List of Tables
Table 1. Global SiC Etching Equipment Market Value by Type (US$ Million), 2025 vs 2032
Table 2. Global SiC Etching Equipment Market Value by Application (US$ Million), 2025 vs 2032
Table 3. Global SiC Etching Equipment Production Capacity (Units) by Manufacturers in 2025
Table 4. Global SiC Etching Equipment Production by Manufacturers (Units), 2021–2026
Table 5. Global SiC Etching Equipment Production Market Share by Manufacturers (2021–2026)
Table 6. Global SiC Etching Equipment Production Value by Manufacturers (US$ Million), 2021–2026
Table 7. Global SiC Etching Equipment Production Value Share by Manufacturers (2021–2026)
Table 8. Global Key Players of SiC Etching Equipment, Industry Ranking, 2024 vs 2025
Table 9. Classification of Companies by Tier (Tier 1, Tier 2, Tier 3), based on SiC Etching Equipment Production Value, 2025
Table 10. Global Market SiC Etching Equipment Average Price by Manufacturers (US$/Unit), 2021–2026
Table 11. Global Key Manufacturers of SiC Etching Equipment, Manufacturing Footprints and Headquarters
Table 12. Global Key Manufacturers of SiC Etching Equipment, Product Offerings and Applications
Table 13. Global Key Manufacturers of SiC Etching Equipment, Date of Entry into the Industry
Table 14. Global SiC Etching Equipment Manufacturers Market Concentration Ratio (CR5 and HHI)
Table 15. Mergers & Acquisitions and Expansion Plans
Table 16. Global SiC Etching Equipment Production Value by Region: 2021 vs 2025 vs 2032 (US$ Million)
Table 17. Global SiC Etching Equipment Production Value (US$ Million) by Region (2021–2026)
Table 18. Global SiC Etching Equipment Production Value Market Share by Region (2021–2026)
Table 19. Global SiC Etching Equipment Production Value (US$ Million) Forecast by Region (2027–2032)
Table 20. Global SiC Etching Equipment Production Value Market Share Forecast by Region (2027–2032)
Table 21. Global SiC Etching Equipment Production Comparison by Region: 2021 vs 2025 vs 2032 (Units)
Table 22. Global SiC Etching Equipment Production (Units) by Region (2021–2026)
Table 23. Global SiC Etching Equipment Production Market Share by Region (2021–2026)
Table 24. Global SiC Etching Equipment Production (Units) Forecast by Region (2027–2032)
Table 25. Global SiC Etching Equipment Production Market Share Forecast by Region (2027–2032)
Table 26. Global SiC Etching Equipment Market Average Price (US$/Unit) by Region (2021–2026)
Table 27. Global SiC Etching Equipment Market Average Price (US$/Unit) by Region (2027–2032)
Table 28. Global SiC Etching Equipment Consumption Growth Rate by Region: 2021 vs 2025 vs 2032 (Units)
Table 29. Global SiC Etching Equipment Consumption by Region (Units), 2021–2026
Table 30. Global SiC Etching Equipment Consumption Market Share by Region (2021–2026)
Table 31. Global SiC Etching Equipment Forecasted Consumption by Region (Units), 2027–2032
Table 32. Global SiC Etching Equipment Forecasted Consumption Market Share by Region (2027–2032)
Table 33. North America SiC Etching Equipment Consumption Growth Rate by Country: 2021 vs 2025 vs 2032 (Units)
Table 34. North America SiC Etching Equipment Consumption by Country (Units), 2021–2026
Table 35. North America SiC Etching Equipment Consumption by Country (Units), 2027–2032
Table 36. Europe SiC Etching Equipment Consumption Growth Rate by Country: 2021 vs 2025 vs 2032 (Units)
Table 37. Europe SiC Etching Equipment Consumption by Country (Units), 2021–2026
Table 38. Europe SiC Etching Equipment Consumption by Country (Units), 2027–2032
Table 39. Asia Pacific SiC Etching Equipment Consumption Growth Rate by Region: 2021 vs 2025 vs 2032 (Units)
Table 40. Asia Pacific SiC Etching Equipment Consumption by Region (Units), 2021–2026
Table 41. Asia Pacific SiC Etching Equipment Consumption by Region (Units), 2027–2032
Table 42. Latin America, Middle East & Africa SiC Etching Equipment Consumption Growth Rate by Country: 2021 vs 2025 vs 2032 (Units)
Table 43. Latin America, Middle East & Africa SiC Etching Equipment Consumption by Country (Units), 2021–2026
Table 44. Latin America, Middle East & Africa SiC Etching Equipment Consumption by Country (Units), 2027–2032
Table 45. Global SiC Etching Equipment Production (Units) by Type (2021–2026)
Table 46. Global SiC Etching Equipment Production (Units) by Type (2027–2032)
Table 47. Global SiC Etching Equipment Production Market Share by Type (2021–2026)
Table 48. Global SiC Etching Equipment Production Market Share by Type (2027–2032)
Table 49. Global SiC Etching Equipment Production Value (US$ Million) by Type (2021–2026)
Table 50. Global SiC Etching Equipment Production Value (US$ Million) by Type (2027–2032)
Table 51. Global SiC Etching Equipment Production Value Market Share by Type (2021–2026)
Table 52. Global SiC Etching Equipment Production Value Market Share by Type (2027–2032)
Table 53. Global SiC Etching Equipment Price (US$/Unit) by Type (2021–2026)
Table 54. Global SiC Etching Equipment Price (US$/Unit) by Type (2027–2032)
Table 55. Global SiC Etching Equipment Production (Units) by Application (2021–2026)
Table 56. Global SiC Etching Equipment Production (Units) by Application (2027–2032)
Table 57. Global SiC Etching Equipment Production Market Share by Application (2021–2026)
Table 58. Global SiC Etching Equipment Production Market Share by Application (2027–2032)
Table 59. Global SiC Etching Equipment Production Value (US$ Million) by Application (2021–2026)
Table 60. Global SiC Etching Equipment Production Value (US$ Million) by Application (2027–2032)
Table 61. Global SiC Etching Equipment Production Value Market Share by Application (2021–2026)
Table 62. Global SiC Etching Equipment Production Value Market Share by Application (2027–2032)
Table 63. Global SiC Etching Equipment Price (US$/Unit) by Application (2021–2026)
Table 64. Global SiC Etching Equipment Price (US$/Unit) by Application (2027–2032)
Table 65. SPTS Technologies SiC Etching Equipment Company Information
Table 66. SPTS Technologies SiC Etching Equipment Specification and Application
Table 67. SPTS Technologies SiC Etching Equipment Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2021–2026)
Table 68. SPTS Technologies Main Business and Markets Served
Table 69. SPTS Technologies Recent Developments/Updates
Table 70. Tokyo Electron Ltd (TEL) SiC Etching Equipment Company Information
Table 71. Tokyo Electron Ltd (TEL) SiC Etching Equipment Specification and Application
Table 72. Tokyo Electron Ltd (TEL) SiC Etching Equipment Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2021–2026)
Table 73. Tokyo Electron Ltd (TEL) Main Business and Markets Served
Table 74. Tokyo Electron Ltd (TEL) Recent Developments/Updates
Table 75. Applied Materials SiC Etching Equipment Company Information
Table 76. Applied Materials SiC Etching Equipment Specification and Application
Table 77. Applied Materials SiC Etching Equipment Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2021–2026)
Table 78. Applied Materials Main Business and Markets Served
Table 79. Applied Materials Recent Developments/Updates
Table 80. Lam Research SiC Etching Equipment Company Information
Table 81. Lam Research SiC Etching Equipment Specification and Application
Table 82. Lam Research SiC Etching Equipment Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2021–2026)
Table 83. Lam Research Main Business and Markets Served
Table 84. Lam Research Recent Developments/Updates
Table 85. Mattson Technology, Inc. SiC Etching Equipment Company Information
Table 86. Mattson Technology, Inc. SiC Etching Equipment Specification and Application
Table 87. Mattson Technology, Inc. SiC Etching Equipment Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2021–2026)
Table 88. Mattson Technology, Inc. Main Business and Markets Served
Table 89. Mattson Technology, Inc. Recent Developments/Updates
Table 90. Trymax Semiconductor SiC Etching Equipment Company Information
Table 91. Trymax Semiconductor SiC Etching Equipment Specification and Application
Table 92. Trymax Semiconductor SiC Etching Equipment Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2021–2026)
Table 93. Trymax Semiconductor Main Business and Markets Served
Table 94. Trymax Semiconductor Recent Developments/Updates
Table 95. Tokyo Electron Ltd (TEL) SiC Etching Equipment Company Information
Table 96. Tokyo Electron Ltd (TEL) SiC Etching Equipment Specification and Application
Table 97. Tokyo Electron Ltd (TEL) SiC Etching Equipment Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2021–2026)
Table 98. Tokyo Electron Ltd (TEL) Main Business and Markets Served
Table 99. Tokyo Electron Ltd (TEL) Recent Developments/Updates
Table 100. Oxford Instruments SiC Etching Equipment Company Information
Table 101. Oxford Instruments SiC Etching Equipment Specification and Application
Table 102. Oxford Instruments SiC Etching Equipment Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2021–2026)
Table 103. Oxford Instruments Main Business and Markets Served
Table 104. Oxford Instruments Recent Developments/Updates
Table 105. Shanghai Weiyun Semiconductor Technology SiC Etching Equipment Company Information
Table 106. Shanghai Weiyun Semiconductor Technology SiC Etching Equipment Specification and Application
Table 107. Shanghai Weiyun Semiconductor Technology SiC Etching Equipment Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2021–2026)
Table 108. Shanghai Weiyun Semiconductor Technology Main Business and Markets Served
Table 109. Shanghai Weiyun Semiconductor Technology Recent Developments/Updates
Table 110. Key Raw Materials Lists
Table 111. Raw Materials Key Suppliers Lists
Table 112. SiC Etching Equipment Distributors List
Table 113. SiC Etching Equipment Customers List
Table 114. SiC Etching Equipment Market Trends
Table 115. SiC Etching Equipment Market Drivers
Table 116. SiC Etching Equipment Market Challenges
Table 117. SiC Etching Equipment Market Restraints
Table 118. Research Programs/Design for This Report
Table 119. Key Data Information from Secondary Sources
Table 120. Key Data Information from Primary Sources
Table 121. Authors List of This Report
List of Figures
Figure 1. Product Picture of SiC Etching Equipment
Figure 2. Global SiC Etching Equipment Market Value by Type (US$ Million), 2021–2032
Figure 3. Global SiC Etching Equipment Market Share by Type: 2025 vs 2032
Figure 4. SiC ICP Etching Equipment Product Picture
Figure 5. SiC CCP Etching Equipment Product Picture
Figure 6. Global SiC Etching Equipment Market Value by Application (US$ Million), 2021–2032
Figure 7. Global SiC Etching Equipment Market Share by Application: 2025 vs 2032
Figure 8. SiC Power Devices
Figure 9. GaN-on-SiC RF Devices
Figure 10. Global SiC Etching Equipment Production Value (US$ Million), 2021 vs 2025 vs 2032
Figure 11. Global SiC Etching Equipment Production Value (US$ Million), 2021–2032
Figure 12. Global SiC Etching Equipment Production Capacity (Units), 2021–2032
Figure 13. Global SiC Etching Equipment Production (Units), 2021–2032
Figure 14. Global SiC Etching Equipment Average Price (US$/Unit), 2021–2032
Figure 15. SiC Etching Equipment Report Years Considered
Figure 16. SiC Etching Equipment Production Share by Manufacturers in 2025
Figure 17. Global SiC Etching Equipment Production Value Share by Manufacturers (2025)
Figure 18. SiC Etching Equipment Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2021 vs 2025
Figure 19. Top 5 and Top 10 Global Players: Market Share by SiC Etching Equipment Revenue in 2025
Figure 20. Global SiC Etching Equipment Production Value by Region: 2021 vs 2025 vs 2032 (US$ Million)
Figure 21. Global SiC Etching Equipment Production Value Market Share by Region: 2021 vs 2025 vs 2032
Figure 22. Global SiC Etching Equipment Production Comparison by Region: 2021 vs 2025 vs 2032 (Units)
Figure 23. Global SiC Etching Equipment Production Market Share by Region: 2021 vs 2025 vs 2032
Figure 24. North America SiC Etching Equipment Production Value (US$ Million) Growth Rate (2021–2032)
Figure 25. Europe SiC Etching Equipment Production Value (US$ Million) Growth Rate (2021–2032)
Figure 26. China SiC Etching Equipment Production Value (US$ Million) Growth Rate (2021–2032)
Figure 27. Japan SiC Etching Equipment Production Value (US$ Million) Growth Rate (2021–2032)
Figure 28. South Korea SiC Etching Equipment Production Value (US$ Million) Growth Rate (2021–2032)
Figure 29. Global SiC Etching Equipment Consumption by Region: 2021 vs 2025 vs 2032 (Units)
Figure 30. Global SiC Etching Equipment Consumption Market Share by Region: 2021 vs 2025 vs 2032
Figure 31. North America SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 32. North America SiC Etching Equipment Consumption Market Share by Country (2021–2032)
Figure 33. U.S. SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 34. Canada SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 35. Europe SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 36. Europe SiC Etching Equipment Consumption Market Share by Country (2021–2032)
Figure 37. Germany SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 38. France SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 39. U.K. SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 40. Italy SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 41. Russia SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 42. Asia Pacific SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 43. Asia Pacific SiC Etching Equipment Consumption Market Share by Region (2021–2032)
Figure 44. China SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 45. Japan SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 46. South Korea SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 47. China Taiwan SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 48. Southeast Asia SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 49. India SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 50. Latin America, Middle East & Africa SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 51. Latin America, Middle East & Africa SiC Etching Equipment Consumption Market Share by Country (2021–2032)
Figure 52. Mexico SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 53. Brazil SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 54. Israel SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 55. GCC Countries SiC Etching Equipment Consumption and Growth Rate (Units), 2021–2032
Figure 56. Global Production Market Share of SiC Etching Equipment by Type (2021–2032)
Figure 57. Global Production Value Market Share of SiC Etching Equipment by Type (2021–2032)
Figure 58. Global SiC Etching Equipment Price (US$/Unit) by Type (2021–2032)
Figure 59. Global Production Market Share of SiC Etching Equipment by Application (2021–2032)
Figure 60. Global Production Value Market Share of SiC Etching Equipment by Application (2021–2032)
Figure 61. Global SiC Etching Equipment Price (US$/Unit) by Application (2021–2032)
Figure 62. SiC Etching Equipment Value Chain
Figure 63. Channels of Distribution (Direct Vs Distribution)
Figure 64. Bottom-up and Top-down Approaches for This Report
Figure 65. Data Triangulation
