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Global Deep Ultraviolet (DUV) Lithography Systems Market Research Report 2025
Published Date: February 2025
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Report Code: QYRE-Auto-38Q10351
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Global Deep Ultraviolet DUV Lithography Systems Market Research Report 2022
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Global Deep Ultraviolet (DUV) Lithography Systems Market Research Report 2025

Code: QYRE-Auto-38Q10351
Report
February 2025
Pages:77
QYResearch
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DESCRIPTION
TABLE OF CONTENT
TABLES & FIGURES

Deep Ultraviolet (DUV) Lithography Systems Market

The global market for Deep Ultraviolet (DUV) Lithography Systems was valued at US$ million in the year 2024 and is projected to reach a revised size of US$ million by 2031, growing at a CAGR of %during the forecast period.
North American market for Deep Ultraviolet (DUV) Lithography Systems is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.
Asia-Pacific market for Deep Ultraviolet (DUV) Lithography Systems is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.
The major global manufacturers of Deep Ultraviolet (DUV) Lithography Systems include ASML, HORIBA, Canon, Nikon, etc. In 2024, the world's top three vendors accounted for approximately % of the revenue.

Deep Ultraviolet (DUV) Lithography Systems Market Major Factors

The deep ultraviolet lithography systems market is driven by their essential role in cost-effective semiconductor production. These systems provide the accuracy required for producing integrated circuits across multiple industries, including electronics, automotive, and telecommunications. As semiconductor demand rises with digitalization, DUV systems remain critical despite advancements in EUV technology. They are widely used for mature nodes, ensuring affordability and scalability. Ongoing investments in chip manufacturing infrastructure across the globe further strengthen demand. With applications ranging from consumer devices to industrial electronics, DUV lithography systems maintain strong relevance in global semiconductor ecosystems.

Deep Ultraviolet (DUV) Lithography Systems Market Trends

 One trend is the growing use of DUV systems for manufacturing chips in consumer and automotive sectors, where cost efficiency is a priority. This ensures long-term demand even as advanced nodes evolve.

Another trend is hybrid manufacturing strategies combining DUV and EUV technologies. Semiconductor fabs adopt both to balance affordability with advanced capabilities, ensuring optimal production strategies.

The emphasis on semiconductor self-reliance in different regions also fuels demand. Countries investing in domestic fabs prioritize DUV systems as part of their strategy to strengthen local manufacturing capabilities.

Deep Ultraviolet (DUV) Lithography Systems Market Share

The market is dominated by global semiconductor equipment suppliers with long-standing expertise in lithography systems. Companies providing both equipment and lifecycle services secure stronger competitive positions.

Regionally, Asia-Pacific leads with concentrated chip production. North America emphasizes innovation and scaling, while Europe supports demand with industrial applications and government-backed semiconductor initiatives. Regional strengths drive global competitive balance.

Market Segmentation

Scope of Deep Ultraviolet (DUV) Lithography Systems Market Report

Report Metric Details
Report Name Deep Ultraviolet (DUV) Lithography Systems Market
by Type
  • ArF Immersion
  • ArF Dry
  • KrF
by Application
  • Academic Field
  • Industrial Field
  • Others
Production by Region
  • North America
  • Europe
  • China
  • Japan
Consumption by Region
  • North America (United States, Canada)
  • Europe (Germany, France, UK, Italy, Russia)
  • Asia-Pacific (China, Japan, South Korea, Taiwan)
  • Southeast Asia (India)
  • Latin America (Mexico, Brazil)
By Company ASML, HORIBA, Canon, Nikon
Forecast units USD million in value
Report coverage Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

  • Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
  • Chapter 2: Detailed analysis of Deep Ultraviolet (DUV) Lithography Systems manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
  • Chapter 3: Production/output, value of Deep Ultraviolet (DUV) Lithography Systems by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
  • Chapter 4: Consumption of Deep Ultraviolet (DUV) Lithography Systems in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
  • Chapter 5: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
  • Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
  • Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
  • Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
  • Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
  • Chapter 10: The main points and conclusions of the report.

FAQ for this report

Who are the main players in the Deep Ultraviolet (DUV) Lithography Systems Market report?

Ans: The main players in the Deep Ultraviolet (DUV) Lithography Systems Market are ASML, HORIBA, Canon, Nikon

What are the Application segmentation covered in the Deep Ultraviolet (DUV) Lithography Systems Market report?

Ans: The Applications covered in the Deep Ultraviolet (DUV) Lithography Systems Market report are Academic Field, Industrial Field, Others

What are the Type segmentation covered in the Deep Ultraviolet (DUV) Lithography Systems Market report?

Ans: The Types covered in the Deep Ultraviolet (DUV) Lithography Systems Market report are ArF Immersion, ArF Dry, KrF

1 Deep Ultraviolet (DUV) Lithography Systems Market Overview
1.1 Product Definition
1.2 Deep Ultraviolet (DUV) Lithography Systems by Type
1.2.1 Global Deep Ultraviolet (DUV) Lithography Systems Market Value Growth Rate Analysis by Type: 2024 VS 2031
1.2.2 ArF Immersion
1.2.3 ArF Dry
1.2.4 KrF
1.3 Deep Ultraviolet (DUV) Lithography Systems by Application
1.3.1 Global Deep Ultraviolet (DUV) Lithography Systems Market Value Growth Rate Analysis by Application: 2024 VS 2031
1.3.2 Academic Field
1.3.3 Industrial Field
1.3.4 Others
1.4 Global Market Growth Prospects
1.4.1 Global Deep Ultraviolet (DUV) Lithography Systems Production Value Estimates and Forecasts (2020-2031)
1.4.2 Global Deep Ultraviolet (DUV) Lithography Systems Production Capacity Estimates and Forecasts (2020-2031)
1.4.3 Global Deep Ultraviolet (DUV) Lithography Systems Production Estimates and Forecasts (2020-2031)
1.4.4 Global Deep Ultraviolet (DUV) Lithography Systems Market Average Price Estimates and Forecasts (2020-2031)
1.5 Assumptions and Limitations
2 Market Competition by Manufacturers
2.1 Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Manufacturers (2020-2025)
2.2 Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share by Manufacturers (2020-2025)
2.3 Global Key Players of Deep Ultraviolet (DUV) Lithography Systems, Industry Ranking, 2023 VS 2024
2.4 Global Deep Ultraviolet (DUV) Lithography Systems Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
2.5 Global Deep Ultraviolet (DUV) Lithography Systems Average Price by Manufacturers (2020-2025)
2.6 Global Key Manufacturers of Deep Ultraviolet (DUV) Lithography Systems, Manufacturing Base Distribution and Headquarters
2.7 Global Key Manufacturers of Deep Ultraviolet (DUV) Lithography Systems, Product Offered and Application
2.8 Global Key Manufacturers of Deep Ultraviolet (DUV) Lithography Systems, Date of Enter into This Industry
2.9 Deep Ultraviolet (DUV) Lithography Systems Market Competitive Situation and Trends
2.9.1 Deep Ultraviolet (DUV) Lithography Systems Market Concentration Rate
2.9.2 Global 5 and 10 Largest Deep Ultraviolet (DUV) Lithography Systems Players Market Share by Revenue
2.10 Mergers & Acquisitions, Expansion
3 Deep Ultraviolet (DUV) Lithography Systems Production by Region
3.1 Global Deep Ultraviolet (DUV) Lithography Systems Production Value Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.2 Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Region (2020-2031)
3.2.1 Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Region (2020-2025)
3.2.2 Global Forecasted Production Value of Deep Ultraviolet (DUV) Lithography Systems by Region (2026-2031)
3.3 Global Deep Ultraviolet (DUV) Lithography Systems Production Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.4 Global Deep Ultraviolet (DUV) Lithography Systems Production Volume by Region (2020-2031)
3.4.1 Global Deep Ultraviolet (DUV) Lithography Systems Production by Region (2020-2025)
3.4.2 Global Forecasted Production of Deep Ultraviolet (DUV) Lithography Systems by Region (2026-2031)
3.5 Global Deep Ultraviolet (DUV) Lithography Systems Market Price Analysis by Region (2020-2025)
3.6 Global Deep Ultraviolet (DUV) Lithography Systems Production and Value, Year-over-Year Growth
3.6.1 North America Deep Ultraviolet (DUV) Lithography Systems Production Value Estimates and Forecasts (2020-2031)
3.6.2 Europe Deep Ultraviolet (DUV) Lithography Systems Production Value Estimates and Forecasts (2020-2031)
3.6.3 China Deep Ultraviolet (DUV) Lithography Systems Production Value Estimates and Forecasts (2020-2031)
3.6.4 Japan Deep Ultraviolet (DUV) Lithography Systems Production Value Estimates and Forecasts (2020-2031)
4 Deep Ultraviolet (DUV) Lithography Systems Consumption by Region
4.1 Global Deep Ultraviolet (DUV) Lithography Systems Consumption Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
4.2 Global Deep Ultraviolet (DUV) Lithography Systems Consumption by Region (2020-2031)
4.2.1 Global Deep Ultraviolet (DUV) Lithography Systems Consumption by Region (2020-2025)
4.2.2 Global Deep Ultraviolet (DUV) Lithography Systems Forecasted Consumption by Region (2026-2031)
4.3 North America
4.3.1 North America Deep Ultraviolet (DUV) Lithography Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.3.2 North America Deep Ultraviolet (DUV) Lithography Systems Consumption by Country (2020-2031)
4.3.3 U.S.
4.3.4 Canada
4.4 Europe
4.4.1 Europe Deep Ultraviolet (DUV) Lithography Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.4.2 Europe Deep Ultraviolet (DUV) Lithography Systems Consumption by Country (2020-2031)
4.4.3 Germany
4.4.4 France
4.4.5 U.K.
4.4.6 Italy
4.4.7 Netherlands
4.5 Asia Pacific
4.5.1 Asia Pacific Deep Ultraviolet (DUV) Lithography Systems Consumption Growth Rate by Region: 2020 VS 2024 VS 2031
4.5.2 Asia Pacific Deep Ultraviolet (DUV) Lithography Systems Consumption by Region (2020-2031)
4.5.3 China
4.5.4 Japan
4.5.5 South Korea
4.5.6 China Taiwan
4.5.7 Southeast Asia
4.5.8 India
4.6 Latin America, Middle East & Africa
4.6.1 Latin America, Middle East & Africa Deep Ultraviolet (DUV) Lithography Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.6.2 Latin America, Middle East & Africa Deep Ultraviolet (DUV) Lithography Systems Consumption by Country (2020-2031)
4.6.3 Mexico
4.6.4 Brazil
4.6.5 Turkey
4.6.6 GCC Countries
5 Segment by Type
5.1 Global Deep Ultraviolet (DUV) Lithography Systems Production by Type (2020-2031)
5.1.1 Global Deep Ultraviolet (DUV) Lithography Systems Production by Type (2020-2025)
5.1.2 Global Deep Ultraviolet (DUV) Lithography Systems Production by Type (2026-2031)
5.1.3 Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Type (2020-2031)
5.2 Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Type (2020-2031)
5.2.1 Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Type (2020-2025)
5.2.2 Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Type (2026-2031)
5.2.3 Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share by Type (2020-2031)
5.3 Global Deep Ultraviolet (DUV) Lithography Systems Price by Type (2020-2031)
6 Segment by Application
6.1 Global Deep Ultraviolet (DUV) Lithography Systems Production by Application (2020-2031)
6.1.1 Global Deep Ultraviolet (DUV) Lithography Systems Production by Application (2020-2025)
6.1.2 Global Deep Ultraviolet (DUV) Lithography Systems Production by Application (2026-2031)
6.1.3 Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Application (2020-2031)
6.2 Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Application (2020-2031)
6.2.1 Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Application (2020-2025)
6.2.2 Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Application (2026-2031)
6.2.3 Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share by Application (2020-2031)
6.3 Global Deep Ultraviolet (DUV) Lithography Systems Price by Application (2020-2031)
7 Key Companies Profiled
7.1 ASML
7.1.1 ASML Deep Ultraviolet (DUV) Lithography Systems Company Information
7.1.2 ASML Deep Ultraviolet (DUV) Lithography Systems Product Portfolio
7.1.3 ASML Deep Ultraviolet (DUV) Lithography Systems Production, Value, Price and Gross Margin (2020-2025)
7.1.4 ASML Main Business and Markets Served
7.1.5 ASML Recent Developments/Updates
7.2 HORIBA
7.2.1 HORIBA Deep Ultraviolet (DUV) Lithography Systems Company Information
7.2.2 HORIBA Deep Ultraviolet (DUV) Lithography Systems Product Portfolio
7.2.3 HORIBA Deep Ultraviolet (DUV) Lithography Systems Production, Value, Price and Gross Margin (2020-2025)
7.2.4 HORIBA Main Business and Markets Served
7.2.5 HORIBA Recent Developments/Updates
7.3 Canon
7.3.1 Canon Deep Ultraviolet (DUV) Lithography Systems Company Information
7.3.2 Canon Deep Ultraviolet (DUV) Lithography Systems Product Portfolio
7.3.3 Canon Deep Ultraviolet (DUV) Lithography Systems Production, Value, Price and Gross Margin (2020-2025)
7.3.4 Canon Main Business and Markets Served
7.3.5 Canon Recent Developments/Updates
7.4 Nikon
7.4.1 Nikon Deep Ultraviolet (DUV) Lithography Systems Company Information
7.4.2 Nikon Deep Ultraviolet (DUV) Lithography Systems Product Portfolio
7.4.3 Nikon Deep Ultraviolet (DUV) Lithography Systems Production, Value, Price and Gross Margin (2020-2025)
7.4.4 Nikon Main Business and Markets Served
7.4.5 Nikon Recent Developments/Updates
8 Industry Chain and Sales Channels Analysis
8.1 Deep Ultraviolet (DUV) Lithography Systems Industry Chain Analysis
8.2 Deep Ultraviolet (DUV) Lithography Systems Raw Material Supply Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.3 Deep Ultraviolet (DUV) Lithography Systems Production Mode & Process Analysis
8.4 Deep Ultraviolet (DUV) Lithography Systems Sales and Marketing
8.4.1 Deep Ultraviolet (DUV) Lithography Systems Sales Channels
8.4.2 Deep Ultraviolet (DUV) Lithography Systems Distributors
8.5 Deep Ultraviolet (DUV) Lithography Systems Customer Analysis
9 Deep Ultraviolet (DUV) Lithography Systems Market Dynamics
9.1 Deep Ultraviolet (DUV) Lithography Systems Industry Trends
9.2 Deep Ultraviolet (DUV) Lithography Systems Market Drivers
9.3 Deep Ultraviolet (DUV) Lithography Systems Market Challenges
9.4 Deep Ultraviolet (DUV) Lithography Systems Market Restraints
10 Research Findings and Conclusion
11 Methodology and Data Source
11.1 Methodology/Research Approach
11.1.1 Research Programs/Design
11.1.2 Market Size Estimation
11.1.3 Market Breakdown and Data Triangulation
11.2 Data Source
11.2.1 Secondary Sources
11.2.2 Primary Sources
11.3 Author List
11.4 Disclaimer
List of Tables
 Table 1. Global Deep Ultraviolet (DUV) Lithography Systems Market Value by Type, (US$ Million) & (2024 VS 2031)
 Table 2. Global Deep Ultraviolet (DUV) Lithography Systems Market Value by Application, (US$ Million) & (2024 VS 2031)
 Table 3. Global Deep Ultraviolet (DUV) Lithography Systems Production Capacity (Units) by Manufacturers in 2024
 Table 4. Global Deep Ultraviolet (DUV) Lithography Systems Production by Manufacturers (2020-2025) & (Units)
 Table 5. Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Manufacturers (2020-2025)
 Table 6. Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Manufacturers (2020-2025) & (US$ Million)
 Table 7. Global Deep Ultraviolet (DUV) Lithography Systems Production Value Share by Manufacturers (2020-2025)
 Table 8. Global Key Players of Deep Ultraviolet (DUV) Lithography Systems, Industry Ranking, 2023 VS 2024
 Table 9. Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value in Deep Ultraviolet (DUV) Lithography Systems as of 2024)
 Table 10. Global Market Deep Ultraviolet (DUV) Lithography Systems Average Price by Manufacturers (US$/Unit) & (2020-2025)
 Table 11. Global Key Manufacturers of Deep Ultraviolet (DUV) Lithography Systems, Manufacturing Base Distribution and Headquarters
 Table 12. Global Key Manufacturers of Deep Ultraviolet (DUV) Lithography Systems, Product Offered and Application
 Table 13. Global Key Manufacturers of Deep Ultraviolet (DUV) Lithography Systems, Date of Enter into This Industry
 Table 14. Global Deep Ultraviolet (DUV) Lithography Systems Manufacturers Market Concentration Ratio (CR5 and HHI)
 Table 15. Mergers & Acquisitions, Expansion Plans
 Table 16. Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Table 17. Global Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) by Region (2020-2025)
 Table 18. Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share by Region (2020-2025)
 Table 19. Global Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) Forecast by Region (2026-2031)
 Table 20. Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share Forecast by Region (2026-2031)
 Table 21. Global Deep Ultraviolet (DUV) Lithography Systems Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)
 Table 22. Global Deep Ultraviolet (DUV) Lithography Systems Production (Units) by Region (2020-2025)
 Table 23. Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Region (2020-2025)
 Table 24. Global Deep Ultraviolet (DUV) Lithography Systems Production (Units) Forecast by Region (2026-2031)
 Table 25. Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share Forecast by Region (2026-2031)
 Table 26. Global Deep Ultraviolet (DUV) Lithography Systems Market Average Price (US$/Unit) by Region (2020-2025)
 Table 27. Global Deep Ultraviolet (DUV) Lithography Systems Market Average Price (US$/Unit) by Region (2026-2031)
 Table 28. Global Deep Ultraviolet (DUV) Lithography Systems Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)
 Table 29. Global Deep Ultraviolet (DUV) Lithography Systems Consumption by Region (2020-2025) & (Units)
 Table 30. Global Deep Ultraviolet (DUV) Lithography Systems Consumption Market Share by Region (2020-2025)
 Table 31. Global Deep Ultraviolet (DUV) Lithography Systems Forecasted Consumption by Region (2026-2031) & (Units)
 Table 32. Global Deep Ultraviolet (DUV) Lithography Systems Forecasted Consumption Market Share by Region (2026-2031)
 Table 33. North America Deep Ultraviolet (DUV) Lithography Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 34. North America Deep Ultraviolet (DUV) Lithography Systems Consumption by Country (2020-2025) & (Units)
 Table 35. North America Deep Ultraviolet (DUV) Lithography Systems Consumption by Country (2026-2031) & (Units)
 Table 36. Europe Deep Ultraviolet (DUV) Lithography Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 37. Europe Deep Ultraviolet (DUV) Lithography Systems Consumption by Country (2020-2025) & (Units)
 Table 38. Europe Deep Ultraviolet (DUV) Lithography Systems Consumption by Country (2026-2031) & (Units)
 Table 39. Asia Pacific Deep Ultraviolet (DUV) Lithography Systems Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)
 Table 40. Asia Pacific Deep Ultraviolet (DUV) Lithography Systems Consumption by Region (2020-2025) & (Units)
 Table 41. Asia Pacific Deep Ultraviolet (DUV) Lithography Systems Consumption by Region (2026-2031) & (Units)
 Table 42. Latin America, Middle East & Africa Deep Ultraviolet (DUV) Lithography Systems Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 43. Latin America, Middle East & Africa Deep Ultraviolet (DUV) Lithography Systems Consumption by Country (2020-2025) & (Units)
 Table 44. Latin America, Middle East & Africa Deep Ultraviolet (DUV) Lithography Systems Consumption by Country (2026-2031) & (Units)
 Table 45. Global Deep Ultraviolet (DUV) Lithography Systems Production (Units) by Type (2020-2025)
 Table 46. Global Deep Ultraviolet (DUV) Lithography Systems Production (Units) by Type (2026-2031)
 Table 47. Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Type (2020-2025)
 Table 48. Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Type (2026-2031)
 Table 49. Global Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) by Type (2020-2025)
 Table 50. Global Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) by Type (2026-2031)
 Table 51. Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share by Type (2020-2025)
 Table 52. Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share by Type (2026-2031)
 Table 53. Global Deep Ultraviolet (DUV) Lithography Systems Price (US$/Unit) by Type (2020-2025)
 Table 54. Global Deep Ultraviolet (DUV) Lithography Systems Price (US$/Unit) by Type (2026-2031)
 Table 55. Global Deep Ultraviolet (DUV) Lithography Systems Production (Units) by Application (2020-2025)
 Table 56. Global Deep Ultraviolet (DUV) Lithography Systems Production (Units) by Application (2026-2031)
 Table 57. Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Application (2020-2025)
 Table 58. Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Application (2026-2031)
 Table 59. Global Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) by Application (2020-2025)
 Table 60. Global Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) by Application (2026-2031)
 Table 61. Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share by Application (2020-2025)
 Table 62. Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share by Application (2026-2031)
 Table 63. Global Deep Ultraviolet (DUV) Lithography Systems Price (US$/Unit) by Application (2020-2025)
 Table 64. Global Deep Ultraviolet (DUV) Lithography Systems Price (US$/Unit) by Application (2026-2031)
 Table 65. ASML Deep Ultraviolet (DUV) Lithography Systems Company Information
 Table 66. ASML Deep Ultraviolet (DUV) Lithography Systems Specification and Application
 Table 67. ASML Deep Ultraviolet (DUV) Lithography Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 68. ASML Main Business and Markets Served
 Table 69. ASML Recent Developments/Updates
 Table 70. HORIBA Deep Ultraviolet (DUV) Lithography Systems Company Information
 Table 71. HORIBA Deep Ultraviolet (DUV) Lithography Systems Specification and Application
 Table 72. HORIBA Deep Ultraviolet (DUV) Lithography Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 73. HORIBA Main Business and Markets Served
 Table 74. HORIBA Recent Developments/Updates
 Table 75. Canon Deep Ultraviolet (DUV) Lithography Systems Company Information
 Table 76. Canon Deep Ultraviolet (DUV) Lithography Systems Specification and Application
 Table 77. Canon Deep Ultraviolet (DUV) Lithography Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 78. Canon Main Business and Markets Served
 Table 79. Canon Recent Developments/Updates
 Table 80. Nikon Deep Ultraviolet (DUV) Lithography Systems Company Information
 Table 81. Nikon Deep Ultraviolet (DUV) Lithography Systems Specification and Application
 Table 82. Nikon Deep Ultraviolet (DUV) Lithography Systems Production (Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 83. Nikon Main Business and Markets Served
 Table 84. Nikon Recent Developments/Updates
 Table 85. Key Raw Materials Lists
 Table 86. Raw Materials Key Suppliers Lists
 Table 87. Deep Ultraviolet (DUV) Lithography Systems Distributors List
 Table 88. Deep Ultraviolet (DUV) Lithography Systems Customers List
 Table 89. Deep Ultraviolet (DUV) Lithography Systems Market Trends
 Table 90. Deep Ultraviolet (DUV) Lithography Systems Market Drivers
 Table 91. Deep Ultraviolet (DUV) Lithography Systems Market Challenges
 Table 92. Deep Ultraviolet (DUV) Lithography Systems Market Restraints
 Table 93. Research Programs/Design for This Report
 Table 94. Key Data Information from Secondary Sources
 Table 95. Key Data Information from Primary Sources
 Table 96. Authors List of This Report


List of Figures
 Figure 1. Product Picture of Deep Ultraviolet (DUV) Lithography Systems
 Figure 2. Global Deep Ultraviolet (DUV) Lithography Systems Market Value by Type, (US$ Million) & (2020-2031)
 Figure 3. Global Deep Ultraviolet (DUV) Lithography Systems Market Share by Type: 2024 VS 2031
 Figure 4. ArF Immersion Product Picture
 Figure 5. ArF Dry Product Picture
 Figure 6. KrF Product Picture
 Figure 7. Global Deep Ultraviolet (DUV) Lithography Systems Market Value by Application, (US$ Million) & (2020-2031)
 Figure 8. Global Deep Ultraviolet (DUV) Lithography Systems Market Share by Application: 2024 VS 2031
 Figure 9. Academic Field
 Figure 10. Industrial Field
 Figure 11. Others
 Figure 12. Global Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million), 2020 VS 2024 VS 2031
 Figure 13. Global Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) & (2020-2031)
 Figure 14. Global Deep Ultraviolet (DUV) Lithography Systems Production Capacity (Units) & (2020-2031)
 Figure 15. Global Deep Ultraviolet (DUV) Lithography Systems Production (Units) & (2020-2031)
 Figure 16. Global Deep Ultraviolet (DUV) Lithography Systems Average Price (US$/Unit) & (2020-2031)
 Figure 17. Deep Ultraviolet (DUV) Lithography Systems Report Years Considered
 Figure 18. Deep Ultraviolet (DUV) Lithography Systems Production Share by Manufacturers in 2024
 Figure 19. Global Deep Ultraviolet (DUV) Lithography Systems Production Value Share by Manufacturers (2024)
 Figure 20. Deep Ultraviolet (DUV) Lithography Systems Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
 Figure 21. The Global 5 and 10 Largest Players: Market Share by Deep Ultraviolet (DUV) Lithography Systems Revenue in 2024
 Figure 22. Global Deep Ultraviolet (DUV) Lithography Systems Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Figure 23. Global Deep Ultraviolet (DUV) Lithography Systems Production Value Market Share by Region: 2020 VS 2024 VS 2031
 Figure 24. Global Deep Ultraviolet (DUV) Lithography Systems Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)
 Figure 25. Global Deep Ultraviolet (DUV) Lithography Systems Production Market Share by Region: 2020 VS 2024 VS 2031
 Figure 26. North America Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 27. Europe Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 28. China Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 29. Japan Deep Ultraviolet (DUV) Lithography Systems Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 30. Global Deep Ultraviolet (DUV) Lithography Systems Consumption by Region: 2020 VS 2024 VS 2031 (Units)
 Figure 31. Global Deep Ultraviolet (DUV) Lithography Systems Consumption Market Share by Region: 2020 VS 2024 VS 2031
 Figure 32. North America Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 33. North America Deep Ultraviolet (DUV) Lithography Systems Consumption Market Share by Country (2020-2031)
 Figure 34. U.S. Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 35. Canada Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 36. Europe Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 37. Europe Deep Ultraviolet (DUV) Lithography Systems Consumption Market Share by Country (2020-2031)
 Figure 38. Germany Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 39. France Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 40. U.K. Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 41. Italy Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 42. Netherlands Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 43. Asia Pacific Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 44. Asia Pacific Deep Ultraviolet (DUV) Lithography Systems Consumption Market Share by Region (2020-2031)
 Figure 45. China Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 46. Japan Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 47. South Korea Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 48. China Taiwan Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 49. Southeast Asia Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 50. India Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 51. Latin America, Middle East & Africa Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 52. Latin America, Middle East & Africa Deep Ultraviolet (DUV) Lithography Systems Consumption Market Share by Country (2020-2031)
 Figure 53. Mexico Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 54. Brazil Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 55. Turkey Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 56. GCC Countries Deep Ultraviolet (DUV) Lithography Systems Consumption and Growth Rate (2020-2031) & (Units)
 Figure 57. Global Production Market Share of Deep Ultraviolet (DUV) Lithography Systems by Type (2020-2031)
 Figure 58. Global Production Value Market Share of Deep Ultraviolet (DUV) Lithography Systems by Type (2020-2031)
 Figure 59. Global Deep Ultraviolet (DUV) Lithography Systems Price (US$/Unit) by Type (2020-2031)
 Figure 60. Global Production Market Share of Deep Ultraviolet (DUV) Lithography Systems by Application (2020-2031)
 Figure 61. Global Production Value Market Share of Deep Ultraviolet (DUV) Lithography Systems by Application (2020-2031)
 Figure 62. Global Deep Ultraviolet (DUV) Lithography Systems Price (US$/Unit) by Application (2020-2031)
 Figure 63. Deep Ultraviolet (DUV) Lithography Systems Value Chain
 Figure 64. Channels of Distribution (Direct Vs Distribution)
 Figure 65. Bottom-up and Top-down Approaches for This Report
 Figure 66. Data Triangulation
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