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Global Metrology, Inspection, and Process Control in VLSI Market Research Report 2025
Published Date: September 2025
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Report Code: QYRE-Auto-35N9197
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Global Metrology, Inspection, and Process Control in VLSI Market Research Report 2025

Code: QYRE-Auto-35N9197
Report
September 2025
Pages:105
QYResearch
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DESCRIPTION
TABLE OF CONTENT
TABLES & FIGURES

Metrology, Inspection, and Process Control in VLSI Market Size

The global market for semiconductor was estimated at US$ 579 billion in the year 2022, is projected to US$ 790 billion by 2029, growing at a CAGR of 6% during the forecast period.

Metrology, Inspection, and Process Control in VLSI Market

Metrology, Inspection, and Process Control in VLSI Market

The global market for Metrology, Inspection, and Process Control in VLSI was valued at US$ million in the year 2024 and is projected to reach a revised size of US$ million by 2031, growing at a CAGR of %during the forecast period.
The advanced process control (APC) encompasses a broad range of sophisticated technologies and tools that are used to optimize plant performances across a range of applications. The advanced process control market comprises of APC software and related services .The overall application market is comprised primarily of process industries where APC tools are used to optimize plant performance.
Although some major categories are still double-digit year-over-year growth in 2022, led by Analog with 20.76%, Sensor with 16.31%, and Logic with 14.46% growth, Memory declined with 12.64% year over year. The microprocessor (MPU) and microcontroller (MCU) segments will experience stagnant growth due to weak shipments and investment in notebooks, computers, and standard desktops. In the current market scenario, the growing popularity of IoT-based electronics is stimulating the need for powerful processors and controllers. Hybrid MPUs and MCUs provide real-time embedded processing and control for the topmost IoT-based applications, resulting in significant market growth. The Analog IC segment is expected to grow gradually, while demand from the networking and communications industries is limited. Few of the emerging trends in the growing demand for Analog integrated circuits include signal conversion, automotive-specific Analog applications, and power management. They drive the growing demand for discrete power devices.
This report aims to provide a comprehensive presentation of the global market for Metrology, Inspection, and Process Control in VLSI, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Metrology, Inspection, and Process Control in VLSI.
The Metrology, Inspection, and Process Control in VLSI market size, estimations, and forecasts are provided in terms of and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global Metrology, Inspection, and Process Control in VLSI market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the Metrology, Inspection, and Process Control in VLSI companies, new entrants, and industry chain related companies in this market with information on the revenues for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Market Segmentation

Scope of Metrology, Inspection, and Process Control in VLSI Market Report

Report Metric Details
Report Name Metrology, Inspection, and Process Control in VLSI Market
Accounted market size in year US$ 579 billion
Forecasted market size in 2029 US$ 790 billion
CAGR 6%
Base Year year
Forecasted years 2025 - 2029
Segment by Type
  • Metrology/Inspection Technologies
  • Defect Review/Wafer Inspection
  • Thin Film Metrology
  • Lithography Metrology
Segment by Application
  • Electrical & Semiconductor
  • Industrial
  • Optical
  • Academic
  • Others
By Region
  • North America (United States, Canada)
  • Europe (Germany, France, UK, Italy, Russia) Rest of Europe
  • Nordic Countries
  • Asia-Pacific (China, Japan, South Korea)
  • Southeast Asia (India, Australia)
  • Rest of Asia
  • Latin America (Mexico, Brazil)
  • Rest of Latin America
  • Middle East & Africa (Turkey, Saudi Arabia, UAE, Rest of MEA)
By Company Applied Materials, KLA-Tencor, Leica, JEOL, Hitachi, Carl Zeiss Microelectronic Systems, Nanometrics, Physical Electronics, Schlumberger, Topcon, Solid State Measurements, Rigaku, Axic, Jipelec, Sentech Instruments, Secon, Philips, Jordan Valley Semiconductors, Aquila Instruments, Leica Microsystems, PHI-Evans, Thermo Nicolet
Forecast units USD million in value
Report coverage Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

  • Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
  • Chapter 2: Introduces executive summary of global market size, regional market size, this section also introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by companies in the industry, and the analysis of relevant policies in the industry.
  • Chapter 3: Detailed analysis of Metrology, Inspection, and Process Control in VLSI company competitive landscape, revenue market share, latest development plan, merger, and acquisition information, etc.
  • Chapter 4: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
  • Chapter 5: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
  • Chapter 6, 7, 8, 9, 10: North America, Europe, Asia Pacific, Latin America, Middle East and Africa segment by country. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and capacity of each country in the world.
  • Chapter 11: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
  • Chapter 12: The main points and conclusions of the report.

FAQ for this report

How fast is Metrology, Inspection, and Process Control in VLSI Market growing?

Ans: The Metrology, Inspection, and Process Control in VLSI Market witnessing a CAGR of 6% during the forecast period 2025-2029.

What is the Metrology, Inspection, and Process Control in VLSI Market size in 2029?

Ans: The Metrology, Inspection, and Process Control in VLSI Market size in 2029 will be US$ 790 billion.

Who are the main players in the Metrology, Inspection, and Process Control in VLSI Market report?

Ans: The main players in the Metrology, Inspection, and Process Control in VLSI Market are Applied Materials, KLA-Tencor, Leica, JEOL, Hitachi, Carl Zeiss Microelectronic Systems, Nanometrics, Physical Electronics, Schlumberger, Topcon, Solid State Measurements, Rigaku, Axic, Jipelec, Sentech Instruments, Secon, Philips, Jordan Valley Semiconductors, Aquila Instruments, Leica Microsystems, PHI-Evans, Thermo Nicolet

What are the Application segmentation covered in the Metrology, Inspection, and Process Control in VLSI Market report?

Ans: The Applications covered in the Metrology, Inspection, and Process Control in VLSI Market report are Electrical & Semiconductor, Industrial, Optical, Academic, Others

What are the Type segmentation covered in the Metrology, Inspection, and Process Control in VLSI Market report?

Ans: The Types covered in the Metrology, Inspection, and Process Control in VLSI Market report are Metrology/Inspection Technologies, Defect Review/Wafer Inspection, Thin Film Metrology, Lithography Metrology

1 Report Overview
1.1 Study Scope
1.2 Market Analysis by Type
1.2.1 Global Metrology, Inspection, and Process Control in VLSI Market Size Growth Rate by Type: 2020 VS 2024 VS 2031
1.2.2 Metrology/Inspection Technologies
1.2.3 Defect Review/Wafer Inspection
1.2.4 Thin Film Metrology
1.2.5 Lithography Metrology
1.3 Market by Application
1.3.1 Global Metrology, Inspection, and Process Control in VLSI Market Growth by Application: 2020 VS 2024 VS 2031
1.3.2 Electrical & Semiconductor
1.3.3 Industrial
1.3.4 Optical
1.3.5 Academic
1.3.6 Others
1.4 Assumptions and Limitations
1.5 Study Objectives
1.6 Years Considered
2 Global Growth Trends
2.1 Global Metrology, Inspection, and Process Control in VLSI Market Perspective (2020-2031)
2.2 Global Metrology, Inspection, and Process Control in VLSI Growth Trends by Region
2.2.1 Global Metrology, Inspection, and Process Control in VLSI Market Size by Region: 2020 VS 2024 VS 2031
2.2.2 Metrology, Inspection, and Process Control in VLSI Historic Market Size by Region (2020-2025)
2.2.3 Metrology, Inspection, and Process Control in VLSI Forecasted Market Size by Region (2026-2031)
2.3 Metrology, Inspection, and Process Control in VLSI Market Dynamics
2.3.1 Metrology, Inspection, and Process Control in VLSI Industry Trends
2.3.2 Metrology, Inspection, and Process Control in VLSI Market Drivers
2.3.3 Metrology, Inspection, and Process Control in VLSI Market Challenges
2.3.4 Metrology, Inspection, and Process Control in VLSI Market Restraints
3 Competition Landscape by Key Players
3.1 Global Top Metrology, Inspection, and Process Control in VLSI Players by Revenue
3.1.1 Global Top Metrology, Inspection, and Process Control in VLSI Players by Revenue (2020-2025)
3.1.2 Global Metrology, Inspection, and Process Control in VLSI Revenue Market Share by Players (2020-2025)
3.2 Global Metrology, Inspection, and Process Control in VLSI Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
3.3 Global Key Players Ranking by Metrology, Inspection, and Process Control in VLSI Revenue
3.4 Global Metrology, Inspection, and Process Control in VLSI Market Concentration Ratio
3.4.1 Global Metrology, Inspection, and Process Control in VLSI Market Concentration Ratio (CR5 and HHI)
3.4.2 Global Top 10 and Top 5 Companies by Metrology, Inspection, and Process Control in VLSI Revenue in 2024
3.5 Global Key Players of Metrology, Inspection, and Process Control in VLSI Head office and Area Served
3.6 Global Key Players of Metrology, Inspection, and Process Control in VLSI, Product and Application
3.7 Global Key Players of Metrology, Inspection, and Process Control in VLSI, Date of Enter into This Industry
3.8 Mergers & Acquisitions, Expansion Plans
4 Metrology, Inspection, and Process Control in VLSI Breakdown Data by Type
4.1 Global Metrology, Inspection, and Process Control in VLSI Historic Market Size by Type (2020-2025)
4.2 Global Metrology, Inspection, and Process Control in VLSI Forecasted Market Size by Type (2026-2031)
5 Metrology, Inspection, and Process Control in VLSI Breakdown Data by Application
5.1 Global Metrology, Inspection, and Process Control in VLSI Historic Market Size by Application (2020-2025)
5.2 Global Metrology, Inspection, and Process Control in VLSI Forecasted Market Size by Application (2026-2031)
6 North America
6.1 North America Metrology, Inspection, and Process Control in VLSI Market Size (2020-2031)
6.2 North America Metrology, Inspection, and Process Control in VLSI Market Growth Rate by Country: 2020 VS 2024 VS 2031
6.3 North America Metrology, Inspection, and Process Control in VLSI Market Size by Country (2020-2025)
6.4 North America Metrology, Inspection, and Process Control in VLSI Market Size by Country (2026-2031)
6.5 United States
6.6 Canada
7 Europe
7.1 Europe Metrology, Inspection, and Process Control in VLSI Market Size (2020-2031)
7.2 Europe Metrology, Inspection, and Process Control in VLSI Market Growth Rate by Country: 2020 VS 2024 VS 2031
7.3 Europe Metrology, Inspection, and Process Control in VLSI Market Size by Country (2020-2025)
7.4 Europe Metrology, Inspection, and Process Control in VLSI Market Size by Country (2026-2031)
7.5 Germany
7.6 France
7.7 U.K.
7.8 Italy
7.9 Russia
7.10 Nordic Countries
8 Asia-Pacific
8.1 Asia-Pacific Metrology, Inspection, and Process Control in VLSI Market Size (2020-2031)
8.2 Asia-Pacific Metrology, Inspection, and Process Control in VLSI Market Growth Rate by Region: 2020 VS 2024 VS 2031
8.3 Asia-Pacific Metrology, Inspection, and Process Control in VLSI Market Size by Region (2020-2025)
8.4 Asia-Pacific Metrology, Inspection, and Process Control in VLSI Market Size by Region (2026-2031)
8.5 China
8.6 Japan
8.7 South Korea
8.8 Southeast Asia
8.9 India
8.10 Australia
9 Latin America
9.1 Latin America Metrology, Inspection, and Process Control in VLSI Market Size (2020-2031)
9.2 Latin America Metrology, Inspection, and Process Control in VLSI Market Growth Rate by Country: 2020 VS 2024 VS 2031
9.3 Latin America Metrology, Inspection, and Process Control in VLSI Market Size by Country (2020-2025)
9.4 Latin America Metrology, Inspection, and Process Control in VLSI Market Size by Country (2026-2031)
9.5 Mexico
9.6 Brazil
10 Middle East & Africa
10.1 Middle East & Africa Metrology, Inspection, and Process Control in VLSI Market Size (2020-2031)
10.2 Middle East & Africa Metrology, Inspection, and Process Control in VLSI Market Growth Rate by Country: 2020 VS 2024 VS 2031
10.3 Middle East & Africa Metrology, Inspection, and Process Control in VLSI Market Size by Country (2020-2025)
10.4 Middle East & Africa Metrology, Inspection, and Process Control in VLSI Market Size by Country (2026-2031)
10.5 Turkey
10.6 Saudi Arabia
10.7 UAE
11 Key Players Profiles
11.1 Applied Materials
11.1.1 Applied Materials Company Details
11.1.2 Applied Materials Business Overview
11.1.3 Applied Materials Metrology, Inspection, and Process Control in VLSI Introduction
11.1.4 Applied Materials Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.1.5 Applied Materials Recent Development
11.2 KLA-Tencor
11.2.1 KLA-Tencor Company Details
11.2.2 KLA-Tencor Business Overview
11.2.3 KLA-Tencor Metrology, Inspection, and Process Control in VLSI Introduction
11.2.4 KLA-Tencor Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.2.5 KLA-Tencor Recent Development
11.3 Leica
11.3.1 Leica Company Details
11.3.2 Leica Business Overview
11.3.3 Leica Metrology, Inspection, and Process Control in VLSI Introduction
11.3.4 Leica Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.3.5 Leica Recent Development
11.4 JEOL
11.4.1 JEOL Company Details
11.4.2 JEOL Business Overview
11.4.3 JEOL Metrology, Inspection, and Process Control in VLSI Introduction
11.4.4 JEOL Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.4.5 JEOL Recent Development
11.5 Hitachi
11.5.1 Hitachi Company Details
11.5.2 Hitachi Business Overview
11.5.3 Hitachi Metrology, Inspection, and Process Control in VLSI Introduction
11.5.4 Hitachi Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.5.5 Hitachi Recent Development
11.6 Carl Zeiss Microelectronic Systems
11.6.1 Carl Zeiss Microelectronic Systems Company Details
11.6.2 Carl Zeiss Microelectronic Systems Business Overview
11.6.3 Carl Zeiss Microelectronic Systems Metrology, Inspection, and Process Control in VLSI Introduction
11.6.4 Carl Zeiss Microelectronic Systems Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.6.5 Carl Zeiss Microelectronic Systems Recent Development
11.7 Nanometrics
11.7.1 Nanometrics Company Details
11.7.2 Nanometrics Business Overview
11.7.3 Nanometrics Metrology, Inspection, and Process Control in VLSI Introduction
11.7.4 Nanometrics Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.7.5 Nanometrics Recent Development
11.8 Physical Electronics
11.8.1 Physical Electronics Company Details
11.8.2 Physical Electronics Business Overview
11.8.3 Physical Electronics Metrology, Inspection, and Process Control in VLSI Introduction
11.8.4 Physical Electronics Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.8.5 Physical Electronics Recent Development
11.9 Schlumberger
11.9.1 Schlumberger Company Details
11.9.2 Schlumberger Business Overview
11.9.3 Schlumberger Metrology, Inspection, and Process Control in VLSI Introduction
11.9.4 Schlumberger Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.9.5 Schlumberger Recent Development
11.10 Topcon
11.10.1 Topcon Company Details
11.10.2 Topcon Business Overview
11.10.3 Topcon Metrology, Inspection, and Process Control in VLSI Introduction
11.10.4 Topcon Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.10.5 Topcon Recent Development
11.11 Solid State Measurements
11.11.1 Solid State Measurements Company Details
11.11.2 Solid State Measurements Business Overview
11.11.3 Solid State Measurements Metrology, Inspection, and Process Control in VLSI Introduction
11.11.4 Solid State Measurements Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.11.5 Solid State Measurements Recent Development
11.12 Rigaku
11.12.1 Rigaku Company Details
11.12.2 Rigaku Business Overview
11.12.3 Rigaku Metrology, Inspection, and Process Control in VLSI Introduction
11.12.4 Rigaku Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.12.5 Rigaku Recent Development
11.13 Axic
11.13.1 Axic Company Details
11.13.2 Axic Business Overview
11.13.3 Axic Metrology, Inspection, and Process Control in VLSI Introduction
11.13.4 Axic Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.13.5 Axic Recent Development
11.14 Jipelec
11.14.1 Jipelec Company Details
11.14.2 Jipelec Business Overview
11.14.3 Jipelec Metrology, Inspection, and Process Control in VLSI Introduction
11.14.4 Jipelec Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.14.5 Jipelec Recent Development
11.15 Sentech Instruments
11.15.1 Sentech Instruments Company Details
11.15.2 Sentech Instruments Business Overview
11.15.3 Sentech Instruments Metrology, Inspection, and Process Control in VLSI Introduction
11.15.4 Sentech Instruments Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.15.5 Sentech Instruments Recent Development
11.16 Secon
11.16.1 Secon Company Details
11.16.2 Secon Business Overview
11.16.3 Secon Metrology, Inspection, and Process Control in VLSI Introduction
11.16.4 Secon Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.16.5 Secon Recent Development
11.17 Philips
11.17.1 Philips Company Details
11.17.2 Philips Business Overview
11.17.3 Philips Metrology, Inspection, and Process Control in VLSI Introduction
11.17.4 Philips Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.17.5 Philips Recent Development
11.18 Jordan Valley Semiconductors
11.18.1 Jordan Valley Semiconductors Company Details
11.18.2 Jordan Valley Semiconductors Business Overview
11.18.3 Jordan Valley Semiconductors Metrology, Inspection, and Process Control in VLSI Introduction
11.18.4 Jordan Valley Semiconductors Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.18.5 Jordan Valley Semiconductors Recent Development
11.19 KLA-Tencor
11.19.1 KLA-Tencor Company Details
11.19.2 KLA-Tencor Business Overview
11.19.3 KLA-Tencor Metrology, Inspection, and Process Control in VLSI Introduction
11.19.4 KLA-Tencor Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.19.5 KLA-Tencor Recent Development
11.20 Nanometrics
11.20.1 Nanometrics Company Details
11.20.2 Nanometrics Business Overview
11.20.3 Nanometrics Metrology, Inspection, and Process Control in VLSI Introduction
11.20.4 Nanometrics Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.20.5 Nanometrics Recent Development
11.21 Aquila Instruments
11.21.1 Aquila Instruments Company Details
11.21.2 Aquila Instruments Business Overview
11.21.3 Aquila Instruments Metrology, Inspection, and Process Control in VLSI Introduction
11.21.4 Aquila Instruments Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.21.5 Aquila Instruments Recent Development
11.22 Leica Microsystems
11.22.1 Leica Microsystems Company Details
11.22.2 Leica Microsystems Business Overview
11.22.3 Leica Microsystems Metrology, Inspection, and Process Control in VLSI Introduction
11.22.4 Leica Microsystems Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.22.5 Leica Microsystems Recent Development
11.23 PHI-Evans
11.23.1 PHI-Evans Company Details
11.23.2 PHI-Evans Business Overview
11.23.3 PHI-Evans Metrology, Inspection, and Process Control in VLSI Introduction
11.23.4 PHI-Evans Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.23.5 PHI-Evans Recent Development
11.24 Thermo Nicolet
11.24.1 Thermo Nicolet Company Details
11.24.2 Thermo Nicolet Business Overview
11.24.3 Thermo Nicolet Metrology, Inspection, and Process Control in VLSI Introduction
11.24.4 Thermo Nicolet Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
11.24.5 Thermo Nicolet Recent Development
12 Analyst's Viewpoints/Conclusions
13 Appendix
13.1 Research Methodology
13.1.1 Methodology/Research Approach
13.1.1.1 Research Programs/Design
13.1.1.2 Market Size Estimation
13.1.1.3 Market Breakdown and Data Triangulation
13.1.2 Data Source
13.1.2.1 Secondary Sources
13.1.2.2 Primary Sources
13.2 Author Details
13.3 Disclaimer
List of Tables
 Table 1. Global Metrology, Inspection, and Process Control in VLSI Market Size Growth Rate by Type (US$ Million): 2020 VS 2024 VS 2031
 Table 2. Key Players of Metrology/Inspection Technologies
 Table 3. Key Players of Defect Review/Wafer Inspection
 Table 4. Key Players of Thin Film Metrology
 Table 5. Key Players of Lithography Metrology
 Table 6. Global Metrology, Inspection, and Process Control in VLSI Market Size Growth by Application (US$ Million): 2020 VS 2024 VS 2031
 Table 7. Global Metrology, Inspection, and Process Control in VLSI Market Size by Region (US$ Million): 2020 VS 2024 VS 2031
 Table 8. Global Metrology, Inspection, and Process Control in VLSI Market Size by Region (2020-2025) & (US$ Million)
 Table 9. Global Metrology, Inspection, and Process Control in VLSI Market Share by Region (2020-2025)
 Table 10. Global Metrology, Inspection, and Process Control in VLSI Forecasted Market Size by Region (2026-2031) & (US$ Million)
 Table 11. Global Metrology, Inspection, and Process Control in VLSI Market Share by Region (2026-2031)
 Table 12. Metrology, Inspection, and Process Control in VLSI Market Trends
 Table 13. Metrology, Inspection, and Process Control in VLSI Market Drivers
 Table 14. Metrology, Inspection, and Process Control in VLSI Market Challenges
 Table 15. Metrology, Inspection, and Process Control in VLSI Market Restraints
 Table 16. Global Metrology, Inspection, and Process Control in VLSI Revenue by Players (2020-2025) & (US$ Million)
 Table 17. Global Metrology, Inspection, and Process Control in VLSI Market Share by Players (2020-2025)
 Table 18. Global Top Metrology, Inspection, and Process Control in VLSI Players by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Metrology, Inspection, and Process Control in VLSI as of 2024)
 Table 19. Ranking of Global Top Metrology, Inspection, and Process Control in VLSI Companies by Revenue (US$ Million) in 2024
 Table 20. Global 5 Largest Players Market Share by Metrology, Inspection, and Process Control in VLSI Revenue (CR5 and HHI) & (2020-2025)
 Table 21. Global Key Players of Metrology, Inspection, and Process Control in VLSI, Headquarters and Area Served
 Table 22. Global Key Players of Metrology, Inspection, and Process Control in VLSI, Product and Application
 Table 23. Global Key Players of Metrology, Inspection, and Process Control in VLSI, Date of Enter into This Industry
 Table 24. Mergers & Acquisitions, Expansion Plans
 Table 25. Global Metrology, Inspection, and Process Control in VLSI Market Size by Type (2020-2025) & (US$ Million)
 Table 26. Global Metrology, Inspection, and Process Control in VLSI Revenue Market Share by Type (2020-2025)
 Table 27. Global Metrology, Inspection, and Process Control in VLSI Forecasted Market Size by Type (2026-2031) & (US$ Million)
 Table 28. Global Metrology, Inspection, and Process Control in VLSI Revenue Market Share by Type (2026-2031)
 Table 29. Global Metrology, Inspection, and Process Control in VLSI Market Size by Application (2020-2025) & (US$ Million)
 Table 30. Global Metrology, Inspection, and Process Control in VLSI Revenue Market Share by Application (2020-2025)
 Table 31. Global Metrology, Inspection, and Process Control in VLSI Forecasted Market Size by Application (2026-2031) & (US$ Million)
 Table 32. Global Metrology, Inspection, and Process Control in VLSI Revenue Market Share by Application (2026-2031)
 Table 33. North America Metrology, Inspection, and Process Control in VLSI Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 34. North America Metrology, Inspection, and Process Control in VLSI Market Size by Country (2020-2025) & (US$ Million)
 Table 35. North America Metrology, Inspection, and Process Control in VLSI Market Size by Country (2026-2031) & (US$ Million)
 Table 36. Europe Metrology, Inspection, and Process Control in VLSI Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 37. Europe Metrology, Inspection, and Process Control in VLSI Market Size by Country (2020-2025) & (US$ Million)
 Table 38. Europe Metrology, Inspection, and Process Control in VLSI Market Size by Country (2026-2031) & (US$ Million)
 Table 39. Asia-Pacific Metrology, Inspection, and Process Control in VLSI Market Size Growth Rate by Region (US$ Million): 2020 VS 2024 VS 2031
 Table 40. Asia-Pacific Metrology, Inspection, and Process Control in VLSI Market Size by Region (2020-2025) & (US$ Million)
 Table 41. Asia-Pacific Metrology, Inspection, and Process Control in VLSI Market Size by Region (2026-2031) & (US$ Million)
 Table 42. Latin America Metrology, Inspection, and Process Control in VLSI Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 43. Latin America Metrology, Inspection, and Process Control in VLSI Market Size by Country (2020-2025) & (US$ Million)
 Table 44. Latin America Metrology, Inspection, and Process Control in VLSI Market Size by Country (2026-2031) & (US$ Million)
 Table 45. Middle East & Africa Metrology, Inspection, and Process Control in VLSI Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 46. Middle East & Africa Metrology, Inspection, and Process Control in VLSI Market Size by Country (2020-2025) & (US$ Million)
 Table 47. Middle East & Africa Metrology, Inspection, and Process Control in VLSI Market Size by Country (2026-2031) & (US$ Million)
 Table 48. Applied Materials Company Details
 Table 49. Applied Materials Business Overview
 Table 50. Applied Materials Metrology, Inspection, and Process Control in VLSI Product
 Table 51. Applied Materials Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 52. Applied Materials Recent Development
 Table 53. KLA-Tencor Company Details
 Table 54. KLA-Tencor Business Overview
 Table 55. KLA-Tencor Metrology, Inspection, and Process Control in VLSI Product
 Table 56. KLA-Tencor Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 57. KLA-Tencor Recent Development
 Table 58. Leica Company Details
 Table 59. Leica Business Overview
 Table 60. Leica Metrology, Inspection, and Process Control in VLSI Product
 Table 61. Leica Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 62. Leica Recent Development
 Table 63. JEOL Company Details
 Table 64. JEOL Business Overview
 Table 65. JEOL Metrology, Inspection, and Process Control in VLSI Product
 Table 66. JEOL Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 67. JEOL Recent Development
 Table 68. Hitachi Company Details
 Table 69. Hitachi Business Overview
 Table 70. Hitachi Metrology, Inspection, and Process Control in VLSI Product
 Table 71. Hitachi Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 72. Hitachi Recent Development
 Table 73. Carl Zeiss Microelectronic Systems Company Details
 Table 74. Carl Zeiss Microelectronic Systems Business Overview
 Table 75. Carl Zeiss Microelectronic Systems Metrology, Inspection, and Process Control in VLSI Product
 Table 76. Carl Zeiss Microelectronic Systems Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 77. Carl Zeiss Microelectronic Systems Recent Development
 Table 78. Nanometrics Company Details
 Table 79. Nanometrics Business Overview
 Table 80. Nanometrics Metrology, Inspection, and Process Control in VLSI Product
 Table 81. Nanometrics Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 82. Nanometrics Recent Development
 Table 83. Physical Electronics Company Details
 Table 84. Physical Electronics Business Overview
 Table 85. Physical Electronics Metrology, Inspection, and Process Control in VLSI Product
 Table 86. Physical Electronics Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 87. Physical Electronics Recent Development
 Table 88. Schlumberger Company Details
 Table 89. Schlumberger Business Overview
 Table 90. Schlumberger Metrology, Inspection, and Process Control in VLSI Product
 Table 91. Schlumberger Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 92. Schlumberger Recent Development
 Table 93. Topcon Company Details
 Table 94. Topcon Business Overview
 Table 95. Topcon Metrology, Inspection, and Process Control in VLSI Product
 Table 96. Topcon Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 97. Topcon Recent Development
 Table 98. Solid State Measurements Company Details
 Table 99. Solid State Measurements Business Overview
 Table 100. Solid State Measurements Metrology, Inspection, and Process Control in VLSI Product
 Table 101. Solid State Measurements Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 102. Solid State Measurements Recent Development
 Table 103. Rigaku Company Details
 Table 104. Rigaku Business Overview
 Table 105. Rigaku Metrology, Inspection, and Process Control in VLSI Product
 Table 106. Rigaku Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 107. Rigaku Recent Development
 Table 108. Axic Company Details
 Table 109. Axic Business Overview
 Table 110. Axic Metrology, Inspection, and Process Control in VLSI Product
 Table 111. Axic Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 112. Axic Recent Development
 Table 113. Jipelec Company Details
 Table 114. Jipelec Business Overview
 Table 115. Jipelec Metrology, Inspection, and Process Control in VLSI Product
 Table 116. Jipelec Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 117. Jipelec Recent Development
 Table 118. Sentech Instruments Company Details
 Table 119. Sentech Instruments Business Overview
 Table 120. Sentech Instruments Metrology, Inspection, and Process Control in VLSI Product
 Table 121. Sentech Instruments Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 122. Sentech Instruments Recent Development
 Table 123. Secon Company Details
 Table 124. Secon Business Overview
 Table 125. Secon Metrology, Inspection, and Process Control in VLSI Product
 Table 126. Secon Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 127. Secon Recent Development
 Table 128. Philips Company Details
 Table 129. Philips Business Overview
 Table 130. Philips Metrology, Inspection, and Process Control in VLSI Product
 Table 131. Philips Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 132. Philips Recent Development
 Table 133. Jordan Valley Semiconductors Company Details
 Table 134. Jordan Valley Semiconductors Business Overview
 Table 135. Jordan Valley Semiconductors Metrology, Inspection, and Process Control in VLSI Product
 Table 136. Jordan Valley Semiconductors Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 137. Jordan Valley Semiconductors Recent Development
 Table 138. KLA-Tencor Company Details
 Table 139. KLA-Tencor Business Overview
 Table 140. KLA-Tencor Metrology, Inspection, and Process Control in VLSI Product
 Table 141. KLA-Tencor Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 142. KLA-Tencor Recent Development
 Table 143. Nanometrics Company Details
 Table 144. Nanometrics Business Overview
 Table 145. Nanometrics Metrology, Inspection, and Process Control in VLSI Product
 Table 146. Nanometrics Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 147. Nanometrics Recent Development
 Table 148. Aquila Instruments Company Details
 Table 149. Aquila Instruments Business Overview
 Table 150. Aquila Instruments Metrology, Inspection, and Process Control in VLSI Product
 Table 151. Aquila Instruments Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 152. Aquila Instruments Recent Development
 Table 153. Leica Microsystems Company Details
 Table 154. Leica Microsystems Business Overview
 Table 155. Leica Microsystems Metrology, Inspection, and Process Control in VLSI Product
 Table 156. Leica Microsystems Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 157. Leica Microsystems Recent Development
 Table 158. PHI-Evans Company Details
 Table 159. PHI-Evans Business Overview
 Table 160. PHI-Evans Metrology, Inspection, and Process Control in VLSI Product
 Table 161. PHI-Evans Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 162. PHI-Evans Recent Development
 Table 163. Thermo Nicolet Company Details
 Table 164. Thermo Nicolet Business Overview
 Table 165. Thermo Nicolet Metrology, Inspection, and Process Control in VLSI Product
 Table 166. Thermo Nicolet Revenue in Metrology, Inspection, and Process Control in VLSI Business (2020-2025) & (US$ Million)
 Table 167. Thermo Nicolet Recent Development
 Table 168. Research Programs/Design for This Report
 Table 169. Key Data Information from Secondary Sources
 Table 170. Key Data Information from Primary Sources
 Table 171. Authors List of This Report


List of Figures
 Figure 1. Metrology, Inspection, and Process Control in VLSI Picture
 Figure 2. Global Metrology, Inspection, and Process Control in VLSI Market Size Comparison by Type (2020-2031) & (US$ Million)
 Figure 3. Global Metrology, Inspection, and Process Control in VLSI Market Share by Type: 2024 VS 2031
 Figure 4. Metrology/Inspection Technologies Features
 Figure 5. Defect Review/Wafer Inspection Features
 Figure 6. Thin Film Metrology Features
 Figure 7. Lithography Metrology Features
 Figure 8. Global Metrology, Inspection, and Process Control in VLSI Market Size by Application (2020-2031) & (US$ Million)
 Figure 9. Global Metrology, Inspection, and Process Control in VLSI Market Share by Application: 2024 VS 2031
 Figure 10. Electrical & Semiconductor Case Studies
 Figure 11. Industrial Case Studies
 Figure 12. Optical Case Studies
 Figure 13. Academic Case Studies
 Figure 14. Others Case Studies
 Figure 15. Metrology, Inspection, and Process Control in VLSI Report Years Considered
 Figure 16. Global Metrology, Inspection, and Process Control in VLSI Market Size (US$ Million), Year-over-Year: 2020-2031
 Figure 17. Global Metrology, Inspection, and Process Control in VLSI Market Size, (US$ Million), 2020 VS 2024 VS 2031
 Figure 18. Global Metrology, Inspection, and Process Control in VLSI Market Share by Region: 2024 VS 2031
 Figure 19. Global Metrology, Inspection, and Process Control in VLSI Market Share by Players in 2024
 Figure 20. Global Top Metrology, Inspection, and Process Control in VLSI Players by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Metrology, Inspection, and Process Control in VLSI as of 2024)
 Figure 21. The Top 10 and 5 Players Market Share by Metrology, Inspection, and Process Control in VLSI Revenue in 2024
 Figure 22. North America Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 23. North America Metrology, Inspection, and Process Control in VLSI Market Share by Country (2020-2031)
 Figure 24. United States Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 25. Canada Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 26. Europe Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 27. Europe Metrology, Inspection, and Process Control in VLSI Market Share by Country (2020-2031)
 Figure 28. Germany Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 29. France Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 30. U.K. Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 31. Italy Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 32. Russia Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 33. Nordic Countries Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 34. Asia-Pacific Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 35. Asia-Pacific Metrology, Inspection, and Process Control in VLSI Market Share by Region (2020-2031)
 Figure 36. China Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 37. Japan Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 38. South Korea Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 39. Southeast Asia Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 40. India Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 41. Australia Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 42. Latin America Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 43. Latin America Metrology, Inspection, and Process Control in VLSI Market Share by Country (2020-2031)
 Figure 44. Mexico Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 45. Brazil Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 46. Middle East & Africa Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 47. Middle East & Africa Metrology, Inspection, and Process Control in VLSI Market Share by Country (2020-2031)
 Figure 48. Turkey Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 49. Saudi Arabia Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 50. UAE Metrology, Inspection, and Process Control in VLSI Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 51. Applied Materials Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 52. KLA-Tencor Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 53. Leica Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 54. JEOL Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 55. Hitachi Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 56. Carl Zeiss Microelectronic Systems Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 57. Nanometrics Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 58. Physical Electronics Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 59. Schlumberger Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 60. Topcon Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 61. Solid State Measurements Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 62. Rigaku Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 63. Axic Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 64. Jipelec Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 65. Sentech Instruments Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 66. Secon Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 67. Philips Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 68. Jordan Valley Semiconductors Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 69. KLA-Tencor Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 70. Nanometrics Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 71. Aquila Instruments Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 72. Leica Microsystems Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 73. PHI-Evans Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 74. Thermo Nicolet Revenue Growth Rate in Metrology, Inspection, and Process Control in VLSI Business (2020-2025)
 Figure 75. Bottom-up and Top-down Approaches for This Report
 Figure 76. Data Triangulation
 Figure 77. Key Executives Interviewed
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