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Global Electron Cyclotron Resonance Plasma Etch System Market Research Report 2025
Published Date: June 2025
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Report Code: QYRE-Auto-36V4162
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Global Electron Cyclotron Resonance Plasma Etch System Market Research Report 2025

Code: QYRE-Auto-36V4162
Report
June 2025
Pages:99
QYResearch
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DESCRIPTION
TABLE OF CONTENT
TABLES & FIGURES

Electron Cyclotron Resonance Plasma Etch System Market

The global market for Electron Cyclotron Resonance Plasma Etch System was valued at US$ million in the year 2024 and is projected to reach a revised size of US$ million by 2031, growing at a CAGR of %during the forecast period.
Electron cyclotron resonance (ECR) microwave-based plasma has been developed primarily for applications with reactive etching or deposition.
North American market for Electron Cyclotron Resonance Plasma Etch System is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.
Asia-Pacific market for Electron Cyclotron Resonance Plasma Etch System is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.
The major global manufacturers of Electron Cyclotron Resonance Plasma Etch System include Lam Research, Applied Materials, Hitachi High-tech, Tokyo Electron, Oxford Instruments, NAURA Technology Group, SPTS Technologies Ltd., AMEC, Ulvac, Samco, etc. In 2024, the world's top three vendors accounted for approximately % of the revenue.

Report Scope

This report aims to provide a comprehensive presentation of the global market for Electron Cyclotron Resonance Plasma Etch System, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Electron Cyclotron Resonance Plasma Etch System.
The Electron Cyclotron Resonance Plasma Etch System market size, estimations, and forecasts are provided in terms of output/shipments (K Units) and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global Electron Cyclotron Resonance Plasma Etch System market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the Electron Cyclotron Resonance Plasma Etch System manufacturers, new entrants, and industry chain related companies in this market with information on the revenues, production, and average price for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Market Segmentation

Scope of Electron Cyclotron Resonance Plasma Etch System Market Report

Report Metric Details
Report Name Electron Cyclotron Resonance Plasma Etch System Market
by Type
  • Wet Etch System
  • Dry Etch System
by Application
  • Shallow Trench Isolation
  • Gate electrode
  • Self-Align Contact and Interconnect
  • Others
Production by Region
  • North America
  • Europe
  • China
  • Japan
Consumption by Region
  • North America (United States, Canada)
  • Europe (Germany, France, UK, Italy, Russia)
  • Asia-Pacific (China, Japan, South Korea, Taiwan)
  • Southeast Asia (India)
  • Latin America (Mexico, Brazil)
By Company Lam Research, Applied Materials, Hitachi High-tech, Tokyo Electron, Oxford Instruments, NAURA Technology Group, SPTS Technologies Ltd., AMEC, Ulvac, Samco, Plasma Therm
Forecast units USD million in value
Report coverage Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

  • Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
  • Chapter 2: Detailed analysis of Electron Cyclotron Resonance Plasma Etch System manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
  • Chapter 3: Production/output, value of Electron Cyclotron Resonance Plasma Etch System by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
  • Chapter 4: Consumption of Electron Cyclotron Resonance Plasma Etch System in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
  • Chapter 5: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
  • Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
  • Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
  • Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
  • Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
  • Chapter 10: The main points and conclusions of the report.

FAQ for this report

Who are the main players in the Electron Cyclotron Resonance Plasma Etch System Market report?

Ans: The main players in the Electron Cyclotron Resonance Plasma Etch System Market are Lam Research, Applied Materials, Hitachi High-tech, Tokyo Electron, Oxford Instruments, NAURA Technology Group, SPTS Technologies Ltd., AMEC, Ulvac, Samco, Plasma Therm

What are the Application segmentation covered in the Electron Cyclotron Resonance Plasma Etch System Market report?

Ans: The Applications covered in the Electron Cyclotron Resonance Plasma Etch System Market report are Shallow Trench Isolation, Gate electrode, Self-Align Contact and Interconnect, Others

What are the Type segmentation covered in the Electron Cyclotron Resonance Plasma Etch System Market report?

Ans: The Types covered in the Electron Cyclotron Resonance Plasma Etch System Market report are Wet Etch System, Dry Etch System

1 Electron Cyclotron Resonance Plasma Etch System Market Overview
1.1 Product Definition
1.2 Electron Cyclotron Resonance Plasma Etch System by Type
1.2.1 Global Electron Cyclotron Resonance Plasma Etch System Market Value Growth Rate Analysis by Type: 2024 VS 2031
1.2.2 Wet Etch System
1.2.3 Dry Etch System
1.3 Electron Cyclotron Resonance Plasma Etch System by Application
1.3.1 Global Electron Cyclotron Resonance Plasma Etch System Market Value Growth Rate Analysis by Application: 2024 VS 2031
1.3.2 Shallow Trench Isolation
1.3.3 Gate electrode
1.3.4 Self-Align Contact and Interconnect
1.3.5 Others
1.4 Global Market Growth Prospects
1.4.1 Global Electron Cyclotron Resonance Plasma Etch System Production Value Estimates and Forecasts (2020-2031)
1.4.2 Global Electron Cyclotron Resonance Plasma Etch System Production Capacity Estimates and Forecasts (2020-2031)
1.4.3 Global Electron Cyclotron Resonance Plasma Etch System Production Estimates and Forecasts (2020-2031)
1.4.4 Global Electron Cyclotron Resonance Plasma Etch System Market Average Price Estimates and Forecasts (2020-2031)
1.5 Assumptions and Limitations
2 Market Competition by Manufacturers
2.1 Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Manufacturers (2020-2025)
2.2 Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share by Manufacturers (2020-2025)
2.3 Global Key Players of Electron Cyclotron Resonance Plasma Etch System, Industry Ranking, 2023 VS 2024
2.4 Global Electron Cyclotron Resonance Plasma Etch System Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
2.5 Global Electron Cyclotron Resonance Plasma Etch System Average Price by Manufacturers (2020-2025)
2.6 Global Key Manufacturers of Electron Cyclotron Resonance Plasma Etch System, Manufacturing Base Distribution and Headquarters
2.7 Global Key Manufacturers of Electron Cyclotron Resonance Plasma Etch System, Product Offered and Application
2.8 Global Key Manufacturers of Electron Cyclotron Resonance Plasma Etch System, Date of Enter into This Industry
2.9 Electron Cyclotron Resonance Plasma Etch System Market Competitive Situation and Trends
2.9.1 Electron Cyclotron Resonance Plasma Etch System Market Concentration Rate
2.9.2 Global 5 and 10 Largest Electron Cyclotron Resonance Plasma Etch System Players Market Share by Revenue
2.10 Mergers & Acquisitions, Expansion
3 Electron Cyclotron Resonance Plasma Etch System Production by Region
3.1 Global Electron Cyclotron Resonance Plasma Etch System Production Value Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.2 Global Electron Cyclotron Resonance Plasma Etch System Production Value by Region (2020-2031)
3.2.1 Global Electron Cyclotron Resonance Plasma Etch System Production Value by Region (2020-2025)
3.2.2 Global Forecasted Production Value of Electron Cyclotron Resonance Plasma Etch System by Region (2026-2031)
3.3 Global Electron Cyclotron Resonance Plasma Etch System Production Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.4 Global Electron Cyclotron Resonance Plasma Etch System Production Volume by Region (2020-2031)
3.4.1 Global Electron Cyclotron Resonance Plasma Etch System Production by Region (2020-2025)
3.4.2 Global Forecasted Production of Electron Cyclotron Resonance Plasma Etch System by Region (2026-2031)
3.5 Global Electron Cyclotron Resonance Plasma Etch System Market Price Analysis by Region (2020-2025)
3.6 Global Electron Cyclotron Resonance Plasma Etch System Production and Value, Year-over-Year Growth
3.6.1 North America Electron Cyclotron Resonance Plasma Etch System Production Value Estimates and Forecasts (2020-2031)
3.6.2 Europe Electron Cyclotron Resonance Plasma Etch System Production Value Estimates and Forecasts (2020-2031)
3.6.3 China Electron Cyclotron Resonance Plasma Etch System Production Value Estimates and Forecasts (2020-2031)
3.6.4 Japan Electron Cyclotron Resonance Plasma Etch System Production Value Estimates and Forecasts (2020-2031)
4 Electron Cyclotron Resonance Plasma Etch System Consumption by Region
4.1 Global Electron Cyclotron Resonance Plasma Etch System Consumption Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
4.2 Global Electron Cyclotron Resonance Plasma Etch System Consumption by Region (2020-2031)
4.2.1 Global Electron Cyclotron Resonance Plasma Etch System Consumption by Region (2020-2025)
4.2.2 Global Electron Cyclotron Resonance Plasma Etch System Forecasted Consumption by Region (2026-2031)
4.3 North America
4.3.1 North America Electron Cyclotron Resonance Plasma Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.3.2 North America Electron Cyclotron Resonance Plasma Etch System Consumption by Country (2020-2031)
4.3.3 U.S.
4.3.4 Canada
4.4 Europe
4.4.1 Europe Electron Cyclotron Resonance Plasma Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.4.2 Europe Electron Cyclotron Resonance Plasma Etch System Consumption by Country (2020-2031)
4.4.3 Germany
4.4.4 France
4.4.5 U.K.
4.4.6 Italy
4.4.7 Netherlands
4.5 Asia Pacific
4.5.1 Asia Pacific Electron Cyclotron Resonance Plasma Etch System Consumption Growth Rate by Region: 2020 VS 2024 VS 2031
4.5.2 Asia Pacific Electron Cyclotron Resonance Plasma Etch System Consumption by Region (2020-2031)
4.5.3 China
4.5.4 Japan
4.5.5 South Korea
4.5.6 China Taiwan
4.5.7 Southeast Asia
4.5.8 India
4.6 Latin America, Middle East & Africa
4.6.1 Latin America, Middle East & Africa Electron Cyclotron Resonance Plasma Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.6.2 Latin America, Middle East & Africa Electron Cyclotron Resonance Plasma Etch System Consumption by Country (2020-2031)
4.6.3 Mexico
4.6.4 Brazil
4.6.5 Turkey
4.6.6 GCC Countries
5 Segment by Type
5.1 Global Electron Cyclotron Resonance Plasma Etch System Production by Type (2020-2031)
5.1.1 Global Electron Cyclotron Resonance Plasma Etch System Production by Type (2020-2025)
5.1.2 Global Electron Cyclotron Resonance Plasma Etch System Production by Type (2026-2031)
5.1.3 Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Type (2020-2031)
5.2 Global Electron Cyclotron Resonance Plasma Etch System Production Value by Type (2020-2031)
5.2.1 Global Electron Cyclotron Resonance Plasma Etch System Production Value by Type (2020-2025)
5.2.2 Global Electron Cyclotron Resonance Plasma Etch System Production Value by Type (2026-2031)
5.2.3 Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share by Type (2020-2031)
5.3 Global Electron Cyclotron Resonance Plasma Etch System Price by Type (2020-2031)
6 Segment by Application
6.1 Global Electron Cyclotron Resonance Plasma Etch System Production by Application (2020-2031)
6.1.1 Global Electron Cyclotron Resonance Plasma Etch System Production by Application (2020-2025)
6.1.2 Global Electron Cyclotron Resonance Plasma Etch System Production by Application (2026-2031)
6.1.3 Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Application (2020-2031)
6.2 Global Electron Cyclotron Resonance Plasma Etch System Production Value by Application (2020-2031)
6.2.1 Global Electron Cyclotron Resonance Plasma Etch System Production Value by Application (2020-2025)
6.2.2 Global Electron Cyclotron Resonance Plasma Etch System Production Value by Application (2026-2031)
6.2.3 Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share by Application (2020-2031)
6.3 Global Electron Cyclotron Resonance Plasma Etch System Price by Application (2020-2031)
7 Key Companies Profiled
7.1 Lam Research
7.1.1 Lam Research Electron Cyclotron Resonance Plasma Etch System Company Information
7.1.2 Lam Research Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.1.3 Lam Research Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.1.4 Lam Research Main Business and Markets Served
7.1.5 Lam Research Recent Developments/Updates
7.2 Applied Materials
7.2.1 Applied Materials Electron Cyclotron Resonance Plasma Etch System Company Information
7.2.2 Applied Materials Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.2.3 Applied Materials Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.2.4 Applied Materials Main Business and Markets Served
7.2.5 Applied Materials Recent Developments/Updates
7.3 Hitachi High-tech
7.3.1 Hitachi High-tech Electron Cyclotron Resonance Plasma Etch System Company Information
7.3.2 Hitachi High-tech Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.3.3 Hitachi High-tech Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.3.4 Hitachi High-tech Main Business and Markets Served
7.3.5 Hitachi High-tech Recent Developments/Updates
7.4 Tokyo Electron
7.4.1 Tokyo Electron Electron Cyclotron Resonance Plasma Etch System Company Information
7.4.2 Tokyo Electron Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.4.3 Tokyo Electron Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.4.4 Tokyo Electron Main Business and Markets Served
7.4.5 Tokyo Electron Recent Developments/Updates
7.5 Oxford Instruments
7.5.1 Oxford Instruments Electron Cyclotron Resonance Plasma Etch System Company Information
7.5.2 Oxford Instruments Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.5.3 Oxford Instruments Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.5.4 Oxford Instruments Main Business and Markets Served
7.5.5 Oxford Instruments Recent Developments/Updates
7.6 NAURA Technology Group
7.6.1 NAURA Technology Group Electron Cyclotron Resonance Plasma Etch System Company Information
7.6.2 NAURA Technology Group Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.6.3 NAURA Technology Group Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.6.4 NAURA Technology Group Main Business and Markets Served
7.6.5 NAURA Technology Group Recent Developments/Updates
7.7 SPTS Technologies Ltd.
7.7.1 SPTS Technologies Ltd. Electron Cyclotron Resonance Plasma Etch System Company Information
7.7.2 SPTS Technologies Ltd. Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.7.3 SPTS Technologies Ltd. Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.7.4 SPTS Technologies Ltd. Main Business and Markets Served
7.7.5 SPTS Technologies Ltd. Recent Developments/Updates
7.8 AMEC
7.8.1 AMEC Electron Cyclotron Resonance Plasma Etch System Company Information
7.8.2 AMEC Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.8.3 AMEC Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.8.4 AMEC Main Business and Markets Served
7.8.5 AMEC Recent Developments/Updates
7.9 Ulvac
7.9.1 Ulvac Electron Cyclotron Resonance Plasma Etch System Company Information
7.9.2 Ulvac Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.9.3 Ulvac Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.9.4 Ulvac Main Business and Markets Served
7.9.5 Ulvac Recent Developments/Updates
7.10 Samco
7.10.1 Samco Electron Cyclotron Resonance Plasma Etch System Company Information
7.10.2 Samco Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.10.3 Samco Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.10.4 Samco Main Business and Markets Served
7.10.5 Samco Recent Developments/Updates
7.11 Plasma Therm
7.11.1 Plasma Therm Electron Cyclotron Resonance Plasma Etch System Company Information
7.11.2 Plasma Therm Electron Cyclotron Resonance Plasma Etch System Product Portfolio
7.11.3 Plasma Therm Electron Cyclotron Resonance Plasma Etch System Production, Value, Price and Gross Margin (2020-2025)
7.11.4 Plasma Therm Main Business and Markets Served
7.11.5 Plasma Therm Recent Developments/Updates
8 Industry Chain and Sales Channels Analysis
8.1 Electron Cyclotron Resonance Plasma Etch System Industry Chain Analysis
8.2 Electron Cyclotron Resonance Plasma Etch System Raw Material Supply Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.3 Electron Cyclotron Resonance Plasma Etch System Production Mode & Process Analysis
8.4 Electron Cyclotron Resonance Plasma Etch System Sales and Marketing
8.4.1 Electron Cyclotron Resonance Plasma Etch System Sales Channels
8.4.2 Electron Cyclotron Resonance Plasma Etch System Distributors
8.5 Electron Cyclotron Resonance Plasma Etch System Customer Analysis
9 Electron Cyclotron Resonance Plasma Etch System Market Dynamics
9.1 Electron Cyclotron Resonance Plasma Etch System Industry Trends
9.2 Electron Cyclotron Resonance Plasma Etch System Market Drivers
9.3 Electron Cyclotron Resonance Plasma Etch System Market Challenges
9.4 Electron Cyclotron Resonance Plasma Etch System Market Restraints
10 Research Findings and Conclusion
11 Methodology and Data Source
11.1 Methodology/Research Approach
11.1.1 Research Programs/Design
11.1.2 Market Size Estimation
11.1.3 Market Breakdown and Data Triangulation
11.2 Data Source
11.2.1 Secondary Sources
11.2.2 Primary Sources
11.3 Author List
11.4 Disclaimer
List of Tables
 Table 1. Global Electron Cyclotron Resonance Plasma Etch System Market Value by Type, (US$ Million) & (2024 VS 2031)
 Table 2. Global Electron Cyclotron Resonance Plasma Etch System Market Value by Application, (US$ Million) & (2024 VS 2031)
 Table 3. Global Electron Cyclotron Resonance Plasma Etch System Production Capacity (K Units) by Manufacturers in 2024
 Table 4. Global Electron Cyclotron Resonance Plasma Etch System Production by Manufacturers (2020-2025) & (K Units)
 Table 5. Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Manufacturers (2020-2025)
 Table 6. Global Electron Cyclotron Resonance Plasma Etch System Production Value by Manufacturers (2020-2025) & (US$ Million)
 Table 7. Global Electron Cyclotron Resonance Plasma Etch System Production Value Share by Manufacturers (2020-2025)
 Table 8. Global Key Players of Electron Cyclotron Resonance Plasma Etch System, Industry Ranking, 2023 VS 2024
 Table 9. Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value in Electron Cyclotron Resonance Plasma Etch System as of 2024)
 Table 10. Global Market Electron Cyclotron Resonance Plasma Etch System Average Price by Manufacturers (US$/Unit) & (2020-2025)
 Table 11. Global Key Manufacturers of Electron Cyclotron Resonance Plasma Etch System, Manufacturing Base Distribution and Headquarters
 Table 12. Global Key Manufacturers of Electron Cyclotron Resonance Plasma Etch System, Product Offered and Application
 Table 13. Global Key Manufacturers of Electron Cyclotron Resonance Plasma Etch System, Date of Enter into This Industry
 Table 14. Global Electron Cyclotron Resonance Plasma Etch System Manufacturers Market Concentration Ratio (CR5 and HHI)
 Table 15. Mergers & Acquisitions, Expansion Plans
 Table 16. Global Electron Cyclotron Resonance Plasma Etch System Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Table 17. Global Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) by Region (2020-2025)
 Table 18. Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share by Region (2020-2025)
 Table 19. Global Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) Forecast by Region (2026-2031)
 Table 20. Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share Forecast by Region (2026-2031)
 Table 21. Global Electron Cyclotron Resonance Plasma Etch System Production Comparison by Region: 2020 VS 2024 VS 2031 (K Units)
 Table 22. Global Electron Cyclotron Resonance Plasma Etch System Production (K Units) by Region (2020-2025)
 Table 23. Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Region (2020-2025)
 Table 24. Global Electron Cyclotron Resonance Plasma Etch System Production (K Units) Forecast by Region (2026-2031)
 Table 25. Global Electron Cyclotron Resonance Plasma Etch System Production Market Share Forecast by Region (2026-2031)
 Table 26. Global Electron Cyclotron Resonance Plasma Etch System Market Average Price (US$/Unit) by Region (2020-2025)
 Table 27. Global Electron Cyclotron Resonance Plasma Etch System Market Average Price (US$/Unit) by Region (2026-2031)
 Table 28. Global Electron Cyclotron Resonance Plasma Etch System Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (K Units)
 Table 29. Global Electron Cyclotron Resonance Plasma Etch System Consumption by Region (2020-2025) & (K Units)
 Table 30. Global Electron Cyclotron Resonance Plasma Etch System Consumption Market Share by Region (2020-2025)
 Table 31. Global Electron Cyclotron Resonance Plasma Etch System Forecasted Consumption by Region (2026-2031) & (K Units)
 Table 32. Global Electron Cyclotron Resonance Plasma Etch System Forecasted Consumption Market Share by Region (2026-2031)
 Table 33. North America Electron Cyclotron Resonance Plasma Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (K Units)
 Table 34. North America Electron Cyclotron Resonance Plasma Etch System Consumption by Country (2020-2025) & (K Units)
 Table 35. North America Electron Cyclotron Resonance Plasma Etch System Consumption by Country (2026-2031) & (K Units)
 Table 36. Europe Electron Cyclotron Resonance Plasma Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (K Units)
 Table 37. Europe Electron Cyclotron Resonance Plasma Etch System Consumption by Country (2020-2025) & (K Units)
 Table 38. Europe Electron Cyclotron Resonance Plasma Etch System Consumption by Country (2026-2031) & (K Units)
 Table 39. Asia Pacific Electron Cyclotron Resonance Plasma Etch System Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (K Units)
 Table 40. Asia Pacific Electron Cyclotron Resonance Plasma Etch System Consumption by Region (2020-2025) & (K Units)
 Table 41. Asia Pacific Electron Cyclotron Resonance Plasma Etch System Consumption by Region (2026-2031) & (K Units)
 Table 42. Latin America, Middle East & Africa Electron Cyclotron Resonance Plasma Etch System Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (K Units)
 Table 43. Latin America, Middle East & Africa Electron Cyclotron Resonance Plasma Etch System Consumption by Country (2020-2025) & (K Units)
 Table 44. Latin America, Middle East & Africa Electron Cyclotron Resonance Plasma Etch System Consumption by Country (2026-2031) & (K Units)
 Table 45. Global Electron Cyclotron Resonance Plasma Etch System Production (K Units) by Type (2020-2025)
 Table 46. Global Electron Cyclotron Resonance Plasma Etch System Production (K Units) by Type (2026-2031)
 Table 47. Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Type (2020-2025)
 Table 48. Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Type (2026-2031)
 Table 49. Global Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) by Type (2020-2025)
 Table 50. Global Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) by Type (2026-2031)
 Table 51. Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share by Type (2020-2025)
 Table 52. Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share by Type (2026-2031)
 Table 53. Global Electron Cyclotron Resonance Plasma Etch System Price (US$/Unit) by Type (2020-2025)
 Table 54. Global Electron Cyclotron Resonance Plasma Etch System Price (US$/Unit) by Type (2026-2031)
 Table 55. Global Electron Cyclotron Resonance Plasma Etch System Production (K Units) by Application (2020-2025)
 Table 56. Global Electron Cyclotron Resonance Plasma Etch System Production (K Units) by Application (2026-2031)
 Table 57. Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Application (2020-2025)
 Table 58. Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Application (2026-2031)
 Table 59. Global Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) by Application (2020-2025)
 Table 60. Global Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) by Application (2026-2031)
 Table 61. Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share by Application (2020-2025)
 Table 62. Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share by Application (2026-2031)
 Table 63. Global Electron Cyclotron Resonance Plasma Etch System Price (US$/Unit) by Application (2020-2025)
 Table 64. Global Electron Cyclotron Resonance Plasma Etch System Price (US$/Unit) by Application (2026-2031)
 Table 65. Lam Research Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 66. Lam Research Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 67. Lam Research Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 68. Lam Research Main Business and Markets Served
 Table 69. Lam Research Recent Developments/Updates
 Table 70. Applied Materials Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 71. Applied Materials Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 72. Applied Materials Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 73. Applied Materials Main Business and Markets Served
 Table 74. Applied Materials Recent Developments/Updates
 Table 75. Hitachi High-tech Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 76. Hitachi High-tech Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 77. Hitachi High-tech Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 78. Hitachi High-tech Main Business and Markets Served
 Table 79. Hitachi High-tech Recent Developments/Updates
 Table 80. Tokyo Electron Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 81. Tokyo Electron Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 82. Tokyo Electron Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 83. Tokyo Electron Main Business and Markets Served
 Table 84. Tokyo Electron Recent Developments/Updates
 Table 85. Oxford Instruments Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 86. Oxford Instruments Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 87. Oxford Instruments Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 88. Oxford Instruments Main Business and Markets Served
 Table 89. Oxford Instruments Recent Developments/Updates
 Table 90. NAURA Technology Group Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 91. NAURA Technology Group Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 92. NAURA Technology Group Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 93. NAURA Technology Group Main Business and Markets Served
 Table 94. NAURA Technology Group Recent Developments/Updates
 Table 95. SPTS Technologies Ltd. Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 96. SPTS Technologies Ltd. Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 97. SPTS Technologies Ltd. Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 98. SPTS Technologies Ltd. Main Business and Markets Served
 Table 99. SPTS Technologies Ltd. Recent Developments/Updates
 Table 100. AMEC Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 101. AMEC Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 102. AMEC Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 103. AMEC Main Business and Markets Served
 Table 104. AMEC Recent Developments/Updates
 Table 105. Ulvac Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 106. Ulvac Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 107. Ulvac Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 108. Ulvac Main Business and Markets Served
 Table 109. Ulvac Recent Developments/Updates
 Table 110. Samco Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 111. Samco Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 112. Samco Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 113. Samco Main Business and Markets Served
 Table 114. Samco Recent Developments/Updates
 Table 115. Plasma Therm Electron Cyclotron Resonance Plasma Etch System Company Information
 Table 116. Plasma Therm Electron Cyclotron Resonance Plasma Etch System Specification and Application
 Table 117. Plasma Therm Electron Cyclotron Resonance Plasma Etch System Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 118. Plasma Therm Main Business and Markets Served
 Table 119. Plasma Therm Recent Developments/Updates
 Table 120. Key Raw Materials Lists
 Table 121. Raw Materials Key Suppliers Lists
 Table 122. Electron Cyclotron Resonance Plasma Etch System Distributors List
 Table 123. Electron Cyclotron Resonance Plasma Etch System Customers List
 Table 124. Electron Cyclotron Resonance Plasma Etch System Market Trends
 Table 125. Electron Cyclotron Resonance Plasma Etch System Market Drivers
 Table 126. Electron Cyclotron Resonance Plasma Etch System Market Challenges
 Table 127. Electron Cyclotron Resonance Plasma Etch System Market Restraints
 Table 128. Research Programs/Design for This Report
 Table 129. Key Data Information from Secondary Sources
 Table 130. Key Data Information from Primary Sources
 Table 131. Authors List of This Report


List of Figures
 Figure 1. Product Picture of Electron Cyclotron Resonance Plasma Etch System
 Figure 2. Global Electron Cyclotron Resonance Plasma Etch System Market Value by Type, (US$ Million) & (2020-2031)
 Figure 3. Global Electron Cyclotron Resonance Plasma Etch System Market Share by Type: 2024 VS 2031
 Figure 4. Wet Etch System Product Picture
 Figure 5. Dry Etch System Product Picture
 Figure 6. Global Electron Cyclotron Resonance Plasma Etch System Market Value by Application, (US$ Million) & (2020-2031)
 Figure 7. Global Electron Cyclotron Resonance Plasma Etch System Market Share by Application: 2024 VS 2031
 Figure 8. Shallow Trench Isolation
 Figure 9. Gate electrode
 Figure 10. Self-Align Contact and Interconnect
 Figure 11. Others
 Figure 12. Global Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million), 2020 VS 2024 VS 2031
 Figure 13. Global Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) & (2020-2031)
 Figure 14. Global Electron Cyclotron Resonance Plasma Etch System Production Capacity (K Units) & (2020-2031)
 Figure 15. Global Electron Cyclotron Resonance Plasma Etch System Production (K Units) & (2020-2031)
 Figure 16. Global Electron Cyclotron Resonance Plasma Etch System Average Price (US$/Unit) & (2020-2031)
 Figure 17. Electron Cyclotron Resonance Plasma Etch System Report Years Considered
 Figure 18. Electron Cyclotron Resonance Plasma Etch System Production Share by Manufacturers in 2024
 Figure 19. Global Electron Cyclotron Resonance Plasma Etch System Production Value Share by Manufacturers (2024)
 Figure 20. Electron Cyclotron Resonance Plasma Etch System Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
 Figure 21. The Global 5 and 10 Largest Players: Market Share by Electron Cyclotron Resonance Plasma Etch System Revenue in 2024
 Figure 22. Global Electron Cyclotron Resonance Plasma Etch System Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Figure 23. Global Electron Cyclotron Resonance Plasma Etch System Production Value Market Share by Region: 2020 VS 2024 VS 2031
 Figure 24. Global Electron Cyclotron Resonance Plasma Etch System Production Comparison by Region: 2020 VS 2024 VS 2031 (K Units)
 Figure 25. Global Electron Cyclotron Resonance Plasma Etch System Production Market Share by Region: 2020 VS 2024 VS 2031
 Figure 26. North America Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 27. Europe Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 28. China Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 29. Japan Electron Cyclotron Resonance Plasma Etch System Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 30. Global Electron Cyclotron Resonance Plasma Etch System Consumption by Region: 2020 VS 2024 VS 2031 (K Units)
 Figure 31. Global Electron Cyclotron Resonance Plasma Etch System Consumption Market Share by Region: 2020 VS 2024 VS 2031
 Figure 32. North America Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 33. North America Electron Cyclotron Resonance Plasma Etch System Consumption Market Share by Country (2020-2031)
 Figure 34. U.S. Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 35. Canada Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 36. Europe Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 37. Europe Electron Cyclotron Resonance Plasma Etch System Consumption Market Share by Country (2020-2031)
 Figure 38. Germany Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 39. France Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 40. U.K. Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 41. Italy Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 42. Netherlands Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 43. Asia Pacific Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 44. Asia Pacific Electron Cyclotron Resonance Plasma Etch System Consumption Market Share by Region (2020-2031)
 Figure 45. China Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 46. Japan Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 47. South Korea Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 48. China Taiwan Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 49. Southeast Asia Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 50. India Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 51. Latin America, Middle East & Africa Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 52. Latin America, Middle East & Africa Electron Cyclotron Resonance Plasma Etch System Consumption Market Share by Country (2020-2031)
 Figure 53. Mexico Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 54. Brazil Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 55. Turkey Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 56. GCC Countries Electron Cyclotron Resonance Plasma Etch System Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 57. Global Production Market Share of Electron Cyclotron Resonance Plasma Etch System by Type (2020-2031)
 Figure 58. Global Production Value Market Share of Electron Cyclotron Resonance Plasma Etch System by Type (2020-2031)
 Figure 59. Global Electron Cyclotron Resonance Plasma Etch System Price (US$/Unit) by Type (2020-2031)
 Figure 60. Global Production Market Share of Electron Cyclotron Resonance Plasma Etch System by Application (2020-2031)
 Figure 61. Global Production Value Market Share of Electron Cyclotron Resonance Plasma Etch System by Application (2020-2031)
 Figure 62. Global Electron Cyclotron Resonance Plasma Etch System Price (US$/Unit) by Application (2020-2031)
 Figure 63. Electron Cyclotron Resonance Plasma Etch System Value Chain
 Figure 64. Channels of Distribution (Direct Vs Distribution)
 Figure 65. Bottom-up and Top-down Approaches for This Report
 Figure 66. Data Triangulation
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