Materials
7.3.1 Applied Materials Wafer Dry Etch System Company Information
7.3.2 Applied Materials Wafer Dry Etch System Product Portfolio
7.3.3 Applied Materials Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.3.4 Applied Materials Main Business and Markets Served
7.3.5 Applied Materials Recent Developments/Updates
7.4 Hitachi High-Technologies
7.4.1 Hitachi High-Technologies Wafer Dry Etch System Company Information
7.4.2 Hitachi High-Technologies Wafer Dry Etch System Product Portfolio
7.4.3 Hitachi High-Technologies Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.4.4 Hitachi High-Technologies Main Business and Markets Served
7.4.5 Hitachi High-Technologies Recent Developments/Updates
7.5 Oxford Instruments
7.5.1 Oxford Instruments Wafer Dry Etch System Company Information
7.5.2 Oxford Instruments Wafer Dry Etch System Product Portfolio
7.5.3 Oxford Instruments Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.5.4 Oxford Instruments Main Business and Markets Served
7.5.5 Oxford Instruments Recent Developments/Updates
7.6 SPTS Technologies
7.6.1 SPTS Technologies Wafer Dry Etch System Company Information
7.6.2 SPTS Technologies Wafer Dry Etch System Product Portfolio
7.6.3 SPTS Technologies Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.6.4 SPTS Technologies Main Business and Markets Served
7.6.5 SPTS Technologies Recent Developments/Updates
7.7 Plasma-Therm
7.7.1 Plasma-Therm Wafer Dry Etch System Company Information
7.7.2 Plasma-Therm Wafer Dry Etch System Product Portfolio
7.7.3 Plasma-Therm Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.7.4 Plasma-Therm Main Business and Markets Served
7.7.5 Plasma-Therm Recent Developments/Updates
7.8 GigaLane
7.8.1 GigaLane Wafer Dry Etch System Company Information
7.8.2 GigaLane Wafer Dry Etch System Product Portfolio
7.8.3 GigaLane Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.8.4 GigaLane Main Business and Markets Served
7.8.5 GigaLane Recent Developments/Updates
7.9 SAMCO
7.9.1 SAMCO Wafer Dry Etch System Company Information
7.9.2 SAMCO Wafer Dry Etch System Product Portfolio
7.9.3 SAMCO Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.9.4 SAMCO Main Business and Markets Served
7.9.5 SAMCO Recent Developments/Updates
7.10 ULVAC, Inc.
7.10.1 ULVAC, Inc. Wafer Dry Etch System Company Information
7.10.2 ULVAC, Inc. Wafer Dry Etch System Product Portfolio
7.10.3 ULVAC, Inc. Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.10.4 ULVAC, Inc. Main Business and Markets Served
7.10.5 ULVAC, Inc. Recent Developments/Updates
7.11 SENTECH Instruments GmbH
7.11.1 SENTECH Instruments GmbH Wafer Dry Etch System Company Information
7.11.2 SENTECH Instruments GmbH Wafer Dry Etch System Product Portfolio
7.11.3 SENTECH Instruments GmbH Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.11.4 SENTECH Instruments GmbH Main Business and Markets Served
7.11.5 SENTECH Instruments GmbH Recent Developments/Updates
7.12 Trion Technology
7.12.1 Trion Technology Wafer Dry Etch System Company Information
7.12.2 Trion Technology Wafer Dry Etch System Product Portfolio
7.12.3 Trion Technology Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.12.4 Trion Technology Main Business and Markets Served
7.12.5 Trion Technology Recent Developments/Updates
7.13 AMEC
7.13.1 AMEC Wafer Dry Etch System Company Information
7.13.2 AMEC Wafer Dry Etch System Product Portfolio
7.13.3 AMEC Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.13.4 AMEC Main Business and Markets Served
7.13.5 AMEC Recent Developments/Updates
7.14 NAURA
7.14.1 NAURA Wafer Dry Etch System Company Information
7.14.2 NAURA Wafer Dry Etch System Product Portfolio
7.14.3 NAURA Wafer Dry Etch System Production, Value, Price and Gross Margin (2020-2025)
7.14.4 NAURA Main Business and Markets Served
7.14.5 NAURA Recent Developments/Updates
8 Industry Chain and Sales Channels Analysis
8.1 Wafer Dry Etch System Industry Chain Analysis
8.2 Wafer Dry Etch System Raw Material Supply Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.3 Wafer Dry Etch System Production Mode & Process Analysis
8.4 Wafer Dry Etch System Sales and Marketing
8.4.1 Wafer Dry Etch System Sales Channels
8.4.2 Wafer Dry Etch System Distributors
8.5 Wafer Dry Etch System Customer Analysis
9 Wafer Dry Etch System Market Dynamics
9.1 Wafer Dry Etch System Industry Trends
9.2 Wafer Dry Etch System Market Drivers
9.3 Wafer Dry Etch System Market Challenges
9.4 Wafer Dry Etch System Market Restraints
10 Research Findings and Conclusion
11 Methodology and Data Source
11.1 Methodology/Research Approach
11.1.1 Research Programs/Design
11.1.2 Market Size Estimation
11.1.3 Market Breakdown and Data Triangulation
11.2 Data Source
11.2.1 Secondary Sources
11.2.2 Primary Sources
11.3 Author List
11.4 Disclaimer
List of Tables
 Table 1. Global Wafer Dry Etch System Market Value by Type, (US$ Million) & (2024 VS 2031)
 Table 2. Global Wafer Dry Etch System Market Value by Application, (US$ Million) & (2024 VS 2031)
 Table 3. Global Wafer Dry Etch System Production Capacity (Units) by Manufacturers in 2024
 Table 4. Global Wafer Dry Etch System Production by Manufacturers (2020-2025) & (Units)
 Table 5. Global Wafer Dry Etch System Production Market Share by Manufacturers (2020-2025)
 Table 6. Global Wafer Dry Etch System Production Value by Manufacturers (2020-2025) & (US$ Million)
 Table 7. Global Wafer Dry Etch System Production Value Share by Manufacturers (2020-2025)
 Table 8. Global Key Players of Wafer Dry Etch System, Industry Ranking, 2023 VS 2024
 Table 9. Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value in Wafer Dry Etch System as of 2024)
 Table 10. Global Market Wafer Dry Etch System Average Price by Manufacturers (K US$/Unit) & (2020-2025)
 Table 11. Global Key Manufacturers of Wafer Dry Etch System, Manufacturing Base Distribution and Headquarters
 Table 12. Global Key Manufacturers of Wafer Dry Etch System, Product Offered and Application
 Table 13. Global Key Manufacturers of Wafer Dry Etch System, Date of Enter into This Industry
 Table 14. Global Wafer Dry Etch System Manufacturers Market Concentration Ratio (CR5 and HHI)
 Table 15. Mergers & Acquisitions, Expansion Plans
 Table 16. Global Wafer Dry Etch System Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Table 17. Global Wafer Dry Etch System Production Value (US$ Million) by Region (2020-2025)
 Table 18. Global Wafer Dry Etch System Production Value Market Share by Region (2020-2025)
 Table 19. Global Wafer Dry Etch System Production Value (US$ Million) Forecast by Region (2026-2031)
 Table 20. Global Wafer Dry Etch System Production Value Market Share Forecast by Region (2026-2031)
 Table 21. Global Wafer Dry Etch System Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)
 Table 22. Global Wafer Dry Etch System Production (Units) by Region (2020-2025)
 Table 23. Global Wafer Dry Etch System Production Market Share by Region (2020-2025)
 Table 24. Global Wafer Dry Etch System Production (Units) Forecast by Region (2026-2031)
 Table 25. Global Wafer Dry Etch System Production Market Share Forecast by Region (2026-2031)
 Table 26. Global Wafer Dry Etch System Market Average Price (K US$/Unit) by Region (2020-2025)
 Table 27. Global Wafer Dry Etch System Market Average Price (K US$/Unit) by Region (2026-2031)
 Table 28. Global Wafer Dry Etch System Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)
 Table 29. Global Wafer Dry Etch System Consumption by Region (2020-2025) & (Units)
 Table 30. Global Wafer Dry Etch System Consumption Market Share by Region (2020-2025)
 Table 31. Global Wafer Dry Etch System Forecasted Consumption by Region (2026-2031) & (Units)
 Table 32. Global Wafer Dry Etch System Forecasted Consumption Market Share by Region (2026-2031)
 Table 33. North America Wafer Dry Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 34. North America Wafer Dry Etch System Consumption by Country (2020-2025) & (Units)
 Table 35. North America Wafer Dry Etch System Consumption by Country (2026-2031) & (Units)
 Table 36. Europe Wafer Dry Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 37. Europe Wafer Dry Etch System Consumption by Country (2020-2025) & (Units)
 Table 38. Europe Wafer Dry Etch System Consumption by Country (2026-2031) & (Units)
 Table 39. Asia Pacific Wafer Dry Etch System Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)
 Table 40. Asia Pacific Wafer Dry Etch System Consumption by Region (2020-2025) & (Units)
 Table 41. Asia Pacific Wafer Dry Etch System Consumption by Region (2026-2031) & (Units)
 Table 42. Latin America, Middle East & Africa Wafer Dry Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 43. Latin America, Middle East & Africa Wafer Dry Etch System Consumption by Country (2020-2025) & (Units)
 Table 44. Latin America, Middle East & Africa Wafer Dry Etch System Consumption by Country (2026-2031) & (Units)
 Table 45. Global Wafer Dry Etch System Production (Units) by Type (2020-2025)
 Table 46. Global Wafer Dry Etch System Production (Units) by Type (2026-2031)
 Table 47. Global Wafer Dry Etch System Production Market Share by Type (2020-2025)
 Table 48. Global Wafer Dry Etch System Production Market Share by Type (2026-2031)
 Table 49. Global Wafer Dry Etch System Production Value (US$ Million) by Type (2020-2025)
 Table 50. Global Wafer Dry Etch System Production Value (US$ Million) by Type (2026-2031)
 Table 51. Global Wafer Dry Etch System Production Value Market Share by Type (2020-2025)
 Table 52. Global Wafer Dry Etch System Production Value Market Share by Type (2026-2031)
 Table 53. Global Wafer Dry Etch System Price (K US$/Unit) by Type (2020-2025)
 Table 54. Global Wafer Dry Etch System Price (K US$/Unit) by Type (2026-2031)
 Table 55. Global Wafer Dry Etch System Production (Units) by Application (2020-2025)
 Table 56. Global Wafer Dry Etch System Production (Units) by Application (2026-2031)
 Table 57. Global Wafer Dry Etch System Production Market Share by Application (2020-2025)
 Table 58. Global Wafer Dry Etch System Production Market Share by Application (2026-2031)
 Table 59. Global Wafer Dry Etch System Production Value (US$ Million) by Application (2020-2025)
 Table 60. Global Wafer Dry Etch System Production Value (US$ Million) by Application (2026-2031)
 Table 61. Global Wafer Dry Etch System Production Value Market Share by Application (2020-2025)
 Table 62. Global Wafer Dry Etch System Production Value Market Share by Application (2026-2031)
 Table 63. Global Wafer Dry Etch System Price (K US$/Unit) by Application (2020-2025)
 Table 64. Global Wafer Dry Etch System Price (K US$/Unit) by Application (2026-2031)
 Table 65. Lam Research Wafer Dry Etch System Company Information
 Table 66. Lam Research Wafer Dry Etch System Specification and Application
 Table 67. Lam Research Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 68. Lam Research Main Business and Markets Served
 Table 69. Lam Research Recent Developments/Updates
 Table 70. TEL Wafer Dry Etch System Company Information
 Table 71. TEL Wafer Dry Etch System Specification and Application
 Table 72. TEL Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 73. TEL Main Business and Markets Served
 Table 74. TEL Recent Developments/Updates
 Table 75. Applied Materials Wafer Dry Etch System Company Information
 Table 76. Applied Materials Wafer Dry Etch System Specification and Application
 Table 77. Applied Materials Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 78. Applied Materials Main Business and Markets Served
 Table 79. Applied Materials Recent Developments/Updates
 Table 80. Hitachi High-Technologies Wafer Dry Etch System Company Information
 Table 81. Hitachi High-Technologies Wafer Dry Etch System Specification and Application
 Table 82. Hitachi High-Technologies Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 83. Hitachi High-Technologies Main Business and Markets Served
 Table 84. Hitachi High-Technologies Recent Developments/Updates
 Table 85. Oxford Instruments Wafer Dry Etch System Company Information
 Table 86. Oxford Instruments Wafer Dry Etch System Specification and Application
 Table 87. Oxford Instruments Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 88. Oxford Instruments Main Business and Markets Served
 Table 89. Oxford Instruments Recent Developments/Updates
 Table 90. SPTS Technologies Wafer Dry Etch System Company Information
 Table 91. SPTS Technologies Wafer Dry Etch System Specification and Application
 Table 92. SPTS Technologies Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 93. SPTS Technologies Main Business and Markets Served
 Table 94. SPTS Technologies Recent Developments/Updates
 Table 95. Plasma-Therm Wafer Dry Etch System Company Information
 Table 96. Plasma-Therm Wafer Dry Etch System Specification and Application
 Table 97. Plasma-Therm Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 98. Plasma-Therm Main Business and Markets Served
 Table 99. Plasma-Therm Recent Developments/Updates
 Table 100. GigaLane Wafer Dry Etch System Company Information
 Table 101. GigaLane Wafer Dry Etch System Specification and Application
 Table 102. GigaLane Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 103. GigaLane Main Business and Markets Served
 Table 104. GigaLane Recent Developments/Updates
 Table 105. SAMCO Wafer Dry Etch System Company Information
 Table 106. SAMCO Wafer Dry Etch System Specification and Application
 Table 107. SAMCO Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 108. SAMCO Main Business and Markets Served
 Table 109. SAMCO Recent Developments/Updates
 Table 110. ULVAC, Inc. Wafer Dry Etch System Company Information
 Table 111. ULVAC, Inc. Wafer Dry Etch System Specification and Application
 Table 112. ULVAC, Inc. Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 113. ULVAC, Inc. Main Business and Markets Served
 Table 114. ULVAC, Inc. Recent Developments/Updates
 Table 115. SENTECH Instruments GmbH Wafer Dry Etch System Company Information
 Table 116. SENTECH Instruments GmbH Wafer Dry Etch System Specification and Application
 Table 117. SENTECH Instruments GmbH Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 118. SENTECH Instruments GmbH Main Business and Markets Served
 Table 119. SENTECH Instruments GmbH Recent Developments/Updates
 Table 120. Trion Technology Wafer Dry Etch System Company Information
 Table 121. Trion Technology Wafer Dry Etch System Specification and Application
 Table 122. Trion Technology Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 123. Trion Technology Main Business and Markets Served
 Table 124. Trion Technology Recent Developments/Updates
 Table 125. AMEC Wafer Dry Etch System Company Information
 Table 126. AMEC Wafer Dry Etch System Specification and Application
 Table 127. AMEC Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 128. AMEC Main Business and Markets Served
 Table 129. AMEC Recent Developments/Updates
 Table 130. NAURA Wafer Dry Etch System Company Information
 Table 131. NAURA Wafer Dry Etch System Specification and Application
 Table 132. NAURA Wafer Dry Etch System Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2020-2025)
 Table 133. NAURA Main Business and Markets Served
 Table 134. NAURA Recent Developments/Updates
 Table 135. Key Raw Materials Lists
 Table 136. Raw Materials Key Suppliers Lists
 Table 137. Wafer Dry Etch System Distributors List
 Table 138. Wafer Dry Etch System Customers List
 Table 139. Wafer Dry Etch System Market Trends
 Table 140. Wafer Dry Etch System Market Drivers
 Table 141. Wafer Dry Etch System Market Challenges
 Table 142. Wafer Dry Etch System Market Restraints
 Table 143. Research Programs/Design for This Report
 Table 144. Key Data Information from Secondary Sources
 Table 145. Key Data Information from Primary Sources
 Table 146. Authors List of This Report


List of Figures
 Figure 1. Product Picture of Wafer Dry Etch System
 Figure 2. Global Wafer Dry Etch System Market Value by Type, (US$ Million) & (2020-2031)
 Figure 3. Global Wafer Dry Etch System Market Share by Type: 2024 VS 2031
 Figure 4. Chemical Etching (Vapor Phase Etching) Product Picture
 Figure 5. Physical Etching (Sputter Etching) Product Picture
 Figure 6. Chemical & Physical Etching (Reactive Ion Etching-RIE) Product Picture
 Figure 7. Global Wafer Dry Etch System Market Value by Application, (US$ Million) & (2020-2031)
 Figure 8. Global Wafer Dry Etch System Market Share by Application: 2024 VS 2031
 Figure 9. MEMS
 Figure 10. Photonic Device
 Figure 11. Power Devices
 Figure 12. RF-IC
 Figure 13. Others
 Figure 14. Global Wafer Dry Etch System Production Value (US$ Million), 2020 VS 2024 VS 2031
 Figure 15. Global Wafer Dry Etch System Production Value (US$ Million) & (2020-2031)
 Figure 16. Global Wafer Dry Etch System Production Capacity (Units) & (2020-2031)
 Figure 17. Global Wafer Dry Etch System Production (Units) & (2020-2031)
 Figure 18. Global Wafer Dry Etch System Average Price (K US$/Unit) & (2020-2031)
 Figure 19. Wafer Dry Etch System Report Years Considered
 Figure 20. Wafer Dry Etch System Production Share by Manufacturers in 2024
 Figure 21. Global Wafer Dry Etch System Production Value Share by Manufacturers (2024)
 Figure 22. Wafer Dry Etch System Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
 Figure 23. The Global 5 and 10 Largest Players: Market Share by Wafer Dry Etch System Revenue in 2024
 Figure 24. Global Wafer Dry Etch System Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Figure 25. Global Wafer Dry Etch System Production Value Market Share by Region: 2020 VS 2024 VS 2031
 Figure 26. Global Wafer Dry Etch System Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)
 Figure 27. Global Wafer Dry Etch System Production Market Share by Region: 2020 VS 2024 VS 2031
 Figure 28. North America Wafer Dry Etch System Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 29. Europe Wafer Dry Etch System Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 30. China Wafer Dry Etch System Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 31. Japan Wafer Dry Etch System Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 32. South Korea Wafer Dry Etch System Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 33. Global Wafer Dry Etch System Consumption by Region: 2020 VS 2024 VS 2031 (Units)
 Figure 34. Global Wafer Dry Etch System Consumption Market Share by Region: 2020 VS 2024 VS 2031
 Figure 35. North America Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 36. North America Wafer Dry Etch System Consumption Market Share by Country (2020-2031)
 Figure 37. U.S. Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 38. Canada Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 39. Europe Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 40. Europe Wafer Dry Etch System Consumption Market Share by Country (2020-2031)
 Figure 41. Germany Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 42. France Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 43. U.K. Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 44. Italy Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 45. Netherlands Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 46. Asia Pacific Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 47. Asia Pacific Wafer Dry Etch System Consumption Market Share by Region (2020-2031)
 Figure 48. China Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 49. Japan Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 50. South Korea Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 51. China Taiwan Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 52. Southeast Asia Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 53. India Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 54. Latin America, Middle East & Africa Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 55. Latin America, Middle East & Africa Wafer Dry Etch System Consumption Market Share by Country (2020-2031)
 Figure 56. Mexico Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 57. Brazil Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 58. Israel Wafer Dry Etch System Consumption and Growth Rate (2020-2031) & (Units)
 Figure 59. Global Production Market Share of Wafer Dry Etch System by Type (2020-2031)
 Figure 60. Global Production Value Market Share of Wafer Dry Etch System by Type (2020-2031)
 Figure 61. Global Wafer Dry Etch System Price (K US$/Unit) by Type (2020-2031)
 Figure 62. Global Production Market Share of Wafer Dry Etch System by Application (2020-2031)
 Figure 63. Global Production Value Market Share of Wafer Dry Etch System by Application (2020-2031)
 Figure 64. Global Wafer Dry Etch System Price (K US$/Unit) by Application (2020-2031)
 Figure 65. Wafer Dry Etch System Value Chain
 Figure 66. Channels of Distribution (Direct Vs Distribution)
 Figure 67. Bottom-up and Top-down Approaches for This Report
 Figure 68. Data Triangulation
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