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Global Semiconductor Process Automation and Control Equipment Market Research Report 2025
Published Date: May 2025
|
Report Code: QYRE-Auto-3M18032
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Global Semiconductor Process Automation and Control Equipment Market Research Report 2024
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Global Semiconductor Process Automation and Control Equipment Market Research Report 2025

Code: QYRE-Auto-3M18032
Report
May 2025
Pages:136
QYResearch
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DESCRIPTION
TABLE OF CONTENT
TABLES & FIGURES
FEATURED COMPANIES
MKS Instruments
Horiba Ltd
Fujikin
VAT
CKD
Swagelok
KITZ SCT
Sevenstar
Hitachi Metals Ltd
Pivotal Systems
MKP
Azbil Corporation
Atlas Copco (Edwards Vacuum)
Ebara Corporation
Pfeiffer Vacuum GmbH
Entegris
GEMU
SMC Corporation
IHARA
TESCOM
Festo
Rotarex
Asahi Yukizai
Watlow (CRC)
INFICON
Canon Anelva
Agilent
ULVAC
Advanced Thermal Sciences Corporation (ATS)
Shinwa Controls
Unisem
GST (Global Standarard Technology)
FST (Fine Semitech Corp)
Techist
Pall
Camfil
Nippon Seisen
Exyte Technology
YESIANG Enterprise
LOTVACUUM
Kashiyama Industries
Hanbell Precise Machinery
Busch Vacuum
SKY Technology Development
HIGHVAC Corporation
Osaka Vacuum, Ltd.
Taiko Kikai Industries
EVP Vacuum Technology
Scroll Laboratories, Inc
Presys
Highlight Tech Corp (HTC)
Ham-Let
TK-FUJIKIN
Valex
Fitok
GCE Group
Hy-Lok
Bronkhorst
KOFLOC
Sensirion

Semiconductor Process Automation and Control Equipment Market Size

The global market for Semiconductor Process Automation and Control Equipment was valued at US$ 10030 million in the year 2024 and is projected to reach a revised size of US$ 14770 million by 2031, growing at a CAGR of 5.8% during the forecast period.

Semiconductor Process Automation and Control Equipment Market

Semiconductor Process Automation and Control Equipment Market

According to the SEMI, global sales of semiconductor equipment was US$ 109 billion in 2022, a year-on-year increase of 5.6%. Mainland China is the largest semiconductor equipment market in the world. For the third consecutive year, China remained the largest semiconductor equipment market in 2022 despite a 5% slowdown in the pace of investments in the region year over year, accounting for $28.3 billion in billings. China Taiwan, the second-largest destination for equipment spending, recorded an increase of 8% to $26.8 billion, marking the fourth straight year of growth for the region. Equipment sales to Korea contracted 14% to $21.5 billion. Annual semiconductor equipment investments in Europe surged 93%, while North America logged a 38% increase. Sales to the Rest of World and Japan increased 34% and 7% year over year, respectively.
This report aims to provide a comprehensive presentation of the global market for Semiconductor Process Automation and Control Equipment, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Semiconductor Process Automation and Control Equipment.
The Semiconductor Process Automation and Control Equipment market size, estimations, and forecasts are provided in terms of and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global Semiconductor Process Automation and Control Equipment market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the Semiconductor Process Automation and Control Equipment companies, new entrants, and industry chain related companies in this market with information on the revenues for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Market Segmentation

Scope of Semiconductor Process Automation and Control Equipment Market Report

Report Metric Details
Report Name Semiconductor Process Automation and Control Equipment Market
Accounted market size in year US$ 10030 million
Forecasted market size in 2031 US$ 14770 million
CAGR 5.8%
Base Year year
Forecasted years 2025 - 2031
Segment by Type
Segment by Application
  • Etching Equipment
  • Deposition (PVD & CVD)
  • Semiconductor Inspection Equipment
  • Coater & Developer
  • Lithography Machine
  • Cleaning Equipment
  • Ion Implanter
  • CMP Equipment
  • Others
By Region
  • North America (United States, Canada)
  • Europe (Germany, France, UK, Italy, Russia) Rest of Europe
  • Nordic Countries
  • Asia-Pacific (China, Japan, South Korea)
  • Southeast Asia (India, Australia)
  • Rest of Asia
  • Latin America (Mexico, Brazil)
  • Rest of Latin America
  • Middle East & Africa (Turkey, Saudi Arabia, UAE, Rest of MEA)
By Company MKS Instruments, HORIBA, Fujikin, VAT, CKD, Swagelok, KITZ SCT, Sevenstar, Hitachi Metals, Ltd, Pivotal Systems, MKP, Azbil Corporation, Atlas Copco (Edwards Vacuum), Ebara Corporation, Pfeiffer Vacuum GmbH, Entegris, GEMU, SMC Corporation, IHARA, TESCOM, Festo, Rotarex, Asahi-Yukizai, Watlow (CRC), Inficon, Canon ANELVA, Agilent, ULVAC, Advanced Thermal Sciences Corporation (ATS), Shinwa Controls, Unisem, GST (Global Standarard Technology), FST (Fine Semitech Corp), Techist, Pall, Camfil, Nippon Seisen, Exyte Technology, YESIANG Enterprise, LOTVACUUM, Kashiyama Industries, Hanbell Precise Machinery, Busch Vacuum, SKY Technology Development, Highvac Corporation, Osaka Vacuum, Ltd, Taiko Kikai Industries, EVP Vacuum Technology, Scroll Laboratories, Inc, Presys, HIGHLIGHT TECH CORP（HTC）, Ham-Let, TK-Fujikin, Valex, FITOK, GCE Group, Hy-Lok, Bronkhorst, Kofloc, Sensirion
Forecast units USD million in value
Report coverage Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

  • Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
  • Chapter 2: Introduces executive summary of global market size, regional market size, this section also introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by companies in the industry, and the analysis of relevant policies in the industry.
  • Chapter 3: Detailed analysis of Semiconductor Process Automation and Control Equipment company competitive landscape, revenue market share, latest development plan, merger, and acquisition information, etc.
  • Chapter 4: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
  • Chapter 5: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
  • Chapter 6, 7, 8, 9, 10: North America, Europe, Asia Pacific, Latin America, Middle East and Africa segment by country. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and capacity of each country in the world.
  • Chapter 11: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
  • Chapter 12: The main points and conclusions of the report.

FAQ for this report

How fast is Semiconductor Process Automation and Control Equipment Market growing?

Ans: The Semiconductor Process Automation and Control Equipment Market witnessing a CAGR of 5.8% during the forecast period 2025-2031.

What is the Semiconductor Process Automation and Control Equipment Market size in 2031?

Ans: The Semiconductor Process Automation and Control Equipment Market size in 2031 will be US$ 14770 million.

What is the Semiconductor Process Automation and Control Equipment Market share by region?

Ans: For the third consecutive year, China remained the largest semiconductor equipment market in 2022 despite a 5% slowdown in the pace of investments in the region year over year, accounting for $28.3 billion in billings.

Who are the main players in the Semiconductor Process Automation and Control Equipment Market report?

Ans: The main players in the Semiconductor Process Automation and Control Equipment Market are MKS Instruments, HORIBA, Fujikin, VAT, CKD, Swagelok, KITZ SCT, Sevenstar, Hitachi Metals, Ltd, Pivotal Systems, MKP, Azbil Corporation, Atlas Copco (Edwards Vacuum), Ebara Corporation, Pfeiffer Vacuum GmbH, Entegris, GEMU, SMC Corporation, IHARA, TESCOM, Festo, Rotarex, Asahi-Yukizai, Watlow (CRC), Inficon, Canon ANELVA, Agilent, ULVAC, Advanced Thermal Sciences Corporation (ATS), Shinwa Controls, Unisem, GST (Global Standarard Technology), FST (Fine Semitech Corp), Techist, Pall, Camfil, Nippon Seisen, Exyte Technology, YESIANG Enterprise, LOTVACUUM, Kashiyama Industries, Hanbell Precise Machinery, Busch Vacuum, SKY Technology Development, Highvac Corporation, Osaka Vacuum, Ltd, Taiko Kikai Industries, EVP Vacuum Technology, Scroll Laboratories, Inc, Presys, HIGHLIGHT TECH CORP（HTC）, Ham-Let, TK-Fujikin, Valex, FITOK, GCE Group, Hy-Lok, Bronkhorst, Kofloc, Sensirion

What are the Application segmentation covered in the Semiconductor Process Automation and Control Equipment Market report?

Ans: The Applications covered in the Semiconductor Process Automation and Control Equipment Market report are Etching Equipment, Deposition (PVD & CVD), Semiconductor Inspection Equipment, Coater & Developer, Lithography Machine, Cleaning Equipment, Ion Implanter, CMP Equipment, Others

What are the Type segmentation covered in the Semiconductor Process Automation and Control Equipment Market report?

Ans: The Types covered in the Semiconductor Process Automation and Control Equipment Market report are Mass Flow Controller (MFC) for Semiconductor, Valves for Semiconductor Equipment, Pumps for Semiconductor Equipment, Vacuum Gauges for Semiconductor Equipment, Semiconductor Chiller, Vacuum Flanges & Fittings for Semiconductor, Heater Jackets & Process Traps for Semiconductor, RF Generator for Semiconductor, Semiconductor Gas Filter, Others

Recommended Reports

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Semiconductor Process Control

Etching and Deposition Systems

1 Report Overview
1.1 Study Scope
1.2 Market Analysis by Type
1.2.1 Global Semiconductor Process Automation and Control Equipment Market Size Growth Rate by Type: 2020 VS 2024 VS 2031
1.2.2 Mass Flow Controller (MFC) for Semiconductor
1.2.3 Valves for Semiconductor Equipment
1.2.4 Pumps for Semiconductor Equipment
1.2.5 Vacuum Gauges for Semiconductor Equipment
1.2.6 Semiconductor Chiller
1.2.7 Vacuum Flanges & Fittings for Semiconductor
1.2.8 Heater Jackets & Process Traps for Semiconductor
1.2.9 RF Generator for Semiconductor
1.2.10 Semiconductor Gas Filter
1.3 Market by Application
1.3.1 Global Semiconductor Process Automation and Control Equipment Market Growth by Application: 2020 VS 2024 VS 2031
1.3.2 Etching Equipment
1.3.3 Deposition (PVD & CVD)
1.3.4 Semiconductor Inspection Equipment
1.3.5 Coater & Developer
1.3.6 Lithography Machine
1.3.7 Cleaning Equipment
1.3.8 Ion Implanter
1.3.9 CMP Equipment
1.3.10 Others
1.4 Assumptions and Limitations
1.5 Study Objectives
1.6 Years Considered
2 Global Growth Trends
2.1 Global Semiconductor Process Automation and Control Equipment Market Perspective (2020-2031)
2.2 Global Semiconductor Process Automation and Control Equipment Growth Trends by Region
2.2.1 Global Semiconductor Process Automation and Control Equipment Market Size by Region: 2020 VS 2024 VS 2031
2.2.2 Semiconductor Process Automation and Control Equipment Historic Market Size by Region (2020-2025)
2.2.3 Semiconductor Process Automation and Control Equipment Forecasted Market Size by Region (2026-2031)
2.3 Semiconductor Process Automation and Control Equipment Market Dynamics
2.3.1 Semiconductor Process Automation and Control Equipment Industry Trends
2.3.2 Semiconductor Process Automation and Control Equipment Market Drivers
2.3.3 Semiconductor Process Automation and Control Equipment Market Challenges
2.3.4 Semiconductor Process Automation and Control Equipment Market Restraints
3 Competition Landscape by Key Players
3.1 Global Top Semiconductor Process Automation and Control Equipment Players by Revenue
3.1.1 Global Top Semiconductor Process Automation and Control Equipment Players by Revenue (2020-2025)
3.1.2 Global Semiconductor Process Automation and Control Equipment Revenue Market Share by Players (2020-2025)
3.2 Global Semiconductor Process Automation and Control Equipment Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
3.3 Global Key Players Ranking by Semiconductor Process Automation and Control Equipment Revenue
3.4 Global Semiconductor Process Automation and Control Equipment Market Concentration Ratio
3.4.1 Global Semiconductor Process Automation and Control Equipment Market Concentration Ratio (CR5 and HHI)
3.4.2 Global Top 10 and Top 5 Companies by Semiconductor Process Automation and Control Equipment Revenue in 2024
3.5 Global Key Players of Semiconductor Process Automation and Control Equipment Head office and Area Served
3.6 Global Key Players of Semiconductor Process Automation and Control Equipment, Product and Application
3.7 Global Key Players of Semiconductor Process Automation and Control Equipment, Date of Enter into This Industry
3.8 Mergers & Acquisitions, Expansion Plans
4 Semiconductor Process Automation and Control Equipment Breakdown Data by Type
4.1 Global Semiconductor Process Automation and Control Equipment Historic Market Size by Type (2020-2025)
4.2 Global Semiconductor Process Automation and Control Equipment Forecasted Market Size by Type (2026-2031)
5 Semiconductor Process Automation and Control Equipment Breakdown Data by Application
5.1 Global Semiconductor Process Automation and Control Equipment Historic Market Size by Application (2020-2025)
5.2 Global Semiconductor Process Automation and Control Equipment Forecasted Market Size by Application (2026-2031)
6 North America
6.1 North America Semiconductor Process Automation and Control Equipment Market Size (2020-2031)
6.2 North America Semiconductor Process Automation and Control Equipment Market Growth Rate by Country: 2020 VS 2024 VS 2031
6.3 North America Semiconductor Process Automation and Control Equipment Market Size by Country (2020-2025)
6.4 North America Semiconductor Process Automation and Control Equipment Market Size by Country (2026-2031)
6.5 United States
6.6 Canada
7 Europe
7.1 Europe Semiconductor Process Automation and Control Equipment Market Size (2020-2031)
7.2 Europe Semiconductor Process Automation and Control Equipment Market Growth Rate by Country: 2020 VS 2024 VS 2031
7.3 Europe Semiconductor Process Automation and Control Equipment Market Size by Country (2020-2025)
7.4 Europe Semiconductor Process Automation and Control Equipment Market Size by Country (2026-2031)
7.5 Germany
7.6 France
7.7 U.K.
7.8 Italy
7.9 Russia
7.10 Nordic Countries
8 Asia-Pacific
8.1 Asia-Pacific Semiconductor Process Automation and Control Equipment Market Size (2020-2031)
8.2 Asia-Pacific Semiconductor Process Automation and Control Equipment Market Growth Rate by Region: 2020 VS 2024 VS 2031
8.3 Asia-Pacific Semiconductor Process Automation and Control Equipment Market Size by Region (2020-2025)
8.4 Asia-Pacific Semiconductor Process Automation and Control Equipment Market Size by Region (2026-2031)
8.5 China
8.6 Japan
8.7 South Korea
8.8 Southeast Asia
8.9 India
8.10 Australia
9 Latin America
9.1 Latin America Semiconductor Process Automation and Control Equipment Market Size (2020-2031)
9.2 Latin America Semiconductor Process Automation and Control Equipment Market Growth Rate by Country: 2020 VS 2024 VS 2031
9.3 Latin America Semiconductor Process Automation and Control Equipment Market Size by Country (2020-2025)
9.4 Latin America Semiconductor Process Automation and Control Equipment Market Size by Country (2026-2031)
9.5 Mexico
9.6 Brazil
10 Middle East & Africa
10.1 Middle East & Africa Semiconductor Process Automation and Control Equipment Market Size (2020-2031)
10.2 Middle East & Africa Semiconductor Process Automation and Control Equipment Market Growth Rate by Country: 2020 VS 2024 VS 2031
10.3 Middle East & Africa Semiconductor Process Automation and Control Equipment Market Size by Country (2020-2025)
10.4 Middle East & Africa Semiconductor Process Automation and Control Equipment Market Size by Country (2026-2031)
10.5 Turkey
10.6 Saudi Arabia
10.7 UAE
11 Key Players Profiles
11.1 MKS Instruments
11.1.1 MKS Instruments Company Details
11.1.2 MKS Instruments Business Overview
11.1.3 MKS Instruments Semiconductor Process Automation and Control Equipment Introduction
11.1.4 MKS Instruments Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.1.5 MKS Instruments Recent Development
11.2 HORIBA
11.2.1 HORIBA Company Details
11.2.2 HORIBA Business Overview
11.2.3 HORIBA Semiconductor Process Automation and Control Equipment Introduction
11.2.4 HORIBA Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.2.5 HORIBA Recent Development
11.3 Fujikin
11.3.1 Fujikin Company Details
11.3.2 Fujikin Business Overview
11.3.3 Fujikin Semiconductor Process Automation and Control Equipment Introduction
11.3.4 Fujikin Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.3.5 Fujikin Recent Development
11.4 VAT
11.4.1 VAT Company Details
11.4.2 VAT Business Overview
11.4.3 VAT Semiconductor Process Automation and Control Equipment Introduction
11.4.4 VAT Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.4.5 VAT Recent Development
11.5 CKD
11.5.1 CKD Company Details
11.5.2 CKD Business Overview
11.5.3 CKD Semiconductor Process Automation and Control Equipment Introduction
11.5.4 CKD Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.5.5 CKD Recent Development
11.6 Swagelok
11.6.1 Swagelok Company Details
11.6.2 Swagelok Business Overview
11.6.3 Swagelok Semiconductor Process Automation and Control Equipment Introduction
11.6.4 Swagelok Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.6.5 Swagelok Recent Development
11.7 KITZ SCT
11.7.1 KITZ SCT Company Details
11.7.2 KITZ SCT Business Overview
11.7.3 KITZ SCT Semiconductor Process Automation and Control Equipment Introduction
11.7.4 KITZ SCT Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.7.5 KITZ SCT Recent Development
11.8 Sevenstar
11.8.1 Sevenstar Company Details
11.8.2 Sevenstar Business Overview
11.8.3 Sevenstar Semiconductor Process Automation and Control Equipment Introduction
11.8.4 Sevenstar Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.8.5 Sevenstar Recent Development
11.9 Hitachi Metals, Ltd
11.9.1 Hitachi Metals, Ltd Company Details
11.9.2 Hitachi Metals, Ltd Business Overview
11.9.3 Hitachi Metals, Ltd Semiconductor Process Automation and Control Equipment Introduction
11.9.4 Hitachi Metals, Ltd Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.9.5 Hitachi Metals, Ltd Recent Development
11.10 Pivotal Systems
11.10.1 Pivotal Systems Company Details
11.10.2 Pivotal Systems Business Overview
11.10.3 Pivotal Systems Semiconductor Process Automation and Control Equipment Introduction
11.10.4 Pivotal Systems Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.10.5 Pivotal Systems Recent Development
11.11 MKP
11.11.1 MKP Company Details
11.11.2 MKP Business Overview
11.11.3 MKP Semiconductor Process Automation and Control Equipment Introduction
11.11.4 MKP Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.11.5 MKP Recent Development
11.12 Azbil Corporation
11.12.1 Azbil Corporation Company Details
11.12.2 Azbil Corporation Business Overview
11.12.3 Azbil Corporation Semiconductor Process Automation and Control Equipment Introduction
11.12.4 Azbil Corporation Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.12.5 Azbil Corporation Recent Development
11.13 Atlas Copco (Edwards Vacuum)
11.13.1 Atlas Copco (Edwards Vacuum) Company Details
11.13.2 Atlas Copco (Edwards Vacuum) Business Overview
11.13.3 Atlas Copco (Edwards Vacuum) Semiconductor Process Automation and Control Equipment Introduction
11.13.4 Atlas Copco (Edwards Vacuum) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.13.5 Atlas Copco (Edwards Vacuum) Recent Development
11.14 Ebara Corporation
11.14.1 Ebara Corporation Company Details
11.14.2 Ebara Corporation Business Overview
11.14.3 Ebara Corporation Semiconductor Process Automation and Control Equipment Introduction
11.14.4 Ebara Corporation Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.14.5 Ebara Corporation Recent Development
11.15 Pfeiffer Vacuum GmbH
11.15.1 Pfeiffer Vacuum GmbH Company Details
11.15.2 Pfeiffer Vacuum GmbH Business Overview
11.15.3 Pfeiffer Vacuum GmbH Semiconductor Process Automation and Control Equipment Introduction
11.15.4 Pfeiffer Vacuum GmbH Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.15.5 Pfeiffer Vacuum GmbH Recent Development
11.16 Entegris
11.16.1 Entegris Company Details
11.16.2 Entegris Business Overview
11.16.3 Entegris Semiconductor Process Automation and Control Equipment Introduction
11.16.4 Entegris Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.16.5 Entegris Recent Development
11.17 GEMU
11.17.1 GEMU Company Details
11.17.2 GEMU Business Overview
11.17.3 GEMU Semiconductor Process Automation and Control Equipment Introduction
11.17.4 GEMU Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.17.5 GEMU Recent Development
11.18 SMC Corporation
11.18.1 SMC Corporation Company Details
11.18.2 SMC Corporation Business Overview
11.18.3 SMC Corporation Semiconductor Process Automation and Control Equipment Introduction
11.18.4 SMC Corporation Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.18.5 SMC Corporation Recent Development
11.19 IHARA
11.19.1 IHARA Company Details
11.19.2 IHARA Business Overview
11.19.3 IHARA Semiconductor Process Automation and Control Equipment Introduction
11.19.4 IHARA Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.19.5 IHARA Recent Development
11.20 TESCOM
11.20.1 TESCOM Company Details
11.20.2 TESCOM Business Overview
11.20.3 TESCOM Semiconductor Process Automation and Control Equipment Introduction
11.20.4 TESCOM Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.20.5 TESCOM Recent Development
11.21 Festo
11.21.1 Festo Company Details
11.21.2 Festo Business Overview
11.21.3 Festo Semiconductor Process Automation and Control Equipment Introduction
11.21.4 Festo Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.21.5 Festo Recent Development
11.22 Rotarex
11.22.1 Rotarex Company Details
11.22.2 Rotarex Business Overview
11.22.3 Rotarex Semiconductor Process Automation and Control Equipment Introduction
11.22.4 Rotarex Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.22.5 Rotarex Recent Development
11.23 Asahi-Yukizai
11.23.1 Asahi-Yukizai Company Details
11.23.2 Asahi-Yukizai Business Overview
11.23.3 Asahi-Yukizai Semiconductor Process Automation and Control Equipment Introduction
11.23.4 Asahi-Yukizai Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.23.5 Asahi-Yukizai Recent Development
11.24 Watlow (CRC)
11.24.1 Watlow (CRC) Company Details
11.24.2 Watlow (CRC) Business Overview
11.24.3 Watlow (CRC) Semiconductor Process Automation and Control Equipment Introduction
11.24.4 Watlow (CRC) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.24.5 Watlow (CRC) Recent Development
11.25 Inficon
11.25.1 Inficon Company Details
11.25.2 Inficon Business Overview
11.25.3 Inficon Semiconductor Process Automation and Control Equipment Introduction
11.25.4 Inficon Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.25.5 Inficon Recent Development
11.26 Canon ANELVA
11.26.1 Canon ANELVA Company Details
11.26.2 Canon ANELVA Business Overview
11.26.3 Canon ANELVA Semiconductor Process Automation and Control Equipment Introduction
11.26.4 Canon ANELVA Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.26.5 Canon ANELVA Recent Development
11.27 Agilent
11.27.1 Agilent Company Details
11.27.2 Agilent Business Overview
11.27.3 Agilent Semiconductor Process Automation and Control Equipment Introduction
11.27.4 Agilent Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.27.5 Agilent Recent Development
11.28 ULVAC
11.28.1 ULVAC Company Details
11.28.2 ULVAC Business Overview
11.28.3 ULVAC Semiconductor Process Automation and Control Equipment Introduction
11.28.4 ULVAC Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.28.5 ULVAC Recent Development
11.29 Advanced Thermal Sciences Corporation (ATS)
11.29.1 Advanced Thermal Sciences Corporation (ATS) Company Details
11.29.2 Advanced Thermal Sciences Corporation (ATS) Business Overview
11.29.3 Advanced Thermal Sciences Corporation (ATS) Semiconductor Process Automation and Control Equipment Introduction
11.29.4 Advanced Thermal Sciences Corporation (ATS) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.29.5 Advanced Thermal Sciences Corporation (ATS) Recent Development
11.30 Shinwa Controls
11.30.1 Shinwa Controls Company Details
11.30.2 Shinwa Controls Business Overview
11.30.3 Shinwa Controls Semiconductor Process Automation and Control Equipment Introduction
11.30.4 Shinwa Controls Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.30.5 Shinwa Controls Recent Development
11.31 Unisem
11.31.1 Unisem Company Details
11.31.2 Unisem Business Overview
11.31.3 Unisem Semiconductor Process Automation and Control Equipment Introduction
11.31.4 Unisem Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.31.5 Unisem Recent Development
11.32 GST (Global Standarard Technology)
11.32.1 GST (Global Standarard Technology) Company Details
11.32.2 GST (Global Standarard Technology) Business Overview
11.32.3 GST (Global Standarard Technology) Semiconductor Process Automation and Control Equipment Introduction
11.32.4 GST (Global Standarard Technology) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.32.5 GST (Global Standarard Technology) Recent Development
11.33 FST (Fine Semitech Corp)
11.33.1 FST (Fine Semitech Corp) Company Details
11.33.2 FST (Fine Semitech Corp) Business Overview
11.33.3 FST (Fine Semitech Corp) Semiconductor Process Automation and Control Equipment Introduction
11.33.4 FST (Fine Semitech Corp) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.33.5 FST (Fine Semitech Corp) Recent Development
11.34 Techist
11.34.1 Techist Company Details
11.34.2 Techist Business Overview
11.34.3 Techist Semiconductor Process Automation and Control Equipment Introduction
11.34.4 Techist Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.34.5 Techist Recent Development
11.35 Pall
11.35.1 Pall Company Details
11.35.2 Pall Business Overview
11.35.3 Pall Semiconductor Process Automation and Control Equipment Introduction
11.35.4 Pall Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.35.5 Pall Recent Development
11.36 Camfil
11.36.1 Camfil Company Details
11.36.2 Camfil Business Overview
11.36.3 Camfil Semiconductor Process Automation and Control Equipment Introduction
11.36.4 Camfil Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.36.5 Camfil Recent Development
11.37 Nippon Seisen
11.37.1 Nippon Seisen Company Details
11.37.2 Nippon Seisen Business Overview
11.37.3 Nippon Seisen Semiconductor Process Automation and Control Equipment Introduction
11.37.4 Nippon Seisen Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.37.5 Nippon Seisen Recent Development
11.38 Exyte Technology
11.38.1 Exyte Technology Company Details
11.38.2 Exyte Technology Business Overview
11.38.3 Exyte Technology Semiconductor Process Automation and Control Equipment Introduction
11.38.4 Exyte Technology Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.38.5 Exyte Technology Recent Development
11.39 YESIANG Enterprise
11.39.1 YESIANG Enterprise Company Details
11.39.2 YESIANG Enterprise Business Overview
11.39.3 YESIANG Enterprise Semiconductor Process Automation and Control Equipment Introduction
11.39.4 YESIANG Enterprise Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.39.5 YESIANG Enterprise Recent Development
11.40 LOTVACUUM
11.40.1 LOTVACUUM Company Details
11.40.2 LOTVACUUM Business Overview
11.40.3 LOTVACUUM Semiconductor Process Automation and Control Equipment Introduction
11.40.4 LOTVACUUM Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025)
11.40.5 LOTVACUUM Recent Development
12 Analyst's Viewpoints/Conclusions
13 Appendix
13.1 Research Methodology
13.1.1 Methodology/Research Approach
13.1.1.1 Research Programs/Design
13.1.1.2 Market Size Estimation
13.1.1.3 Market Breakdown and Data Triangulation
13.1.2 Data Source
13.1.2.1 Secondary Sources
13.1.2.2 Primary Sources
13.2 Author Details
13.3 Disclaimer
FEATURED COMPANIES
MKS Instruments
Horiba Ltd
Fujikin
VAT
CKD
Swagelok
KITZ SCT
Sevenstar
Hitachi Metals Ltd
Pivotal Systems
MKP
Azbil Corporation
Atlas Copco (Edwards Vacuum)
Ebara Corporation
Pfeiffer Vacuum GmbH
Entegris
GEMU
SMC Corporation
IHARA
TESCOM
Festo
Rotarex
Asahi Yukizai
Watlow (CRC)
INFICON
Canon Anelva
Agilent
ULVAC
Advanced Thermal Sciences Corporation (ATS)
Shinwa Controls
Unisem
GST (Global Standarard Technology)
FST (Fine Semitech Corp)
Techist
Pall
Camfil
Nippon Seisen
Exyte Technology
YESIANG Enterprise
LOTVACUUM
Kashiyama Industries
Hanbell Precise Machinery
Busch Vacuum
SKY Technology Development
HIGHVAC Corporation
Osaka Vacuum, Ltd.
Taiko Kikai Industries
EVP Vacuum Technology
Scroll Laboratories, Inc
Presys
Highlight Tech Corp (HTC)
Ham-Let
TK-FUJIKIN
Valex
Fitok
GCE Group
Hy-Lok
Bronkhorst
KOFLOC
Sensirion
List of Tables
 Table 1. Global Semiconductor Process Automation and Control Equipment Market Size Growth Rate by Type (US$ Million): 2020 VS 2024 VS 2031
 Table 2. Key Players of Mass Flow Controller (MFC) for Semiconductor
 Table 3. Key Players of Valves for Semiconductor Equipment
 Table 4. Key Players of Pumps for Semiconductor Equipment
 Table 5. Key Players of Vacuum Gauges for Semiconductor Equipment
 Table 6. Key Players of Semiconductor Chiller
 Table 7. Key Players of Vacuum Flanges & Fittings for Semiconductor
 Table 8. Key Players of Heater Jackets & Process Traps for Semiconductor
 Table 9. Global Semiconductor Process Automation and Control Equipment Market Size Growth by Application (US$ Million): 2020 VS 2024 VS 2031
 Table 10. Global Semiconductor Process Automation and Control Equipment Market Size by Region (US$ Million): 2020 VS 2024 VS 2031
 Table 11. Global Semiconductor Process Automation and Control Equipment Market Size by Region (2020-2025) & (US$ Million)
 Table 12. Global Semiconductor Process Automation and Control Equipment Market Share by Region (2020-2025)
 Table 13. Global Semiconductor Process Automation and Control Equipment Forecasted Market Size by Region (2026-2031) & (US$ Million)
 Table 14. Global Semiconductor Process Automation and Control Equipment Market Share by Region (2026-2031)
 Table 15. Semiconductor Process Automation and Control Equipment Market Trends
 Table 16. Semiconductor Process Automation and Control Equipment Market Drivers
 Table 17. Semiconductor Process Automation and Control Equipment Market Challenges
 Table 18. Semiconductor Process Automation and Control Equipment Market Restraints
 Table 19. Global Semiconductor Process Automation and Control Equipment Revenue by Players (2020-2025) & (US$ Million)
 Table 20. Global Semiconductor Process Automation and Control Equipment Market Share by Players (2020-2025)
 Table 21. Global Top Semiconductor Process Automation and Control Equipment Players by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Semiconductor Process Automation and Control Equipment as of 2024)
 Table 22. Ranking of Global Top Semiconductor Process Automation and Control Equipment Companies by Revenue (US$ Million) in 2024
 Table 23. Global 5 Largest Players Market Share by Semiconductor Process Automation and Control Equipment Revenue (CR5 and HHI) & (2020-2025)
 Table 24. Global Key Players of Semiconductor Process Automation and Control Equipment, Headquarters and Area Served
 Table 25. Global Key Players of Semiconductor Process Automation and Control Equipment, Product and Application
 Table 26. Global Key Players of Semiconductor Process Automation and Control Equipment, Date of Enter into This Industry
 Table 27. Mergers & Acquisitions, Expansion Plans
 Table 28. Global Semiconductor Process Automation and Control Equipment Market Size by Type (2020-2025) & (US$ Million)
 Table 29. Global Semiconductor Process Automation and Control Equipment Revenue Market Share by Type (2020-2025)
 Table 30. Global Semiconductor Process Automation and Control Equipment Forecasted Market Size by Type (2026-2031) & (US$ Million)
 Table 31. Global Semiconductor Process Automation and Control Equipment Revenue Market Share by Type (2026-2031)
 Table 32. Global Semiconductor Process Automation and Control Equipment Market Size by Application (2020-2025) & (US$ Million)
 Table 33. Global Semiconductor Process Automation and Control Equipment Revenue Market Share by Application (2020-2025)
 Table 34. Global Semiconductor Process Automation and Control Equipment Forecasted Market Size by Application (2026-2031) & (US$ Million)
 Table 35. Global Semiconductor Process Automation and Control Equipment Revenue Market Share by Application (2026-2031)
 Table 36. North America Semiconductor Process Automation and Control Equipment Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 37. North America Semiconductor Process Automation and Control Equipment Market Size by Country (2020-2025) & (US$ Million)
 Table 38. North America Semiconductor Process Automation and Control Equipment Market Size by Country (2026-2031) & (US$ Million)
 Table 39. Europe Semiconductor Process Automation and Control Equipment Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 40. Europe Semiconductor Process Automation and Control Equipment Market Size by Country (2020-2025) & (US$ Million)
 Table 41. Europe Semiconductor Process Automation and Control Equipment Market Size by Country (2026-2031) & (US$ Million)
 Table 42. Asia-Pacific Semiconductor Process Automation and Control Equipment Market Size Growth Rate by Region (US$ Million): 2020 VS 2024 VS 2031
 Table 43. Asia-Pacific Semiconductor Process Automation and Control Equipment Market Size by Region (2020-2025) & (US$ Million)
 Table 44. Asia-Pacific Semiconductor Process Automation and Control Equipment Market Size by Region (2026-2031) & (US$ Million)
 Table 45. Latin America Semiconductor Process Automation and Control Equipment Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 46. Latin America Semiconductor Process Automation and Control Equipment Market Size by Country (2020-2025) & (US$ Million)
 Table 47. Latin America Semiconductor Process Automation and Control Equipment Market Size by Country (2026-2031) & (US$ Million)
 Table 48. Middle East & Africa Semiconductor Process Automation and Control Equipment Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 49. Middle East & Africa Semiconductor Process Automation and Control Equipment Market Size by Country (2020-2025) & (US$ Million)
 Table 50. Middle East & Africa Semiconductor Process Automation and Control Equipment Market Size by Country (2026-2031) & (US$ Million)
 Table 51. MKS Instruments Company Details
 Table 52. MKS Instruments Business Overview
 Table 53. MKS Instruments Semiconductor Process Automation and Control Equipment Product
 Table 54. MKS Instruments Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 55. MKS Instruments Recent Development
 Table 56. HORIBA Company Details
 Table 57. HORIBA Business Overview
 Table 58. HORIBA Semiconductor Process Automation and Control Equipment Product
 Table 59. HORIBA Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 60. HORIBA Recent Development
 Table 61. Fujikin Company Details
 Table 62. Fujikin Business Overview
 Table 63. Fujikin Semiconductor Process Automation and Control Equipment Product
 Table 64. Fujikin Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 65. Fujikin Recent Development
 Table 66. VAT Company Details
 Table 67. VAT Business Overview
 Table 68. VAT Semiconductor Process Automation and Control Equipment Product
 Table 69. VAT Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 70. VAT Recent Development
 Table 71. CKD Company Details
 Table 72. CKD Business Overview
 Table 73. CKD Semiconductor Process Automation and Control Equipment Product
 Table 74. CKD Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 75. CKD Recent Development
 Table 76. Swagelok Company Details
 Table 77. Swagelok Business Overview
 Table 78. Swagelok Semiconductor Process Automation and Control Equipment Product
 Table 79. Swagelok Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 80. Swagelok Recent Development
 Table 81. KITZ SCT Company Details
 Table 82. KITZ SCT Business Overview
 Table 83. KITZ SCT Semiconductor Process Automation and Control Equipment Product
 Table 84. KITZ SCT Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 85. KITZ SCT Recent Development
 Table 86. Sevenstar Company Details
 Table 87. Sevenstar Business Overview
 Table 88. Sevenstar Semiconductor Process Automation and Control Equipment Product
 Table 89. Sevenstar Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 90. Sevenstar Recent Development
 Table 91. Hitachi Metals, Ltd Company Details
 Table 92. Hitachi Metals, Ltd Business Overview
 Table 93. Hitachi Metals, Ltd Semiconductor Process Automation and Control Equipment Product
 Table 94. Hitachi Metals, Ltd Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 95. Hitachi Metals, Ltd Recent Development
 Table 96. Pivotal Systems Company Details
 Table 97. Pivotal Systems Business Overview
 Table 98. Pivotal Systems Semiconductor Process Automation and Control Equipment Product
 Table 99. Pivotal Systems Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 100. Pivotal Systems Recent Development
 Table 101. MKP Company Details
 Table 102. MKP Business Overview
 Table 103. MKP Semiconductor Process Automation and Control Equipment Product
 Table 104. MKP Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 105. MKP Recent Development
 Table 106. Azbil Corporation Company Details
 Table 107. Azbil Corporation Business Overview
 Table 108. Azbil Corporation Semiconductor Process Automation and Control Equipment Product
 Table 109. Azbil Corporation Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 110. Azbil Corporation Recent Development
 Table 111. Atlas Copco (Edwards Vacuum) Company Details
 Table 112. Atlas Copco (Edwards Vacuum) Business Overview
 Table 113. Atlas Copco (Edwards Vacuum) Semiconductor Process Automation and Control Equipment Product
 Table 114. Atlas Copco (Edwards Vacuum) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 115. Atlas Copco (Edwards Vacuum) Recent Development
 Table 116. Ebara Corporation Company Details
 Table 117. Ebara Corporation Business Overview
 Table 118. Ebara Corporation Semiconductor Process Automation and Control Equipment Product
 Table 119. Ebara Corporation Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 120. Ebara Corporation Recent Development
 Table 121. Pfeiffer Vacuum GmbH Company Details
 Table 122. Pfeiffer Vacuum GmbH Business Overview
 Table 123. Pfeiffer Vacuum GmbH Semiconductor Process Automation and Control Equipment Product
 Table 124. Pfeiffer Vacuum GmbH Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 125. Pfeiffer Vacuum GmbH Recent Development
 Table 126. Entegris Company Details
 Table 127. Entegris Business Overview
 Table 128. Entegris Semiconductor Process Automation and Control Equipment Product
 Table 129. Entegris Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 130. Entegris Recent Development
 Table 131. GEMU Company Details
 Table 132. GEMU Business Overview
 Table 133. GEMU Semiconductor Process Automation and Control Equipment Product
 Table 134. GEMU Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 135. GEMU Recent Development
 Table 136. SMC Corporation Company Details
 Table 137. SMC Corporation Business Overview
 Table 138. SMC Corporation Semiconductor Process Automation and Control Equipment Product
 Table 139. SMC Corporation Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 140. SMC Corporation Recent Development
 Table 141. IHARA Company Details
 Table 142. IHARA Business Overview
 Table 143. IHARA Semiconductor Process Automation and Control Equipment Product
 Table 144. IHARA Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 145. IHARA Recent Development
 Table 146. TESCOM Company Details
 Table 147. TESCOM Business Overview
 Table 148. TESCOM Semiconductor Process Automation and Control Equipment Product
 Table 149. TESCOM Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 150. TESCOM Recent Development
 Table 151. Festo Company Details
 Table 152. Festo Business Overview
 Table 153. Festo Semiconductor Process Automation and Control Equipment Product
 Table 154. Festo Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 155. Festo Recent Development
 Table 156. Rotarex Company Details
 Table 157. Rotarex Business Overview
 Table 158. Rotarex Semiconductor Process Automation and Control Equipment Product
 Table 159. Rotarex Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 160. Rotarex Recent Development
 Table 161. Asahi-Yukizai Company Details
 Table 162. Asahi-Yukizai Business Overview
 Table 163. Asahi-Yukizai Semiconductor Process Automation and Control Equipment Product
 Table 164. Asahi-Yukizai Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 165. Asahi-Yukizai Recent Development
 Table 166. Watlow (CRC) Company Details
 Table 167. Watlow (CRC) Business Overview
 Table 168. Watlow (CRC) Semiconductor Process Automation and Control Equipment Product
 Table 169. Watlow (CRC) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 170. Watlow (CRC) Recent Development
 Table 171. Inficon Company Details
 Table 172. Inficon Business Overview
 Table 173. Inficon Semiconductor Process Automation and Control Equipment Product
 Table 174. Inficon Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 175. Inficon Recent Development
 Table 176. Canon ANELVA Company Details
 Table 177. Canon ANELVA Business Overview
 Table 178. Canon ANELVA Semiconductor Process Automation and Control Equipment Product
 Table 179. Canon ANELVA Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 180. Canon ANELVA Recent Development
 Table 181. Agilent Company Details
 Table 182. Agilent Business Overview
 Table 183. Agilent Semiconductor Process Automation and Control Equipment Product
 Table 184. Agilent Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 185. Agilent Recent Development
 Table 186. ULVAC Company Details
 Table 187. ULVAC Business Overview
 Table 188. ULVAC Semiconductor Process Automation and Control Equipment Product
 Table 189. ULVAC Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 190. ULVAC Recent Development
 Table 191. Advanced Thermal Sciences Corporation (ATS) Company Details
 Table 192. Advanced Thermal Sciences Corporation (ATS) Business Overview
 Table 193. Advanced Thermal Sciences Corporation (ATS) Semiconductor Process Automation and Control Equipment Product
 Table 194. Advanced Thermal Sciences Corporation (ATS) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 195. Advanced Thermal Sciences Corporation (ATS) Recent Development
 Table 196. Shinwa Controls Company Details
 Table 197. Shinwa Controls Business Overview
 Table 198. Shinwa Controls Semiconductor Process Automation and Control Equipment Product
 Table 199. Shinwa Controls Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 200. Shinwa Controls Recent Development
 Table 201. Unisem Company Details
 Table 202. Unisem Business Overview
 Table 203. Unisem Semiconductor Process Automation and Control Equipment Product
 Table 204. Unisem Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 205. Unisem Recent Development
 Table 206. GST (Global Standarard Technology) Company Details
 Table 207. GST (Global Standarard Technology) Business Overview
 Table 208. GST (Global Standarard Technology) Semiconductor Process Automation and Control Equipment Product
 Table 209. GST (Global Standarard Technology) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 210. GST (Global Standarard Technology) Recent Development
 Table 211. FST (Fine Semitech Corp) Company Details
 Table 212. FST (Fine Semitech Corp) Business Overview
 Table 213. FST (Fine Semitech Corp) Semiconductor Process Automation and Control Equipment Product
 Table 214. FST (Fine Semitech Corp) Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 215. FST (Fine Semitech Corp) Recent Development
 Table 216. Techist Company Details
 Table 217. Techist Business Overview
 Table 218. Techist Semiconductor Process Automation and Control Equipment Product
 Table 219. Techist Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 220. Techist Recent Development
 Table 221. Pall Company Details
 Table 222. Pall Business Overview
 Table 223. Pall Semiconductor Process Automation and Control Equipment Product
 Table 224. Pall Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 225. Pall Recent Development
 Table 226. Camfil Company Details
 Table 227. Camfil Business Overview
 Table 228. Camfil Semiconductor Process Automation and Control Equipment Product
 Table 229. Camfil Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 230. Camfil Recent Development
 Table 231. Nippon Seisen Company Details
 Table 232. Nippon Seisen Business Overview
 Table 233. Nippon Seisen Semiconductor Process Automation and Control Equipment Product
 Table 234. Nippon Seisen Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 235. Nippon Seisen Recent Development
 Table 236. Exyte Technology Company Details
 Table 237. Exyte Technology Business Overview
 Table 238. Exyte Technology Semiconductor Process Automation and Control Equipment Product
 Table 239. Exyte Technology Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 240. Exyte Technology Recent Development
 Table 241. YESIANG Enterprise Company Details
 Table 242. YESIANG Enterprise Business Overview
 Table 243. YESIANG Enterprise Semiconductor Process Automation and Control Equipment Product
 Table 244. YESIANG Enterprise Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 245. YESIANG Enterprise Recent Development
 Table 246. LOTVACUUM Company Details
 Table 247. LOTVACUUM Business Overview
 Table 248. LOTVACUUM Semiconductor Process Automation and Control Equipment Product
 Table 249. LOTVACUUM Revenue in Semiconductor Process Automation and Control Equipment Business (2020-2025) & (US$ Million)
 Table 250. LOTVACUUM Recent Development
 Table 251. Research Programs/Design for This Report
 Table 252. Key Data Information from Secondary Sources
 Table 253. Key Data Information from Primary Sources
 Table 254. Authors List of This Report


List of Figures
 Figure 1. Semiconductor Process Automation and Control Equipment Picture
 Figure 2. Global Semiconductor Process Automation and Control Equipment Market Size Comparison by Type (2020-2031) & (US$ Million)
 Figure 3. Global Semiconductor Process Automation and Control Equipment Market Share by Type: 2024 VS 2031
 Figure 4. Mass Flow Controller (MFC) for Semiconductor Features
 Figure 5. Valves for Semiconductor Equipment Features
 Figure 6. Pumps for Semiconductor Equipment Features
 Figure 7. Vacuum Gauges for Semiconductor Equipment Features
 Figure 8. Semiconductor Chiller Features
 Figure 9. Vacuum Flanges & Fittings for Semiconductor Features
 Figure 10. Heater Jackets & Process Traps for Semiconductor Features
 Figure 11. RF Generator for Semiconductor Features
 Figure 12. Semiconductor Gas Filter Features
 Figure 13. Global Semiconductor Process Automation and Control Equipment Market Size by Application (2020-2031) & (US$ Million)
 Figure 14. Global Semiconductor Process Automation and Control Equipment Market Share by Application: 2024 VS 2031
 Figure 15. Etching Equipment Case Studies
 Figure 16. Deposition (PVD & CVD) Case Studies
 Figure 17. Semiconductor Inspection Equipment Case Studies
 Figure 18. Coater & Developer Case Studies
 Figure 19. Lithography Machine Case Studies
 Figure 20. Cleaning Equipment Case Studies
 Figure 21. Ion Implanter Case Studies
 Figure 22. CMP Equipment Case Studies
 Figure 23. Others Case Studies
 Figure 24. Semiconductor Process Automation and Control Equipment Report Years Considered
 Figure 25. Global Semiconductor Process Automation and Control Equipment Market Size (US$ Million), Year-over-Year: 2020-2031
 Figure 26. Global Semiconductor Process Automation and Control Equipment Market Size, (US$ Million), 2020 VS 2024 VS 2031
 Figure 27. Global Semiconductor Process Automation and Control Equipment Market Share by Region: 2024 VS 2031
 Figure 28. Global Semiconductor Process Automation and Control Equipment Market Share by Players in 2024
 Figure 29. Global Top Semiconductor Process Automation and Control Equipment Players by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Semiconductor Process Automation and Control Equipment as of 2024)
 Figure 30. The Top 10 and 5 Players Market Share by Semiconductor Process Automation and Control Equipment Revenue in 2024
 Figure 31. North America Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 32. North America Semiconductor Process Automation and Control Equipment Market Share by Country (2020-2031)
 Figure 33. United States Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 34. Canada Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 35. Europe Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 36. Europe Semiconductor Process Automation and Control Equipment Market Share by Country (2020-2031)
 Figure 37. Germany Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 38. France Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 39. U.K. Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 40. Italy Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 41. Russia Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 42. Nordic Countries Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 43. Asia-Pacific Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 44. Asia-Pacific Semiconductor Process Automation and Control Equipment Market Share by Region (2020-2031)
 Figure 45. China Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 46. Japan Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 47. South Korea Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 48. Southeast Asia Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 49. India Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 50. Australia Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 51. Latin America Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 52. Latin America Semiconductor Process Automation and Control Equipment Market Share by Country (2020-2031)
 Figure 53. Mexico Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 54. Brazil Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 55. Middle East & Africa Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 56. Middle East & Africa Semiconductor Process Automation and Control Equipment Market Share by Country (2020-2031)
 Figure 57. Turkey Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 58. Saudi Arabia Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 59. UAE Semiconductor Process Automation and Control Equipment Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 60. MKS Instruments Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 61. HORIBA Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 62. Fujikin Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 63. VAT Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 64. CKD Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 65. Swagelok Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 66. KITZ SCT Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 67. Sevenstar Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 68. Hitachi Metals, Ltd Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 69. Pivotal Systems Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 70. MKP Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 71. Azbil Corporation Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 72. Atlas Copco (Edwards Vacuum) Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 73. Ebara Corporation Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 74. Pfeiffer Vacuum GmbH Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 75. Entegris Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 76. GEMU Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 77. SMC Corporation Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 78. IHARA Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 79. TESCOM Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 80. Festo Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 81. Rotarex Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 82. Asahi-Yukizai Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 83. Watlow (CRC) Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 84. Inficon Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 85. Canon ANELVA Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 86. Agilent Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 87. ULVAC Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 88. Advanced Thermal Sciences Corporation (ATS) Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 89. Shinwa Controls Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 90. Unisem Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 91. GST (Global Standarard Technology) Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 92. FST (Fine Semitech Corp) Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 93. Techist Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 94. Pall Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 95. Camfil Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 96. Nippon Seisen Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 97. Exyte Technology Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 98. YESIANG Enterprise Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 99. LOTVACUUM Revenue Growth Rate in Semiconductor Process Automation and Control Equipment Business (2020-2025)
 Figure 100. Bottom-up and Top-down Approaches for This Report
 Figure 101. Data Triangulation
 Figure 102. Key Executives Interviewed
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