Global OES Endpoint Detection System Market Research Report 2025

OES Endpoint Detection System Market

OES (Optical Emission Spectroscopy) Endpoint Detection Systems are in-situ plasma monitoring devices used in semiconductor manufacturing to determine the precise moment when an etching, cleaning, or deposition process has reached its target endpoint. These systems analyze the optical emission spectrum of the plasma inside etch or deposition chambers—monitoring intensity changes at specific wavelengths associated with process byproducts—to identify layer-to-layer transitions, prevent over-etch or under-etch, improve uniformity, and protect wafer yield. The industry chain begins upstream with suppliers of spectrometers, diffraction gratings, optical fibers, CCD/CMOS detectors, plasma-resistant optical windows, signal-processing electronics, motion/positioning parts, mechanical housings, and firmware/software development. Midstream consists of specialized OES endpoint detection manufacturers such as Verity Instruments, HORIBA, Oxford Instruments, Atonarp, and Spectral Products, who integrate sensors, optical modules, algorithms, and digital interfaces into complete endpoint detection units. Downstream, these systems are installed in semiconductor process equipment from Lam Research, TEL, Applied Materials, ASM, AMEC, NAURA, Oxford Instruments, and others to provide real-time process control in dry etching, plasma cleaning, PECVD, ALD/ALE, and wafer-transfer plasma steps. Due to high technical barriers and the critical impact on wafer yield, the industry average gross margin is relatively high—typically 40–55% for leading suppliers, 30–40% for mid-tier instrument companies, and 25–35% for lower-cost domestic suppliers. Production is not measured in “lines” but in assembly & calibration cells; a single manufacturing cell can typically produce 1,000–5,000 OES endpoint modules per year, depending on system complexity (simple spectrometer modules vs. complete advanced algorithms + multi-channel units). Overall, OES endpoint detection systems are a high-value, precision instrumentation category with strong demand growth driven by advanced node etching, tighter process windows, multi-patterning, and expansion of ALD/ALE applications in logic and memory fabrication.

North American market for OES Endpoint Detection System is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.

Asia-Pacific market for OES Endpoint Detection System is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.

The global market for OES Endpoint Detection System in Etching is estimated to increase from $ million in 2024 to $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.

The major global companies of OES Endpoint Detection System include HORIBA, Oxford Instruments, Spectral Products, Shanghai CheYiTian Technology, Verity Instruments, Ocean Optics, etc. In 2024, the world's top three vendors accounted for approximately % of the revenue.

This report aims to provide a comprehensive presentation of the global market for OES Endpoint Detection System, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding OES Endpoint Detection System.

The OES Endpoint Detection System market size, estimations, and forecasts are provided in terms of and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global OES Endpoint Detection System market comprehensively. Regional market sizes, concerning products by Type, by Application, by Product and by players, are also provided.

For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.

The report will help the OES Endpoint Detection System companies, new entrants, and industry chain related companies in this market with information on the revenues for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.

Market Segmentation

Scope of OES Endpoint Detection System Market Report

Chapter Outline

1.1 Study Scope

1.2 Market Analysis by Type

1.2.1 Global OES Endpoint Detection System Market Size Growth Rate by Type: 2020 VS 2024 VS 2031

1.2.2 Intensity-Based

1.2.3 Ratio-Based

1.3 Market by Product

1.3.1 Global OES Endpoint Detection System Market Size Growth Rate by Product: 2020 VS 2024 VS 2031

1.3.2 Single-Wavelength OES

1.3.3 Multi-Wavelength OES

1.4 Market by Application

1.4.1 Global OES Endpoint Detection System Market Growth by Application: 2020 VS 2024 VS 2031

1.4.2 Etching

1.4.3 Thin Film Deposition

1.4.4 Other

1.5 Assumptions and Limitations

1.6 Study Objectives

1.7 Years Considered

2.1 Global OES Endpoint Detection System Market Perspective (2020-2031)

2.2 Global OES Endpoint Detection System Growth Trends by Region

2.2.1 Global OES Endpoint Detection System Market Size by Region: 2020 VS 2024 VS 2031

2.2.2 OES Endpoint Detection System Historic Market Size by Region (2020-2025)

2.2.3 OES Endpoint Detection System Forecasted Market Size by Region (2026-2031)

2.3 OES Endpoint Detection System Market Dynamics

2.3.1 OES Endpoint Detection System Industry Trends

2.3.2 OES Endpoint Detection System Market Drivers

2.3.3 OES Endpoint Detection System Market Challenges

2.3.4 OES Endpoint Detection System Market Restraints

3.1 Global Top OES Endpoint Detection System Players by Revenue

3.1.1 Global Top OES Endpoint Detection System Players by Revenue (2020-2025)

3.1.2 Global OES Endpoint Detection System Revenue Market Share by Players (2020-2025)

3.2 Global Top OES Endpoint Detection System Players by Company Type and Market Share by Company Type (Tier 1, Tier 2, and Tier 3)

3.3 Global Key Players Ranking by OES Endpoint Detection System Revenue

3.4 Global OES Endpoint Detection System Market Concentration Ratio

3.4.1 Global OES Endpoint Detection System Market Concentration Ratio (CR5 and HHI)

3.4.2 Global Top 10 and Top 5 Companies by OES Endpoint Detection System Revenue in 2024

3.5 Global Key Players of OES Endpoint Detection System Head office and Area Served

3.6 Global Key Players of OES Endpoint Detection System, Product and Application

3.7 Global Key Players of OES Endpoint Detection System, Date of Enter into This Industry

3.8 Mergers & Acquisitions, Expansion Plans

4.1 Global OES Endpoint Detection System Historic Market Size by Type (2020-2025)

4.2 Global OES Endpoint Detection System Forecasted Market Size by Type (2026-2031)

5.1 Global OES Endpoint Detection System Historic Market Size by Application (2020-2025)

5.2 Global OES Endpoint Detection System Forecasted Market Size by Application (2026-2031)

6.1 North America OES Endpoint Detection System Market Size (2020-2031)

6.2 North America OES Endpoint Detection System Market Growth Rate by Country: 2020 VS 2024 VS 2031

6.3 North America OES Endpoint Detection System Market Size by Country (2020-2025)

6.4 North America OES Endpoint Detection System Market Size by Country (2026-2031)

6.5 United States

6.6 Canada

7.1 Europe OES Endpoint Detection System Market Size (2020-2031)

7.2 Europe OES Endpoint Detection System Market Growth Rate by Country: 2020 VS 2024 VS 2031

7.3 Europe OES Endpoint Detection System Market Size by Country (2020-2025)

7.4 Europe OES Endpoint Detection System Market Size by Country (2026-2031)

7.5 Germany

7.6 France

7.7 U.K.

7.8 Italy

7.9 Russia

7.10 Ireland

8.1 Asia-Pacific OES Endpoint Detection System Market Size (2020-2031)

8.2 Asia-Pacific OES Endpoint Detection System Market Growth Rate by Region: 2020 VS 2024 VS 2031

8.3 Asia-Pacific OES Endpoint Detection System Market Size by Region (2020-2025)

8.4 Asia-Pacific OES Endpoint Detection System Market Size by Region (2026-2031)

8.5 China

8.6 Japan

8.7 South Korea

8.8 Southeast Asia

8.9 India

8.10 Australia & New Zealand

9.1 Latin America OES Endpoint Detection System Market Size (2020-2031)

9.2 Latin America OES Endpoint Detection System Market Growth Rate by Country: 2020 VS 2024 VS 2031

9.3 Latin America OES Endpoint Detection System Market Size by Country (2020-2025)

9.4 Latin America OES Endpoint Detection System Market Size by Country (2026-2031)

9.5 Mexico

9.6 Brazil

10.1 Middle East & Africa OES Endpoint Detection System Market Size (2020-2031)

10.2 Middle East & Africa OES Endpoint Detection System Market Growth Rate by Country: 2020 VS 2024 VS 2031

10.3 Middle East & Africa OES Endpoint Detection System Market Size by Country (2020-2025)

10.4 Middle East & Africa OES Endpoint Detection System Market Size by Country (2026-2031)

10.5 Israel

10.6 Saudi Arabia

10.7 UAE

11.1 HORIBA

11.1.1 HORIBA Company Details

11.1.2 HORIBA Business Overview

11.1.3 HORIBA OES Endpoint Detection System Introduction

11.1.4 HORIBA Revenue in OES Endpoint Detection System Business (2020-2025)

11.1.5 HORIBA Recent Development

11.2 Oxford Instruments

11.2.1 Oxford Instruments Company Details

11.2.2 Oxford Instruments Business Overview

11.2.3 Oxford Instruments OES Endpoint Detection System Introduction

11.2.4 Oxford Instruments Revenue in OES Endpoint Detection System Business (2020-2025)

11.2.5 Oxford Instruments Recent Development

11.3 Spectral Products

11.3.1 Spectral Products Company Details

11.3.2 Spectral Products Business Overview

11.3.3 Spectral Products OES Endpoint Detection System Introduction

11.3.4 Spectral Products Revenue in OES Endpoint Detection System Business (2020-2025)

11.3.5 Spectral Products Recent Development

11.4 Shanghai CheYiTian Technology

11.4.1 Shanghai CheYiTian Technology Company Details

11.4.2 Shanghai CheYiTian Technology Business Overview

11.4.3 Shanghai CheYiTian Technology OES Endpoint Detection System Introduction

11.4.4 Shanghai CheYiTian Technology Revenue in OES Endpoint Detection System Business (2020-2025)

11.4.5 Shanghai CheYiTian Technology Recent Development

11.5 Verity Instruments

11.5.1 Verity Instruments Company Details

11.5.2 Verity Instruments Business Overview

11.5.3 Verity Instruments OES Endpoint Detection System Introduction

11.5.4 Verity Instruments Revenue in OES Endpoint Detection System Business (2020-2025)

11.5.5 Verity Instruments Recent Development

11.6 Ocean Optics

11.6.1 Ocean Optics Company Details

11.6.2 Ocean Optics Business Overview

11.6.3 Ocean Optics OES Endpoint Detection System Introduction

11.6.4 Ocean Optics Revenue in OES Endpoint Detection System Business (2020-2025)

11.6.5 Ocean Optics Recent Development

13.1 Research Methodology

13.1.1 Methodology/Research Approach

13.1.1.1 Research Programs/Design

13.1.1.2 Market Size Estimation

13.1.1.3 Market Breakdown and Data Triangulation

13.1.2 Data Source

13.1.2.1 Secondary Sources

13.1.2.2 Primary Sources

13.2 Author Details

13.3 Disclaimer

List of Tables

 Table 1. Global OES Endpoint Detection System Market Size Growth Rate by Type (US$ Million): 2020 VS 2024 VS 2031

 Table 2. Key Players of Intensity-Based

 Table 3. Key Players of Ratio-Based

 Table 4. Global OES Endpoint Detection System Market Size Growth Rate by Product (US$ Million): 2020 VS 2024 VS 2031

 Table 5. Key Players of Single-Wavelength OES

 Table 6. Key Players of Multi-Wavelength OES

 Table 7. Global OES Endpoint Detection System Market Size Growth by Application (US$ Million): 2020 VS 2024 VS 2031

 Table 8. Global OES Endpoint Detection System Market Size by Region (US$ Million): 2020 VS 2024 VS 2031

 Table 9. Global OES Endpoint Detection System Market Size by Region (2020-2025) & (US$ Million)

 Table 10. Global OES Endpoint Detection System Market Share by Region (2020-2025)

 Table 11. Global OES Endpoint Detection System Forecasted Market Size by Region (2026-2031) & (US$ Million)

 Table 12. Global OES Endpoint Detection System Market Share by Region (2026-2031)

 Table 13. OES Endpoint Detection System Market Trends

 Table 14. OES Endpoint Detection System Market Drivers

 Table 15. OES Endpoint Detection System Market Challenges

 Table 16. OES Endpoint Detection System Market Restraints

 Table 17. Global OES Endpoint Detection System Revenue by Players (2020-2025) & (US$ Million)

 Table 18. Global OES Endpoint Detection System Market Share by Players (2020-2025)

 Table 19. Global Top OES Endpoint Detection System Players by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in OES Endpoint Detection System as of 2024)

 Table 20. Ranking of Global Top OES Endpoint Detection System Companies by Revenue (US$ Million) in 2024

 Table 21. Global 5 Largest Players Market Share by OES Endpoint Detection System Revenue (CR5 and HHI) & (2020-2025)

 Table 22. Global Key Players of OES Endpoint Detection System, Headquarters and Area Served

 Table 23. Global Key Players of OES Endpoint Detection System, Product and Application

 Table 24. Global Key Players of OES Endpoint Detection System, Date of Enter into This Industry

 Table 25. Mergers & Acquisitions, Expansion Plans

 Table 26. Global OES Endpoint Detection System Market Size by Type (2020-2025) & (US$ Million)

 Table 27. Global OES Endpoint Detection System Revenue Market Share by Type (2020-2025)

 Table 28. Global OES Endpoint Detection System Forecasted Market Size by Type (2026-2031) & (US$ Million)

 Table 29. Global OES Endpoint Detection System Revenue Market Share by Type (2026-2031)

 Table 30. Global OES Endpoint Detection System Market Size by Application (2020-2025) & (US$ Million)

 Table 31. Global OES Endpoint Detection System Revenue Market Share by Application (2020-2025)

 Table 32. Global OES Endpoint Detection System Forecasted Market Size by Application (2026-2031) & (US$ Million)

 Table 33. Global OES Endpoint Detection System Revenue Market Share by Application (2026-2031)

 Table 34. North America OES Endpoint Detection System Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031

 Table 35. North America OES Endpoint Detection System Market Size by Country (2020-2025) & (US$ Million)

 Table 36. North America OES Endpoint Detection System Market Size by Country (2026-2031) & (US$ Million)

 Table 37. Europe OES Endpoint Detection System Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031

 Table 38. Europe OES Endpoint Detection System Market Size by Country (2020-2025) & (US$ Million)

 Table 39. Europe OES Endpoint Detection System Market Size by Country (2026-2031) & (US$ Million)

 Table 40. Asia-Pacific OES Endpoint Detection System Market Size Growth Rate by Region (US$ Million): 2020 VS 2024 VS 2031

 Table 41. Asia-Pacific OES Endpoint Detection System Market Size by Region (2020-2025) & (US$ Million)

 Table 42. Asia-Pacific OES Endpoint Detection System Market Size by Region (2026-2031) & (US$ Million)

 Table 43. Latin America OES Endpoint Detection System Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031

 Table 44. Latin America OES Endpoint Detection System Market Size by Country (2020-2025) & (US$ Million)

 Table 45. Latin America OES Endpoint Detection System Market Size by Country (2026-2031) & (US$ Million)

 Table 46. Middle East & Africa OES Endpoint Detection System Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031

 Table 47. Middle East & Africa OES Endpoint Detection System Market Size by Country (2020-2025) & (US$ Million)

 Table 48. Middle East & Africa OES Endpoint Detection System Market Size by Country (2026-2031) & (US$ Million)

 Table 49. HORIBA Company Details

 Table 50. HORIBA Business Overview

 Table 51. HORIBA OES Endpoint Detection System Product

 Table 52. HORIBA Revenue in OES Endpoint Detection System Business (2020-2025) & (US$ Million)

 Table 53. HORIBA Recent Development

 Table 54. Oxford Instruments Company Details

 Table 55. Oxford Instruments Business Overview

 Table 56. Oxford Instruments OES Endpoint Detection System Product

 Table 57. Oxford Instruments Revenue in OES Endpoint Detection System Business (2020-2025) & (US$ Million)

 Table 58. Oxford Instruments Recent Development

 Table 59. Spectral Products Company Details

 Table 60. Spectral Products Business Overview

 Table 61. Spectral Products OES Endpoint Detection System Product

 Table 62. Spectral Products Revenue in OES Endpoint Detection System Business (2020-2025) & (US$ Million)

 Table 63. Spectral Products Recent Development

 Table 64. Shanghai CheYiTian Technology Company Details

 Table 65. Shanghai CheYiTian Technology Business Overview

 Table 66. Shanghai CheYiTian Technology OES Endpoint Detection System Product

 Table 67. Shanghai CheYiTian Technology Revenue in OES Endpoint Detection System Business (2020-2025) & (US$ Million)

 Table 68. Shanghai CheYiTian Technology Recent Development

 Table 69. Verity Instruments Company Details

 Table 70. Verity Instruments Business Overview

 Table 71. Verity Instruments OES Endpoint Detection System Product

 Table 72. Verity Instruments Revenue in OES Endpoint Detection System Business (2020-2025) & (US$ Million)

 Table 73. Verity Instruments Recent Development

 Table 74. Ocean Optics Company Details

 Table 75. Ocean Optics Business Overview

 Table 76. Ocean Optics OES Endpoint Detection System Product

 Table 77. Ocean Optics Revenue in OES Endpoint Detection System Business (2020-2025) & (US$ Million)

 Table 78. Ocean Optics Recent Development

 Table 79. Research Programs/Design for This Report

 Table 80. Key Data Information from Secondary Sources

 Table 81. Key Data Information from Primary Sources

 Table 82. Authors List of This Report

List of Figures

 Figure 1. OES Endpoint Detection System Picture

 Figure 2. Global OES Endpoint Detection System Market Size Comparison by Type (2020-2031) & (US$ Million)

 Figure 3. Global OES Endpoint Detection System Market Share by Type: 2024 VS 2031

 Figure 4. Intensity-Based Features

 Figure 5. Ratio-Based Features

 Figure 6. Global OES Endpoint Detection System Market Size Comparison by Product (2020-2031) & (US$ Million)

 Figure 7. Single-Wavelength OES Features

 Figure 8. Multi-Wavelength OES Features

 Figure 9. Global OES Endpoint Detection System Market Size by Application (2020-2031) & (US$ Million)

 Figure 10. Global OES Endpoint Detection System Market Share by Application: 2024 VS 2031

 Figure 11. Etching Case Studies

 Figure 12. Thin Film Deposition Case Studies

 Figure 13. Other Case Studies

 Figure 14. OES Endpoint Detection System Report Years Considered

 Figure 15. Global OES Endpoint Detection System Market Size (US$ Million), Year-over-Year: 2020-2031

 Figure 16. Global OES Endpoint Detection System Market Size, (US$ Million), 2020 VS 2024 VS 2031

 Figure 17. Global OES Endpoint Detection System Market Share by Region: 2024 VS 2031

 Figure 18. Global OES Endpoint Detection System Market Share by Players in 2024

 Figure 19. Global OES Endpoint Detection System Market Share by Company Type (Tier 1, Tier 2, and Tier 3)

 Figure 20. The Top 10 and 5 Players Market Share by OES Endpoint Detection System Revenue in 2024

 Figure 21. North America OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 22. North America OES Endpoint Detection System Market Share by Country (2020-2031)

 Figure 23. United States OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 24. Canada OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 25. Europe OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 26. Europe OES Endpoint Detection System Market Share by Country (2020-2031)

 Figure 27. Germany OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 28. France OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 29. U.K. OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 30. Italy OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 31. Russia OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 32. Ireland OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 33. Asia-Pacific OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 34. Asia-Pacific OES Endpoint Detection System Market Share by Region (2020-2031)

 Figure 35. China OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 36. Japan OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 37. South Korea OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 38. Southeast Asia OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 39. India OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 40. Australia & New Zealand OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 41. Latin America OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 42. Latin America OES Endpoint Detection System Market Share by Country (2020-2031)

 Figure 43. Mexico OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 44. Brazil OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 45. Middle East & Africa OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 46. Middle East & Africa OES Endpoint Detection System Market Share by Country (2020-2031)

 Figure 47. Israel OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 48. Saudi Arabia OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 49. UAE OES Endpoint Detection System Market Size YoY Growth (2020-2031) & (US$ Million)

 Figure 50. HORIBA Revenue Growth Rate in OES Endpoint Detection System Business (2020-2025)

 Figure 51. Oxford Instruments Revenue Growth Rate in OES Endpoint Detection System Business (2020-2025)

 Figure 52. Spectral Products Revenue Growth Rate in OES Endpoint Detection System Business (2020-2025)

 Figure 53. Shanghai CheYiTian Technology Revenue Growth Rate in OES Endpoint Detection System Business (2020-2025)

 Figure 54. Verity Instruments Revenue Growth Rate in OES Endpoint Detection System Business (2020-2025)

 Figure 55. Ocean Optics Revenue Growth Rate in OES Endpoint Detection System Business (2020-2025)

 Figure 56. Bottom-up and Top-down Approaches for This Report

 Figure 57. Data Triangulation

 Figure 58. Key Executives Interviewed