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Global Dry Etching Equipment Market Research Report 2025
Published Date: April 2025
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Report Code: QYRE-Auto-22L8958
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Global Dry Etching Equipment Market Outlook 2022
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Global Dry Etching Equipment Market Research Report 2025

Code: QYRE-Auto-22L8958
Report
April 2025
Pages:99
QYResearch
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DESCRIPTION
TABLE OF CONTENT
TABLES & FIGURES

Dry Etching Equipment Market Size

The global market for Dry Etching Equipment was valued at US$ 12500 million in the year 2024 and is projected to reach a revised size of US$ 19190 million by 2031, growing at a CAGR of 6.4% during the forecast period.

Dry Etching Equipment Market

Dry Etching Equipment Market

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.
Currently, global production of Dry Etching Equipment is concentrated. The top three manufacturers held 92.16% of the market, in terms of Dry Etching Equipment sales value in 2019. As for the region, APAC is the largest consumption region, holding 76.07% sales revenue market share in 2019, followed by North America, with 13% market share.
With the continuous reduction of integrated circuit process, especially the production of 7nm-28nm advanced process, the demand for dry etching equipment continues to increase. Since DUV lithography machines are limited by the wavelength of light, wafer fabs need to adopt multiple mask processes and use etching processes to achieve smaller sizes. The etching process required for 7nm integrated circuit production is 140 times, which is 2.5 times the 40 times required for 28nm production.
Etching equipment accounts for the highest proportion in the global semiconductor equipment market.
Global competition:
The global etching equipment market presents a highly concentrated competition pattern, with international giants such as Lam Research, Applied Materials, and Tokyo Electron occupying a dominant position. These companies have advanced technology and rich customer resources and have strong competitiveness in the global market.
Chinese competition:
In the Chinese market, local companies such as AMEC and North Huachuang have strong competitiveness in the field of etching machines and have become leading companies in the domestic etching machine industry. These companies continue to increase R&D investment, improve product performance and technical level, and actively seize market share.
Technological progress:
With the continuous advancement of semiconductor technology, the line width of integrated circuits continues to decrease, and the requirements for etching equipment are getting higher and higher.
The development of 3D integrated circuits has promoted the development of etching technology. For example, the competition for the number of stacking layers of 3D NAND has put forward higher requirements for high aspect ratio etching and multi-stack stacking technology.
Market demand:
The rapid development of artificial intelligence, 5G, Internet of Things and other fields has driven the increase in demand for semiconductor chips, which in turn has promoted the growth of the etching equipment market.
Mainland China has become the world's largest semiconductor equipment market for four consecutive years, and the number of new wafer fab projects ranks first in the world, providing a broad development space for the dry etching equipment market.
Policy support:
The Chinese government has continuously issued relevant policies to support the development of the semiconductor industry, including increasing R&D investment and improving the localization rate, which will further promote the growth of the dry etching equipment market.
In summary, the dry etching equipment market has broad development prospects and huge market potential. With technological progress, increased market demand and continuous strengthening of policy support, the dry etching equipment market will continue to grow.

Report Scope

This report aims to provide a comprehensive presentation of the global market for Dry Etching Equipment, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Dry Etching Equipment.
The Dry Etching Equipment market size, estimations, and forecasts are provided in terms of output/shipments (Units) and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global Dry Etching Equipment market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the Dry Etching Equipment manufacturers, new entrants, and industry chain related companies in this market with information on the revenues, production, and average price for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Market Segmentation

Scope of Dry Etching Equipment Market Report

Report Metric Details
Report Name Dry Etching Equipment Market
Accounted market size in year US$ 12500 million
Forecasted market size in 2031 US$ 19190 million
CAGR 6.4%
Base Year year
Forecasted years 2025 - 2031
by Type
  • Inductively Coupled Plasma (ICP)
  • Capacitive Coupled Plasma (CCP)
  • Reactive Ion Etching (RIE)
  • Deep Reactive Ion Etching (DRIE)
  • Others
by Application
Production by Region
  • North America
  • Europe
  • China
  • Japan
  • South Korea
Consumption by Region
  • North America (United States, Canada)
  • Europe (Germany, France, UK, Italy, Russia)
  • Asia-Pacific (China, Japan, South Korea, Taiwan)
  • Southeast Asia (India)
  • Latin America (Mexico, Brazil)
By Company Lam Research, TEL, Applied Materials, Hitachi High-Technologies, Oxford Instruments, ULVAC, SPTS Technologies, GigaLane, Plasma-Therm, SAMCO, AMEC, NAURA
Forecast units USD million in value
Report coverage Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

  • Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
  • Chapter 2: Detailed analysis of Dry Etching Equipment manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
  • Chapter 3: Production/output, value of Dry Etching Equipment by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
  • Chapter 4: Consumption of Dry Etching Equipment in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
  • Chapter 5: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
  • Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
  • Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
  • Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
  • Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
  • Chapter 10: The main points and conclusions of the report.

FAQ for this report

How fast is Dry Etching Equipment Market growing?

Ans: The Dry Etching Equipment Market witnessing a CAGR of 6.4% during the forecast period 2025-2031.

What is the Dry Etching Equipment Market size in 2031?

Ans: The Dry Etching Equipment Market size in 2031 will be US$ 19190 million.

What is the market share of major companies in Dry Etching Equipment Market?

Ans: The top three manufacturers held 92.16% of the market, in terms of Dry Etching Equipment sales value in 2019.

What is the Dry Etching Equipment Market share by region?

Ans: As for the region, APAC is the largest consumption region, holding 76.07% sales revenue market share in 2019, followed by North America, with 13% market share.

Who are the main players in the Dry Etching Equipment Market report?

Ans: The main players in the Dry Etching Equipment Market are Lam Research, TEL, Applied Materials, Hitachi High-Technologies, Oxford Instruments, ULVAC, SPTS Technologies, GigaLane, Plasma-Therm, SAMCO, AMEC, NAURA

What are the Application segmentation covered in the Dry Etching Equipment Market report?

Ans: The Applications covered in the Dry Etching Equipment Market report are Logic and Memory, MEMS, Power Device, Others

What are the Type segmentation covered in the Dry Etching Equipment Market report?

Ans: The Types covered in the Dry Etching Equipment Market report are Inductively Coupled Plasma (ICP), Capacitive Coupled Plasma (CCP), Reactive Ion Etching (RIE), Deep Reactive Ion Etching (DRIE), Others

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1 Dry Etching Equipment Market Overview
1.1 Product Definition
1.2 Dry Etching Equipment by Type
1.2.1 Global Dry Etching Equipment Market Value Growth Rate Analysis by Type: 2024 VS 2031
1.2.2 Inductively Coupled Plasma (ICP)
1.2.3 Capacitive Coupled Plasma (CCP)
1.2.4 Reactive Ion Etching (RIE)
1.2.5 Deep Reactive Ion Etching (DRIE)
1.2.6 Others
1.3 Dry Etching Equipment by Application
1.3.1 Global Dry Etching Equipment Market Value Growth Rate Analysis by Application: 2024 VS 2031
1.3.2 Logic and Memory
1.3.3 MEMS
1.3.4 Power Device
1.3.5 Others
1.4 Global Market Growth Prospects
1.4.1 Global Dry Etching Equipment Production Value Estimates and Forecasts (2020-2031)
1.4.2 Global Dry Etching Equipment Production Capacity Estimates and Forecasts (2020-2031)
1.4.3 Global Dry Etching Equipment Production Estimates and Forecasts (2020-2031)
1.4.4 Global Dry Etching Equipment Market Average Price Estimates and Forecasts (2020-2031)
1.5 Assumptions and Limitations
2 Market Competition by Manufacturers
2.1 Global Dry Etching Equipment Production Market Share by Manufacturers (2020-2025)
2.2 Global Dry Etching Equipment Production Value Market Share by Manufacturers (2020-2025)
2.3 Global Key Players of Dry Etching Equipment, Industry Ranking, 2023 VS 2024
2.4 Global Dry Etching Equipment Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
2.5 Global Dry Etching Equipment Average Price by Manufacturers (2020-2025)
2.6 Global Key Manufacturers of Dry Etching Equipment, Manufacturing Base Distribution and Headquarters
2.7 Global Key Manufacturers of Dry Etching Equipment, Product Offered and Application
2.8 Global Key Manufacturers of Dry Etching Equipment, Date of Enter into This Industry
2.9 Dry Etching Equipment Market Competitive Situation and Trends
2.9.1 Dry Etching Equipment Market Concentration Rate
2.9.2 Global 5 and 10 Largest Dry Etching Equipment Players Market Share by Revenue
2.10 Mergers & Acquisitions, Expansion
3 Dry Etching Equipment Production by Region
3.1 Global Dry Etching Equipment Production Value Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.2 Global Dry Etching Equipment Production Value by Region (2020-2031)
3.2.1 Global Dry Etching Equipment Production Value by Region (2020-2025)
3.2.2 Global Forecasted Production Value of Dry Etching Equipment by Region (2026-2031)
3.3 Global Dry Etching Equipment Production Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.4 Global Dry Etching Equipment Production Volume by Region (2020-2031)
3.4.1 Global Dry Etching Equipment Production by Region (2020-2025)
3.4.2 Global Forecasted Production of Dry Etching Equipment by Region (2026-2031)
3.5 Global Dry Etching Equipment Market Price Analysis by Region (2020-2025)
3.6 Global Dry Etching Equipment Production and Value, Year-over-Year Growth
3.6.1 North America Dry Etching Equipment Production Value Estimates and Forecasts (2020-2031)
3.6.2 Europe Dry Etching Equipment Production Value Estimates and Forecasts (2020-2031)
3.6.3 China Dry Etching Equipment Production Value Estimates and Forecasts (2020-2031)
3.6.4 Japan Dry Etching Equipment Production Value Estimates and Forecasts (2020-2031)
3.6.5 South Korea Dry Etching Equipment Production Value Estimates and Forecasts (2020-2031)
4 Dry Etching Equipment Consumption by Region
4.1 Global Dry Etching Equipment Consumption Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
4.2 Global Dry Etching Equipment Consumption by Region (2020-2031)
4.2.1 Global Dry Etching Equipment Consumption by Region (2020-2025)
4.2.2 Global Dry Etching Equipment Forecasted Consumption by Region (2026-2031)
4.3 North America
4.3.1 North America Dry Etching Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.3.2 North America Dry Etching Equipment Consumption by Country (2020-2031)
4.3.3 U.S.
4.3.4 Canada
4.4 Europe
4.4.1 Europe Dry Etching Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.4.2 Europe Dry Etching Equipment Consumption by Country (2020-2031)
4.4.3 Germany
4.4.4 France
4.4.5 U.K.
4.4.6 Italy
4.4.7 Netherlands
4.5 Asia Pacific
4.5.1 Asia Pacific Dry Etching Equipment Consumption Growth Rate by Region: 2020 VS 2024 VS 2031
4.5.2 Asia Pacific Dry Etching Equipment Consumption by Region (2020-2031)
4.5.3 China
4.5.4 Japan
4.5.5 South Korea
4.5.6 China Taiwan
4.5.7 Southeast Asia
4.5.8 India
4.6 Latin America, Middle East & Africa
4.6.1 Latin America, Middle East & Africa Dry Etching Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.6.2 Latin America, Middle East & Africa Dry Etching Equipment Consumption by Country (2020-2031)
4.6.3 Mexico
4.6.4 Brazil
4.6.5 Israel
5 Segment by Type
5.1 Global Dry Etching Equipment Production by Type (2020-2031)
5.1.1 Global Dry Etching Equipment Production by Type (2020-2025)
5.1.2 Global Dry Etching Equipment Production by Type (2026-2031)
5.1.3 Global Dry Etching Equipment Production Market Share by Type (2020-2031)
5.2 Global Dry Etching Equipment Production Value by Type (2020-2031)
5.2.1 Global Dry Etching Equipment Production Value by Type (2020-2025)
5.2.2 Global Dry Etching Equipment Production Value by Type (2026-2031)
5.2.3 Global Dry Etching Equipment Production Value Market Share by Type (2020-2031)
5.3 Global Dry Etching Equipment Price by Type (2020-2031)
6 Segment by Application
6.1 Global Dry Etching Equipment Production by Application (2020-2031)
6.1.1 Global Dry Etching Equipment Production by Application (2020-2025)
6.1.2 Global Dry Etching Equipment Production by Application (2026-2031)
6.1.3 Global Dry Etching Equipment Production Market Share by Application (2020-2031)
6.2 Global Dry Etching Equipment Production Value by Application (2020-2031)
6.2.1 Global Dry Etching Equipment Production Value by Application (2020-2025)
6.2.2 Global Dry Etching Equipment Production Value by Application (2026-2031)
6.2.3 Global Dry Etching Equipment Production Value Market Share by Application (2020-2031)
6.3 Global Dry Etching Equipment Price by Application (2020-2031)
7 Key Companies Profiled
7.1 Lam Research
7.1.1 Lam Research Dry Etching Equipment Company Information
7.1.2 Lam Research Dry Etching Equipment Product Portfolio
7.1.3 Lam Research Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.1.4 Lam Research Main Business and Markets Served
7.1.5 Lam Research Recent Developments/Updates
7.2 TEL
7.2.1 TEL Dry Etching Equipment Company Information
7.2.2 TEL Dry Etching Equipment Product Portfolio
7.2.3 TEL Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.2.4 TEL Main Business and Markets Served
7.2.5 TEL Recent Developments/Updates
7.3 Applied Materials
7.3.1 Applied Materials Dry Etching Equipment Company Information
7.3.2 Applied Materials Dry Etching Equipment Product Portfolio
7.3.3 Applied Materials Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.3.4 Applied Materials Main Business and Markets Served
7.3.5 Applied Materials Recent Developments/Updates
7.4 Hitachi High-Technologies
7.4.1 Hitachi High-Technologies Dry Etching Equipment Company Information
7.4.2 Hitachi High-Technologies Dry Etching Equipment Product Portfolio
7.4.3 Hitachi High-Technologies Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.4.4 Hitachi High-Technologies Main Business and Markets Served
7.4.5 Hitachi High-Technologies Recent Developments/Updates
7.5 Oxford Instruments
7.5.1 Oxford Instruments Dry Etching Equipment Company Information
7.5.2 Oxford Instruments Dry Etching Equipment Product Portfolio
7.5.3 Oxford Instruments Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.5.4 Oxford Instruments Main Business and Markets Served
7.5.5 Oxford Instruments Recent Developments/Updates
7.6 ULVAC
7.6.1 ULVAC Dry Etching Equipment Company Information
7.6.2 ULVAC Dry Etching Equipment Product Portfolio
7.6.3 ULVAC Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.6.4 ULVAC Main Business and Markets Served
7.6.5 ULVAC Recent Developments/Updates
7.7 SPTS Technologies
7.7.1 SPTS Technologies Dry Etching Equipment Company Information
7.7.2 SPTS Technologies Dry Etching Equipment Product Portfolio
7.7.3 SPTS Technologies Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.7.4 SPTS Technologies Main Business and Markets Served
7.7.5 SPTS Technologies Recent Developments/Updates
7.8 GigaLane
7.8.1 GigaLane Dry Etching Equipment Company Information
7.8.2 GigaLane Dry Etching Equipment Product Portfolio
7.8.3 GigaLane Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.8.4 GigaLane Main Business and Markets Served
7.8.5 GigaLane Recent Developments/Updates
7.9 Plasma-Therm
7.9.1 Plasma-Therm Dry Etching Equipment Company Information
7.9.2 Plasma-Therm Dry Etching Equipment Product Portfolio
7.9.3 Plasma-Therm Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.9.4 Plasma-Therm Main Business and Markets Served
7.9.5 Plasma-Therm Recent Developments/Updates
7.10 SAMCO
7.10.1 SAMCO Dry Etching Equipment Company Information
7.10.2 SAMCO Dry Etching Equipment Product Portfolio
7.10.3 SAMCO Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.10.4 SAMCO Main Business and Markets Served
7.10.5 SAMCO Recent Developments/Updates
7.11 AMEC
7.11.1 AMEC Dry Etching Equipment Company Information
7.11.2 AMEC Dry Etching Equipment Product Portfolio
7.11.3 AMEC Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.11.4 AMEC Main Business and Markets Served
7.11.5 AMEC Recent Developments/Updates
7.12 NAURA
7.12.1 NAURA Dry Etching Equipment Company Information
7.12.2 NAURA Dry Etching Equipment Product Portfolio
7.12.3 NAURA Dry Etching Equipment Production, Value, Price and Gross Margin (2020-2025)
7.12.4 NAURA Main Business and Markets Served
7.12.5 NAURA Recent Developments/Updates
8 Industry Chain and Sales Channels Analysis
8.1 Dry Etching Equipment Industry Chain Analysis
8.2 Dry Etching Equipment Raw Material Supply Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.3 Dry Etching Equipment Production Mode & Process Analysis
8.4 Dry Etching Equipment Sales and Marketing
8.4.1 Dry Etching Equipment Sales Channels
8.4.2 Dry Etching Equipment Distributors
8.5 Dry Etching Equipment Customer Analysis
9 Dry Etching Equipment Market Dynamics
9.1 Dry Etching Equipment Industry Trends
9.2 Dry Etching Equipment Market Drivers
9.3 Dry Etching Equipment Market Challenges
9.4 Dry Etching Equipment Market Restraints
10 Research Findings and Conclusion
11 Methodology and Data Source
11.1 Methodology/Research Approach
11.1.1 Research Programs/Design
11.1.2 Market Size Estimation
11.1.3 Market Breakdown and Data Triangulation
11.2 Data Source
11.2.1 Secondary Sources
11.2.2 Primary Sources
11.3 Author List
11.4 Disclaimer
List of Tables
 Table 1. Global Dry Etching Equipment Market Value by Type, (US$ Million) & (2024 VS 2031)
 Table 2. Global Dry Etching Equipment Market Value by Application, (US$ Million) & (2024 VS 2031)
 Table 3. Global Dry Etching Equipment Production Capacity (Units) by Manufacturers in 2024
 Table 4. Global Dry Etching Equipment Production by Manufacturers (2020-2025) & (Units)
 Table 5. Global Dry Etching Equipment Production Market Share by Manufacturers (2020-2025)
 Table 6. Global Dry Etching Equipment Production Value by Manufacturers (2020-2025) & (US$ Million)
 Table 7. Global Dry Etching Equipment Production Value Share by Manufacturers (2020-2025)
 Table 8. Global Key Players of Dry Etching Equipment, Industry Ranking, 2023 VS 2024
 Table 9. Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value in Dry Etching Equipment as of 2024)
 Table 10. Global Market Dry Etching Equipment Average Price by Manufacturers (K USD/Unit) & (2020-2025)
 Table 11. Global Key Manufacturers of Dry Etching Equipment, Manufacturing Base Distribution and Headquarters
 Table 12. Global Key Manufacturers of Dry Etching Equipment, Product Offered and Application
 Table 13. Global Key Manufacturers of Dry Etching Equipment, Date of Enter into This Industry
 Table 14. Global Dry Etching Equipment Manufacturers Market Concentration Ratio (CR5 and HHI)
 Table 15. Mergers & Acquisitions, Expansion Plans
 Table 16. Global Dry Etching Equipment Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Table 17. Global Dry Etching Equipment Production Value (US$ Million) by Region (2020-2025)
 Table 18. Global Dry Etching Equipment Production Value Market Share by Region (2020-2025)
 Table 19. Global Dry Etching Equipment Production Value (US$ Million) Forecast by Region (2026-2031)
 Table 20. Global Dry Etching Equipment Production Value Market Share Forecast by Region (2026-2031)
 Table 21. Global Dry Etching Equipment Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)
 Table 22. Global Dry Etching Equipment Production (Units) by Region (2020-2025)
 Table 23. Global Dry Etching Equipment Production Market Share by Region (2020-2025)
 Table 24. Global Dry Etching Equipment Production (Units) Forecast by Region (2026-2031)
 Table 25. Global Dry Etching Equipment Production Market Share Forecast by Region (2026-2031)
 Table 26. Global Dry Etching Equipment Market Average Price (K USD/Unit) by Region (2020-2025)
 Table 27. Global Dry Etching Equipment Market Average Price (K USD/Unit) by Region (2026-2031)
 Table 28. Global Dry Etching Equipment Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)
 Table 29. Global Dry Etching Equipment Consumption by Region (2020-2025) & (Units)
 Table 30. Global Dry Etching Equipment Consumption Market Share by Region (2020-2025)
 Table 31. Global Dry Etching Equipment Forecasted Consumption by Region (2026-2031) & (Units)
 Table 32. Global Dry Etching Equipment Forecasted Consumption Market Share by Region (2026-2031)
 Table 33. North America Dry Etching Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 34. North America Dry Etching Equipment Consumption by Country (2020-2025) & (Units)
 Table 35. North America Dry Etching Equipment Consumption by Country (2026-2031) & (Units)
 Table 36. Europe Dry Etching Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 37. Europe Dry Etching Equipment Consumption by Country (2020-2025) & (Units)
 Table 38. Europe Dry Etching Equipment Consumption by Country (2026-2031) & (Units)
 Table 39. Asia Pacific Dry Etching Equipment Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)
 Table 40. Asia Pacific Dry Etching Equipment Consumption by Region (2020-2025) & (Units)
 Table 41. Asia Pacific Dry Etching Equipment Consumption by Region (2026-2031) & (Units)
 Table 42. Latin America, Middle East & Africa Dry Etching Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 43. Latin America, Middle East & Africa Dry Etching Equipment Consumption by Country (2020-2025) & (Units)
 Table 44. Latin America, Middle East & Africa Dry Etching Equipment Consumption by Country (2026-2031) & (Units)
 Table 45. Global Dry Etching Equipment Production (Units) by Type (2020-2025)
 Table 46. Global Dry Etching Equipment Production (Units) by Type (2026-2031)
 Table 47. Global Dry Etching Equipment Production Market Share by Type (2020-2025)
 Table 48. Global Dry Etching Equipment Production Market Share by Type (2026-2031)
 Table 49. Global Dry Etching Equipment Production Value (US$ Million) by Type (2020-2025)
 Table 50. Global Dry Etching Equipment Production Value (US$ Million) by Type (2026-2031)
 Table 51. Global Dry Etching Equipment Production Value Market Share by Type (2020-2025)
 Table 52. Global Dry Etching Equipment Production Value Market Share by Type (2026-2031)
 Table 53. Global Dry Etching Equipment Price (K USD/Unit) by Type (2020-2025)
 Table 54. Global Dry Etching Equipment Price (K USD/Unit) by Type (2026-2031)
 Table 55. Global Dry Etching Equipment Production (Units) by Application (2020-2025)
 Table 56. Global Dry Etching Equipment Production (Units) by Application (2026-2031)
 Table 57. Global Dry Etching Equipment Production Market Share by Application (2020-2025)
 Table 58. Global Dry Etching Equipment Production Market Share by Application (2026-2031)
 Table 59. Global Dry Etching Equipment Production Value (US$ Million) by Application (2020-2025)
 Table 60. Global Dry Etching Equipment Production Value (US$ Million) by Application (2026-2031)
 Table 61. Global Dry Etching Equipment Production Value Market Share by Application (2020-2025)
 Table 62. Global Dry Etching Equipment Production Value Market Share by Application (2026-2031)
 Table 63. Global Dry Etching Equipment Price (K USD/Unit) by Application (2020-2025)
 Table 64. Global Dry Etching Equipment Price (K USD/Unit) by Application (2026-2031)
 Table 65. Lam Research Dry Etching Equipment Company Information
 Table 66. Lam Research Dry Etching Equipment Specification and Application
 Table 67. Lam Research Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 68. Lam Research Main Business and Markets Served
 Table 69. Lam Research Recent Developments/Updates
 Table 70. TEL Dry Etching Equipment Company Information
 Table 71. TEL Dry Etching Equipment Specification and Application
 Table 72. TEL Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 73. TEL Main Business and Markets Served
 Table 74. TEL Recent Developments/Updates
 Table 75. Applied Materials Dry Etching Equipment Company Information
 Table 76. Applied Materials Dry Etching Equipment Specification and Application
 Table 77. Applied Materials Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 78. Applied Materials Main Business and Markets Served
 Table 79. Applied Materials Recent Developments/Updates
 Table 80. Hitachi High-Technologies Dry Etching Equipment Company Information
 Table 81. Hitachi High-Technologies Dry Etching Equipment Specification and Application
 Table 82. Hitachi High-Technologies Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 83. Hitachi High-Technologies Main Business and Markets Served
 Table 84. Hitachi High-Technologies Recent Developments/Updates
 Table 85. Oxford Instruments Dry Etching Equipment Company Information
 Table 86. Oxford Instruments Dry Etching Equipment Specification and Application
 Table 87. Oxford Instruments Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 88. Oxford Instruments Main Business and Markets Served
 Table 89. Oxford Instruments Recent Developments/Updates
 Table 90. ULVAC Dry Etching Equipment Company Information
 Table 91. ULVAC Dry Etching Equipment Specification and Application
 Table 92. ULVAC Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 93. ULVAC Main Business and Markets Served
 Table 94. ULVAC Recent Developments/Updates
 Table 95. SPTS Technologies Dry Etching Equipment Company Information
 Table 96. SPTS Technologies Dry Etching Equipment Specification and Application
 Table 97. SPTS Technologies Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 98. SPTS Technologies Main Business and Markets Served
 Table 99. SPTS Technologies Recent Developments/Updates
 Table 100. GigaLane Dry Etching Equipment Company Information
 Table 101. GigaLane Dry Etching Equipment Specification and Application
 Table 102. GigaLane Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 103. GigaLane Main Business and Markets Served
 Table 104. GigaLane Recent Developments/Updates
 Table 105. Plasma-Therm Dry Etching Equipment Company Information
 Table 106. Plasma-Therm Dry Etching Equipment Specification and Application
 Table 107. Plasma-Therm Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 108. Plasma-Therm Main Business and Markets Served
 Table 109. Plasma-Therm Recent Developments/Updates
 Table 110. SAMCO Dry Etching Equipment Company Information
 Table 111. SAMCO Dry Etching Equipment Specification and Application
 Table 112. SAMCO Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 113. SAMCO Main Business and Markets Served
 Table 114. SAMCO Recent Developments/Updates
 Table 115. AMEC Dry Etching Equipment Company Information
 Table 116. AMEC Dry Etching Equipment Specification and Application
 Table 117. AMEC Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 118. AMEC Main Business and Markets Served
 Table 119. AMEC Recent Developments/Updates
 Table 120. NAURA Dry Etching Equipment Company Information
 Table 121. NAURA Dry Etching Equipment Specification and Application
 Table 122. NAURA Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
 Table 123. NAURA Main Business and Markets Served
 Table 124. NAURA Recent Developments/Updates
 Table 125. Key Raw Materials Lists
 Table 126. Raw Materials Key Suppliers Lists
 Table 127. Dry Etching Equipment Distributors List
 Table 128. Dry Etching Equipment Customers List
 Table 129. Dry Etching Equipment Market Trends
 Table 130. Dry Etching Equipment Market Drivers
 Table 131. Dry Etching Equipment Market Challenges
 Table 132. Dry Etching Equipment Market Restraints
 Table 133. Research Programs/Design for This Report
 Table 134. Key Data Information from Secondary Sources
 Table 135. Key Data Information from Primary Sources
 Table 136. Authors List of This Report


List of Figures
 Figure 1. Product Picture of Dry Etching Equipment
 Figure 2. Global Dry Etching Equipment Market Value by Type, (US$ Million) & (2020-2031)
 Figure 3. Global Dry Etching Equipment Market Share by Type: 2024 VS 2031
 Figure 4. Inductively Coupled Plasma (ICP) Product Picture
 Figure 5. Capacitive Coupled Plasma (CCP) Product Picture
 Figure 6. Reactive Ion Etching (RIE) Product Picture
 Figure 7. Deep Reactive Ion Etching (DRIE) Product Picture
 Figure 8. Others Product Picture
 Figure 9. Global Dry Etching Equipment Market Value by Application, (US$ Million) & (2020-2031)
 Figure 10. Global Dry Etching Equipment Market Share by Application: 2024 VS 2031
 Figure 11. Logic and Memory
 Figure 12. MEMS
 Figure 13. Power Device
 Figure 14. Others
 Figure 15. Global Dry Etching Equipment Production Value (US$ Million), 2020 VS 2024 VS 2031
 Figure 16. Global Dry Etching Equipment Production Value (US$ Million) & (2020-2031)
 Figure 17. Global Dry Etching Equipment Production Capacity (Units) & (2020-2031)
 Figure 18. Global Dry Etching Equipment Production (Units) & (2020-2031)
 Figure 19. Global Dry Etching Equipment Average Price (K USD/Unit) & (2020-2031)
 Figure 20. Dry Etching Equipment Report Years Considered
 Figure 21. Dry Etching Equipment Production Share by Manufacturers in 2024
 Figure 22. Global Dry Etching Equipment Production Value Share by Manufacturers (2024)
 Figure 23. Dry Etching Equipment Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
 Figure 24. The Global 5 and 10 Largest Players: Market Share by Dry Etching Equipment Revenue in 2024
 Figure 25. Global Dry Etching Equipment Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Figure 26. Global Dry Etching Equipment Production Value Market Share by Region: 2020 VS 2024 VS 2031
 Figure 27. Global Dry Etching Equipment Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)
 Figure 28. Global Dry Etching Equipment Production Market Share by Region: 2020 VS 2024 VS 2031
 Figure 29. North America Dry Etching Equipment Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 30. Europe Dry Etching Equipment Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 31. China Dry Etching Equipment Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 32. Japan Dry Etching Equipment Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 33. South Korea Dry Etching Equipment Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 34. Global Dry Etching Equipment Consumption by Region: 2020 VS 2024 VS 2031 (Units)
 Figure 35. Global Dry Etching Equipment Consumption Market Share by Region: 2020 VS 2024 VS 2031
 Figure 36. North America Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 37. North America Dry Etching Equipment Consumption Market Share by Country (2020-2031)
 Figure 38. U.S. Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 39. Canada Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 40. Europe Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 41. Europe Dry Etching Equipment Consumption Market Share by Country (2020-2031)
 Figure 42. Germany Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 43. France Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 44. U.K. Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 45. Italy Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 46. Netherlands Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 47. Asia Pacific Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 48. Asia Pacific Dry Etching Equipment Consumption Market Share by Region (2020-2031)
 Figure 49. China Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 50. Japan Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 51. South Korea Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 52. China Taiwan Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 53. Southeast Asia Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 54. India Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 55. Latin America, Middle East & Africa Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 56. Latin America, Middle East & Africa Dry Etching Equipment Consumption Market Share by Country (2020-2031)
 Figure 57. Mexico Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 58. Brazil Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 59. Israel Dry Etching Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 60. Global Production Market Share of Dry Etching Equipment by Type (2020-2031)
 Figure 61. Global Production Value Market Share of Dry Etching Equipment by Type (2020-2031)
 Figure 62. Global Dry Etching Equipment Price (K USD/Unit) by Type (2020-2031)
 Figure 63. Global Production Market Share of Dry Etching Equipment by Application (2020-2031)
 Figure 64. Global Production Value Market Share of Dry Etching Equipment by Application (2020-2031)
 Figure 65. Global Dry Etching Equipment Price (K USD/Unit) by Application (2020-2031)
 Figure 66. Dry Etching Equipment Value Chain
 Figure 67. Channels of Distribution (Direct Vs Distribution)
 Figure 68. Bottom-up and Top-down Approaches for This Report
 Figure 69. Data Triangulation
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