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Global Atomic Layer Etching (ALE) Market Research Report 2025
Published Date: June 2025
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Report Code: QYRE-Auto-6B16918
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Global Atomic Layer Etching ALE Market Research Report 2024
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Global Atomic Layer Etching (ALE) Market Research Report 2025

Code: QYRE-Auto-6B16918
Report
June 2025
Pages:102
QYResearch
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DESCRIPTION
TABLE OF CONTENT
TABLES & FIGURES

Atomic Layer Etching (ALE) Market

The global market for Atomic Layer Etching (ALE) was valued at US$ million in the year 2024 and is projected to reach a revised size of US$ million by 2031, growing at a CAGR of %during the forecast period.
Atomic Layer Etching (ALE) is an emerging RIE technique that provides atomic-scale control over the etching process. ALE is a cyclic process that alternates between the exposure of the substrate to reactive gases and the removal of the modified surface layer, enabling precise control of the etching depth and feature dimensions. This technique holds great promise for future applications in nanofabrication, semiconductor manufacturing, and advanced materials research. It is because ALE can achieve even higher precision, selectivity, and uniformity compared to traditional RIE methods.
North American market for Atomic Layer Etching (ALE) is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.
Asia-Pacific market for Atomic Layer Etching (ALE) is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.
The major global manufacturers of Atomic Layer Etching (ALE) include Oxford Instruments, ULVAC, Lam Research, AMEC, SAMCO Inc., Applied Materials, Inc., Sentech, SPTS Technologies (KLA company), GigaLane, CORIAL(Plasma-Therm), etc. In 2024, the world's top three vendors accounted for approximately % of the revenue.

Report Scope

This report aims to provide a comprehensive presentation of the global market for Atomic Layer Etching (ALE), with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Atomic Layer Etching (ALE).
The Atomic Layer Etching (ALE) market size, estimations, and forecasts are provided in terms of output/shipments (K Units) and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global Atomic Layer Etching (ALE) market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the Atomic Layer Etching (ALE) manufacturers, new entrants, and industry chain related companies in this market with information on the revenues, production, and average price for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Market Segmentation

Scope of Atomic Layer Etching (ALE) Market Report

Report Metric Details
Report Name Atomic Layer Etching (ALE) Market
by Type
  • Single Reaction Station
  • Double Reaction Station
by Application
  • Nanofabrication
  • Semiconductor Manufacturing
  • Advanced Materials Research
Production by Region
  • North America
  • Europe
  • China
  • Japan
Consumption by Region
  • North America (United States, Canada)
  • Europe (Germany, France, UK, Italy, Russia)
  • Asia-Pacific (China, Japan, South Korea, Taiwan)
  • Southeast Asia (India)
  • Latin America (Mexico, Brazil)
By Company Oxford Instruments, ULVAC, Lam Research, AMEC, SAMCO Inc., Applied Materials, Inc., Sentech, SPTS Technologies (KLA company), GigaLane, CORIAL(Plasma-Therm), Trion Technology, NAURA, Plasma Etch, Inc., Tokyo Electron Limited, Nano Vacuum Pty Ltd
Forecast units USD million in value
Report coverage Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

  • Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
  • Chapter 2: Detailed analysis of Atomic Layer Etching (ALE) manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
  • Chapter 3: Production/output, value of Atomic Layer Etching (ALE) by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
  • Chapter 4: Consumption of Atomic Layer Etching (ALE) in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
  • Chapter 5: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
  • Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
  • Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
  • Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
  • Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
  • Chapter 10: The main points and conclusions of the report.

FAQ for this report

Who are the main players in the Atomic Layer Etching (ALE) Market report?

Ans: The main players in the Atomic Layer Etching (ALE) Market are Oxford Instruments, ULVAC, Lam Research, AMEC, SAMCO Inc., Applied Materials, Inc., Sentech, SPTS Technologies (KLA company), GigaLane, CORIAL(Plasma-Therm), Trion Technology, NAURA, Plasma Etch, Inc., Tokyo Electron Limited, Nano Vacuum Pty Ltd

What are the Application segmentation covered in the Atomic Layer Etching (ALE) Market report?

Ans: The Applications covered in the Atomic Layer Etching (ALE) Market report are Nanofabrication, Semiconductor Manufacturing, Advanced Materials Research

What are the Type segmentation covered in the Atomic Layer Etching (ALE) Market report?

Ans: The Types covered in the Atomic Layer Etching (ALE) Market report are Single Reaction Station, Double Reaction Station

1 Atomic Layer Etching (ALE) Market Overview
1.1 Product Definition
1.2 Atomic Layer Etching (ALE) by Type
1.2.1 Global Atomic Layer Etching (ALE) Market Value Growth Rate Analysis by Type: 2024 VS 2031
1.2.2 Single Reaction Station
1.2.3 Double Reaction Station
1.3 Atomic Layer Etching (ALE) by Application
1.3.1 Global Atomic Layer Etching (ALE) Market Value Growth Rate Analysis by Application: 2024 VS 2031
1.3.2 Nanofabrication
1.3.3 Semiconductor Manufacturing
1.3.4 Advanced Materials Research
1.4 Global Market Growth Prospects
1.4.1 Global Atomic Layer Etching (ALE) Production Value Estimates and Forecasts (2020-2031)
1.4.2 Global Atomic Layer Etching (ALE) Production Capacity Estimates and Forecasts (2020-2031)
1.4.3 Global Atomic Layer Etching (ALE) Production Estimates and Forecasts (2020-2031)
1.4.4 Global Atomic Layer Etching (ALE) Market Average Price Estimates and Forecasts (2020-2031)
1.5 Assumptions and Limitations
2 Market Competition by Manufacturers
2.1 Global Atomic Layer Etching (ALE) Production Market Share by Manufacturers (2020-2025)
2.2 Global Atomic Layer Etching (ALE) Production Value Market Share by Manufacturers (2020-2025)
2.3 Global Key Players of Atomic Layer Etching (ALE), Industry Ranking, 2023 VS 2024
2.4 Global Atomic Layer Etching (ALE) Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
2.5 Global Atomic Layer Etching (ALE) Average Price by Manufacturers (2020-2025)
2.6 Global Key Manufacturers of Atomic Layer Etching (ALE), Manufacturing Base Distribution and Headquarters
2.7 Global Key Manufacturers of Atomic Layer Etching (ALE), Product Offered and Application
2.8 Global Key Manufacturers of Atomic Layer Etching (ALE), Date of Enter into This Industry
2.9 Atomic Layer Etching (ALE) Market Competitive Situation and Trends
2.9.1 Atomic Layer Etching (ALE) Market Concentration Rate
2.9.2 Global 5 and 10 Largest Atomic Layer Etching (ALE) Players Market Share by Revenue
2.10 Mergers & Acquisitions, Expansion
3 Atomic Layer Etching (ALE) Production by Region
3.1 Global Atomic Layer Etching (ALE) Production Value Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.2 Global Atomic Layer Etching (ALE) Production Value by Region (2020-2031)
3.2.1 Global Atomic Layer Etching (ALE) Production Value by Region (2020-2025)
3.2.2 Global Forecasted Production Value of Atomic Layer Etching (ALE) by Region (2026-2031)
3.3 Global Atomic Layer Etching (ALE) Production Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.4 Global Atomic Layer Etching (ALE) Production Volume by Region (2020-2031)
3.4.1 Global Atomic Layer Etching (ALE) Production by Region (2020-2025)
3.4.2 Global Forecasted Production of Atomic Layer Etching (ALE) by Region (2026-2031)
3.5 Global Atomic Layer Etching (ALE) Market Price Analysis by Region (2020-2025)
3.6 Global Atomic Layer Etching (ALE) Production and Value, Year-over-Year Growth
3.6.1 North America Atomic Layer Etching (ALE) Production Value Estimates and Forecasts (2020-2031)
3.6.2 Europe Atomic Layer Etching (ALE) Production Value Estimates and Forecasts (2020-2031)
3.6.3 China Atomic Layer Etching (ALE) Production Value Estimates and Forecasts (2020-2031)
3.6.4 Japan Atomic Layer Etching (ALE) Production Value Estimates and Forecasts (2020-2031)
4 Atomic Layer Etching (ALE) Consumption by Region
4.1 Global Atomic Layer Etching (ALE) Consumption Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
4.2 Global Atomic Layer Etching (ALE) Consumption by Region (2020-2031)
4.2.1 Global Atomic Layer Etching (ALE) Consumption by Region (2020-2025)
4.2.2 Global Atomic Layer Etching (ALE) Forecasted Consumption by Region (2026-2031)
4.3 North America
4.3.1 North America Atomic Layer Etching (ALE) Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.3.2 North America Atomic Layer Etching (ALE) Consumption by Country (2020-2031)
4.3.3 U.S.
4.3.4 Canada
4.4 Europe
4.4.1 Europe Atomic Layer Etching (ALE) Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.4.2 Europe Atomic Layer Etching (ALE) Consumption by Country (2020-2031)
4.4.3 Germany
4.4.4 France
4.4.5 U.K.
4.4.6 Italy
4.4.7 Netherlands
4.5 Asia Pacific
4.5.1 Asia Pacific Atomic Layer Etching (ALE) Consumption Growth Rate by Region: 2020 VS 2024 VS 2031
4.5.2 Asia Pacific Atomic Layer Etching (ALE) Consumption by Region (2020-2031)
4.5.3 China
4.5.4 Japan
4.5.5 South Korea
4.5.6 China Taiwan
4.5.7 Southeast Asia
4.5.8 India
4.6 Latin America, Middle East & Africa
4.6.1 Latin America, Middle East & Africa Atomic Layer Etching (ALE) Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.6.2 Latin America, Middle East & Africa Atomic Layer Etching (ALE) Consumption by Country (2020-2031)
4.6.3 Mexico
4.6.4 Brazil
4.6.5 Turkey
4.6.6 GCC Countries
5 Segment by Type
5.1 Global Atomic Layer Etching (ALE) Production by Type (2020-2031)
5.1.1 Global Atomic Layer Etching (ALE) Production by Type (2020-2025)
5.1.2 Global Atomic Layer Etching (ALE) Production by Type (2026-2031)
5.1.3 Global Atomic Layer Etching (ALE) Production Market Share by Type (2020-2031)
5.2 Global Atomic Layer Etching (ALE) Production Value by Type (2020-2031)
5.2.1 Global Atomic Layer Etching (ALE) Production Value by Type (2020-2025)
5.2.2 Global Atomic Layer Etching (ALE) Production Value by Type (2026-2031)
5.2.3 Global Atomic Layer Etching (ALE) Production Value Market Share by Type (2020-2031)
5.3 Global Atomic Layer Etching (ALE) Price by Type (2020-2031)
6 Segment by Application
6.1 Global Atomic Layer Etching (ALE) Production by Application (2020-2031)
6.1.1 Global Atomic Layer Etching (ALE) Production by Application (2020-2025)
6.1.2 Global Atomic Layer Etching (ALE) Production by Application (2026-2031)
6.1.3 Global Atomic Layer Etching (ALE) Production Market Share by Application (2020-2031)
6.2 Global Atomic Layer Etching (ALE) Production Value by Application (2020-2031)
6.2.1 Global Atomic Layer Etching (ALE) Production Value by Application (2020-2025)
6.2.2 Global Atomic Layer Etching (ALE) Production Value by Application (2026-2031)
6.2.3 Global Atomic Layer Etching (ALE) Production Value Market Share by Application (2020-2031)
6.3 Global Atomic Layer Etching (ALE) Price by Application (2020-2031)
7 Key Companies Profiled
7.1 Oxford Instruments
7.1.1 Oxford Instruments Atomic Layer Etching (ALE) Company Information
7.1.2 Oxford Instruments Atomic Layer Etching (ALE) Product Portfolio
7.1.3 Oxford Instruments Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.1.4 Oxford Instruments Main Business and Markets Served
7.1.5 Oxford Instruments Recent Developments/Updates
7.2 ULVAC
7.2.1 ULVAC Atomic Layer Etching (ALE) Company Information
7.2.2 ULVAC Atomic Layer Etching (ALE) Product Portfolio
7.2.3 ULVAC Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.2.4 ULVAC Main Business and Markets Served
7.2.5 ULVAC Recent Developments/Updates
7.3 Lam Research
7.3.1 Lam Research Atomic Layer Etching (ALE) Company Information
7.3.2 Lam Research Atomic Layer Etching (ALE) Product Portfolio
7.3.3 Lam Research Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.3.4 Lam Research Main Business and Markets Served
7.3.5 Lam Research Recent Developments/Updates
7.4 AMEC
7.4.1 AMEC Atomic Layer Etching (ALE) Company Information
7.4.2 AMEC Atomic Layer Etching (ALE) Product Portfolio
7.4.3 AMEC Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.4.4 AMEC Main Business and Markets Served
7.4.5 AMEC Recent Developments/Updates
7.5 SAMCO Inc.
7.5.1 SAMCO Inc. Atomic Layer Etching (ALE) Company Information
7.5.2 SAMCO Inc. Atomic Layer Etching (ALE) Product Portfolio
7.5.3 SAMCO Inc. Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.5.4 SAMCO Inc. Main Business and Markets Served
7.5.5 SAMCO Inc. Recent Developments/Updates
7.6 Applied Materials, Inc.
7.6.1 Applied Materials, Inc. Atomic Layer Etching (ALE) Company Information
7.6.2 Applied Materials, Inc. Atomic Layer Etching (ALE) Product Portfolio
7.6.3 Applied Materials, Inc. Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.6.4 Applied Materials, Inc. Main Business and Markets Served
7.6.5 Applied Materials, Inc. Recent Developments/Updates
7.7 Sentech
7.7.1 Sentech Atomic Layer Etching (ALE) Company Information
7.7.2 Sentech Atomic Layer Etching (ALE) Product Portfolio
7.7.3 Sentech Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.7.4 Sentech Main Business and Markets Served
7.7.5 Sentech Recent Developments/Updates
7.8 SPTS Technologies (KLA company)
7.8.1 SPTS Technologies (KLA company) Atomic Layer Etching (ALE) Company Information
7.8.2 SPTS Technologies (KLA company) Atomic Layer Etching (ALE) Product Portfolio
7.8.3 SPTS Technologies (KLA company) Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.8.4 SPTS Technologies (KLA company) Main Business and Markets Served
7.8.5 SPTS Technologies (KLA company) Recent Developments/Updates
7.9 GigaLane
7.9.1 GigaLane Atomic Layer Etching (ALE) Company Information
7.9.2 GigaLane Atomic Layer Etching (ALE) Product Portfolio
7.9.3 GigaLane Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.9.4 GigaLane Main Business and Markets Served
7.9.5 GigaLane Recent Developments/Updates
7.10 CORIAL(Plasma-Therm)
7.10.1 CORIAL(Plasma-Therm) Atomic Layer Etching (ALE) Company Information
7.10.2 CORIAL(Plasma-Therm) Atomic Layer Etching (ALE) Product Portfolio
7.10.3 CORIAL(Plasma-Therm) Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.10.4 CORIAL(Plasma-Therm) Main Business and Markets Served
7.10.5 CORIAL(Plasma-Therm) Recent Developments/Updates
7.11 Trion Technology
7.11.1 Trion Technology Atomic Layer Etching (ALE) Company Information
7.11.2 Trion Technology Atomic Layer Etching (ALE) Product Portfolio
7.11.3 Trion Technology Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.11.4 Trion Technology Main Business and Markets Served
7.11.5 Trion Technology Recent Developments/Updates
7.12 NAURA
7.12.1 NAURA Atomic Layer Etching (ALE) Company Information
7.12.2 NAURA Atomic Layer Etching (ALE) Product Portfolio
7.12.3 NAURA Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.12.4 NAURA Main Business and Markets Served
7.12.5 NAURA Recent Developments/Updates
7.13 Plasma Etch, Inc.
7.13.1 Plasma Etch, Inc. Atomic Layer Etching (ALE) Company Information
7.13.2 Plasma Etch, Inc. Atomic Layer Etching (ALE) Product Portfolio
7.13.3 Plasma Etch, Inc. Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.13.4 Plasma Etch, Inc. Main Business and Markets Served
7.13.5 Plasma Etch, Inc. Recent Developments/Updates
7.14 Tokyo Electron Limited
7.14.1 Tokyo Electron Limited Atomic Layer Etching (ALE) Company Information
7.14.2 Tokyo Electron Limited Atomic Layer Etching (ALE) Product Portfolio
7.14.3 Tokyo Electron Limited Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.14.4 Tokyo Electron Limited Main Business and Markets Served
7.14.5 Tokyo Electron Limited Recent Developments/Updates
7.15 Nano Vacuum Pty Ltd
7.15.1 Nano Vacuum Pty Ltd Atomic Layer Etching (ALE) Company Information
7.15.2 Nano Vacuum Pty Ltd Atomic Layer Etching (ALE) Product Portfolio
7.15.3 Nano Vacuum Pty Ltd Atomic Layer Etching (ALE) Production, Value, Price and Gross Margin (2020-2025)
7.15.4 Nano Vacuum Pty Ltd Main Business and Markets Served
7.15.5 Nano Vacuum Pty Ltd Recent Developments/Updates
8 Industry Chain and Sales Channels Analysis
8.1 Atomic Layer Etching (ALE) Industry Chain Analysis
8.2 Atomic Layer Etching (ALE) Raw Material Supply Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.3 Atomic Layer Etching (ALE) Production Mode & Process Analysis
8.4 Atomic Layer Etching (ALE) Sales and Marketing
8.4.1 Atomic Layer Etching (ALE) Sales Channels
8.4.2 Atomic Layer Etching (ALE) Distributors
8.5 Atomic Layer Etching (ALE) Customer Analysis
9 Atomic Layer Etching (ALE) Market Dynamics
9.1 Atomic Layer Etching (ALE) Industry Trends
9.2 Atomic Layer Etching (ALE) Market Drivers
9.3 Atomic Layer Etching (ALE) Market Challenges
9.4 Atomic Layer Etching (ALE) Market Restraints
10 Research Findings and Conclusion
11 Methodology and Data Source
11.1 Methodology/Research Approach
11.1.1 Research Programs/Design
11.1.2 Market Size Estimation
11.1.3 Market Breakdown and Data Triangulation
11.2 Data Source
11.2.1 Secondary Sources
11.2.2 Primary Sources
11.3 Author List
11.4 Disclaimer
List of Tables
 Table 1. Global Atomic Layer Etching (ALE) Market Value by Type, (US$ Million) & (2024 VS 2031)
 Table 2. Global Atomic Layer Etching (ALE) Market Value by Application, (US$ Million) & (2024 VS 2031)
 Table 3. Global Atomic Layer Etching (ALE) Production Capacity (K Units) by Manufacturers in 2024
 Table 4. Global Atomic Layer Etching (ALE) Production by Manufacturers (2020-2025) & (K Units)
 Table 5. Global Atomic Layer Etching (ALE) Production Market Share by Manufacturers (2020-2025)
 Table 6. Global Atomic Layer Etching (ALE) Production Value by Manufacturers (2020-2025) & (US$ Million)
 Table 7. Global Atomic Layer Etching (ALE) Production Value Share by Manufacturers (2020-2025)
 Table 8. Global Key Players of Atomic Layer Etching (ALE), Industry Ranking, 2023 VS 2024
 Table 9. Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value in Atomic Layer Etching (ALE) as of 2024)
 Table 10. Global Market Atomic Layer Etching (ALE) Average Price by Manufacturers (US$/Unit) & (2020-2025)
 Table 11. Global Key Manufacturers of Atomic Layer Etching (ALE), Manufacturing Base Distribution and Headquarters
 Table 12. Global Key Manufacturers of Atomic Layer Etching (ALE), Product Offered and Application
 Table 13. Global Key Manufacturers of Atomic Layer Etching (ALE), Date of Enter into This Industry
 Table 14. Global Atomic Layer Etching (ALE) Manufacturers Market Concentration Ratio (CR5 and HHI)
 Table 15. Mergers & Acquisitions, Expansion Plans
 Table 16. Global Atomic Layer Etching (ALE) Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Table 17. Global Atomic Layer Etching (ALE) Production Value (US$ Million) by Region (2020-2025)
 Table 18. Global Atomic Layer Etching (ALE) Production Value Market Share by Region (2020-2025)
 Table 19. Global Atomic Layer Etching (ALE) Production Value (US$ Million) Forecast by Region (2026-2031)
 Table 20. Global Atomic Layer Etching (ALE) Production Value Market Share Forecast by Region (2026-2031)
 Table 21. Global Atomic Layer Etching (ALE) Production Comparison by Region: 2020 VS 2024 VS 2031 (K Units)
 Table 22. Global Atomic Layer Etching (ALE) Production (K Units) by Region (2020-2025)
 Table 23. Global Atomic Layer Etching (ALE) Production Market Share by Region (2020-2025)
 Table 24. Global Atomic Layer Etching (ALE) Production (K Units) Forecast by Region (2026-2031)
 Table 25. Global Atomic Layer Etching (ALE) Production Market Share Forecast by Region (2026-2031)
 Table 26. Global Atomic Layer Etching (ALE) Market Average Price (US$/Unit) by Region (2020-2025)
 Table 27. Global Atomic Layer Etching (ALE) Market Average Price (US$/Unit) by Region (2026-2031)
 Table 28. Global Atomic Layer Etching (ALE) Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (K Units)
 Table 29. Global Atomic Layer Etching (ALE) Consumption by Region (2020-2025) & (K Units)
 Table 30. Global Atomic Layer Etching (ALE) Consumption Market Share by Region (2020-2025)
 Table 31. Global Atomic Layer Etching (ALE) Forecasted Consumption by Region (2026-2031) & (K Units)
 Table 32. Global Atomic Layer Etching (ALE) Forecasted Consumption Market Share by Region (2026-2031)
 Table 33. North America Atomic Layer Etching (ALE) Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (K Units)
 Table 34. North America Atomic Layer Etching (ALE) Consumption by Country (2020-2025) & (K Units)
 Table 35. North America Atomic Layer Etching (ALE) Consumption by Country (2026-2031) & (K Units)
 Table 36. Europe Atomic Layer Etching (ALE) Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (K Units)
 Table 37. Europe Atomic Layer Etching (ALE) Consumption by Country (2020-2025) & (K Units)
 Table 38. Europe Atomic Layer Etching (ALE) Consumption by Country (2026-2031) & (K Units)
 Table 39. Asia Pacific Atomic Layer Etching (ALE) Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (K Units)
 Table 40. Asia Pacific Atomic Layer Etching (ALE) Consumption by Region (2020-2025) & (K Units)
 Table 41. Asia Pacific Atomic Layer Etching (ALE) Consumption by Region (2026-2031) & (K Units)
 Table 42. Latin America, Middle East & Africa Atomic Layer Etching (ALE) Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (K Units)
 Table 43. Latin America, Middle East & Africa Atomic Layer Etching (ALE) Consumption by Country (2020-2025) & (K Units)
 Table 44. Latin America, Middle East & Africa Atomic Layer Etching (ALE) Consumption by Country (2026-2031) & (K Units)
 Table 45. Global Atomic Layer Etching (ALE) Production (K Units) by Type (2020-2025)
 Table 46. Global Atomic Layer Etching (ALE) Production (K Units) by Type (2026-2031)
 Table 47. Global Atomic Layer Etching (ALE) Production Market Share by Type (2020-2025)
 Table 48. Global Atomic Layer Etching (ALE) Production Market Share by Type (2026-2031)
 Table 49. Global Atomic Layer Etching (ALE) Production Value (US$ Million) by Type (2020-2025)
 Table 50. Global Atomic Layer Etching (ALE) Production Value (US$ Million) by Type (2026-2031)
 Table 51. Global Atomic Layer Etching (ALE) Production Value Market Share by Type (2020-2025)
 Table 52. Global Atomic Layer Etching (ALE) Production Value Market Share by Type (2026-2031)
 Table 53. Global Atomic Layer Etching (ALE) Price (US$/Unit) by Type (2020-2025)
 Table 54. Global Atomic Layer Etching (ALE) Price (US$/Unit) by Type (2026-2031)
 Table 55. Global Atomic Layer Etching (ALE) Production (K Units) by Application (2020-2025)
 Table 56. Global Atomic Layer Etching (ALE) Production (K Units) by Application (2026-2031)
 Table 57. Global Atomic Layer Etching (ALE) Production Market Share by Application (2020-2025)
 Table 58. Global Atomic Layer Etching (ALE) Production Market Share by Application (2026-2031)
 Table 59. Global Atomic Layer Etching (ALE) Production Value (US$ Million) by Application (2020-2025)
 Table 60. Global Atomic Layer Etching (ALE) Production Value (US$ Million) by Application (2026-2031)
 Table 61. Global Atomic Layer Etching (ALE) Production Value Market Share by Application (2020-2025)
 Table 62. Global Atomic Layer Etching (ALE) Production Value Market Share by Application (2026-2031)
 Table 63. Global Atomic Layer Etching (ALE) Price (US$/Unit) by Application (2020-2025)
 Table 64. Global Atomic Layer Etching (ALE) Price (US$/Unit) by Application (2026-2031)
 Table 65. Oxford Instruments Atomic Layer Etching (ALE) Company Information
 Table 66. Oxford Instruments Atomic Layer Etching (ALE) Specification and Application
 Table 67. Oxford Instruments Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 68. Oxford Instruments Main Business and Markets Served
 Table 69. Oxford Instruments Recent Developments/Updates
 Table 70. ULVAC Atomic Layer Etching (ALE) Company Information
 Table 71. ULVAC Atomic Layer Etching (ALE) Specification and Application
 Table 72. ULVAC Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 73. ULVAC Main Business and Markets Served
 Table 74. ULVAC Recent Developments/Updates
 Table 75. Lam Research Atomic Layer Etching (ALE) Company Information
 Table 76. Lam Research Atomic Layer Etching (ALE) Specification and Application
 Table 77. Lam Research Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 78. Lam Research Main Business and Markets Served
 Table 79. Lam Research Recent Developments/Updates
 Table 80. AMEC Atomic Layer Etching (ALE) Company Information
 Table 81. AMEC Atomic Layer Etching (ALE) Specification and Application
 Table 82. AMEC Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 83. AMEC Main Business and Markets Served
 Table 84. AMEC Recent Developments/Updates
 Table 85. SAMCO Inc. Atomic Layer Etching (ALE) Company Information
 Table 86. SAMCO Inc. Atomic Layer Etching (ALE) Specification and Application
 Table 87. SAMCO Inc. Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 88. SAMCO Inc. Main Business and Markets Served
 Table 89. SAMCO Inc. Recent Developments/Updates
 Table 90. Applied Materials, Inc. Atomic Layer Etching (ALE) Company Information
 Table 91. Applied Materials, Inc. Atomic Layer Etching (ALE) Specification and Application
 Table 92. Applied Materials, Inc. Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 93. Applied Materials, Inc. Main Business and Markets Served
 Table 94. Applied Materials, Inc. Recent Developments/Updates
 Table 95. Sentech Atomic Layer Etching (ALE) Company Information
 Table 96. Sentech Atomic Layer Etching (ALE) Specification and Application
 Table 97. Sentech Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 98. Sentech Main Business and Markets Served
 Table 99. Sentech Recent Developments/Updates
 Table 100. SPTS Technologies (KLA company) Atomic Layer Etching (ALE) Company Information
 Table 101. SPTS Technologies (KLA company) Atomic Layer Etching (ALE) Specification and Application
 Table 102. SPTS Technologies (KLA company) Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 103. SPTS Technologies (KLA company) Main Business and Markets Served
 Table 104. SPTS Technologies (KLA company) Recent Developments/Updates
 Table 105. GigaLane Atomic Layer Etching (ALE) Company Information
 Table 106. GigaLane Atomic Layer Etching (ALE) Specification and Application
 Table 107. GigaLane Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 108. GigaLane Main Business and Markets Served
 Table 109. GigaLane Recent Developments/Updates
 Table 110. CORIAL(Plasma-Therm) Atomic Layer Etching (ALE) Company Information
 Table 111. CORIAL(Plasma-Therm) Atomic Layer Etching (ALE) Specification and Application
 Table 112. CORIAL(Plasma-Therm) Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 113. CORIAL(Plasma-Therm) Main Business and Markets Served
 Table 114. CORIAL(Plasma-Therm) Recent Developments/Updates
 Table 115. Trion Technology Atomic Layer Etching (ALE) Company Information
 Table 116. Trion Technology Atomic Layer Etching (ALE) Specification and Application
 Table 117. Trion Technology Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 118. Trion Technology Main Business and Markets Served
 Table 119. Trion Technology Recent Developments/Updates
 Table 120. NAURA Atomic Layer Etching (ALE) Company Information
 Table 121. NAURA Atomic Layer Etching (ALE) Specification and Application
 Table 122. NAURA Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 123. NAURA Main Business and Markets Served
 Table 124. NAURA Recent Developments/Updates
 Table 125. Plasma Etch, Inc. Atomic Layer Etching (ALE) Company Information
 Table 126. Plasma Etch, Inc. Atomic Layer Etching (ALE) Specification and Application
 Table 127. Plasma Etch, Inc. Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 128. Plasma Etch, Inc. Main Business and Markets Served
 Table 129. Plasma Etch, Inc. Recent Developments/Updates
 Table 130. Tokyo Electron Limited Atomic Layer Etching (ALE) Company Information
 Table 131. Tokyo Electron Limited Atomic Layer Etching (ALE) Specification and Application
 Table 132. Tokyo Electron Limited Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 133. Tokyo Electron Limited Main Business and Markets Served
 Table 134. Tokyo Electron Limited Recent Developments/Updates
 Table 135. Nano Vacuum Pty Ltd Atomic Layer Etching (ALE) Company Information
 Table 136. Nano Vacuum Pty Ltd Atomic Layer Etching (ALE) Specification and Application
 Table 137. Nano Vacuum Pty Ltd Atomic Layer Etching (ALE) Production (K Units), Value (US$ Million), Price (US$/Unit) and Gross Margin (2020-2025)
 Table 138. Nano Vacuum Pty Ltd Main Business and Markets Served
 Table 139. Nano Vacuum Pty Ltd Recent Developments/Updates
 Table 140. Key Raw Materials Lists
 Table 141. Raw Materials Key Suppliers Lists
 Table 142. Atomic Layer Etching (ALE) Distributors List
 Table 143. Atomic Layer Etching (ALE) Customers List
 Table 144. Atomic Layer Etching (ALE) Market Trends
 Table 145. Atomic Layer Etching (ALE) Market Drivers
 Table 146. Atomic Layer Etching (ALE) Market Challenges
 Table 147. Atomic Layer Etching (ALE) Market Restraints
 Table 148. Research Programs/Design for This Report
 Table 149. Key Data Information from Secondary Sources
 Table 150. Key Data Information from Primary Sources
 Table 151. Authors List of This Report


List of Figures
 Figure 1. Product Picture of Atomic Layer Etching (ALE)
 Figure 2. Global Atomic Layer Etching (ALE) Market Value by Type, (US$ Million) & (2020-2031)
 Figure 3. Global Atomic Layer Etching (ALE) Market Share by Type: 2024 VS 2031
 Figure 4. Single Reaction Station Product Picture
 Figure 5. Double Reaction Station Product Picture
 Figure 6. Global Atomic Layer Etching (ALE) Market Value by Application, (US$ Million) & (2020-2031)
 Figure 7. Global Atomic Layer Etching (ALE) Market Share by Application: 2024 VS 2031
 Figure 8. Nanofabrication
 Figure 9. Semiconductor Manufacturing
 Figure 10. Advanced Materials Research
 Figure 11. Global Atomic Layer Etching (ALE) Production Value (US$ Million), 2020 VS 2024 VS 2031
 Figure 12. Global Atomic Layer Etching (ALE) Production Value (US$ Million) & (2020-2031)
 Figure 13. Global Atomic Layer Etching (ALE) Production Capacity (K Units) & (2020-2031)
 Figure 14. Global Atomic Layer Etching (ALE) Production (K Units) & (2020-2031)
 Figure 15. Global Atomic Layer Etching (ALE) Average Price (US$/Unit) & (2020-2031)
 Figure 16. Atomic Layer Etching (ALE) Report Years Considered
 Figure 17. Atomic Layer Etching (ALE) Production Share by Manufacturers in 2024
 Figure 18. Global Atomic Layer Etching (ALE) Production Value Share by Manufacturers (2024)
 Figure 19. Atomic Layer Etching (ALE) Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
 Figure 20. The Global 5 and 10 Largest Players: Market Share by Atomic Layer Etching (ALE) Revenue in 2024
 Figure 21. Global Atomic Layer Etching (ALE) Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Figure 22. Global Atomic Layer Etching (ALE) Production Value Market Share by Region: 2020 VS 2024 VS 2031
 Figure 23. Global Atomic Layer Etching (ALE) Production Comparison by Region: 2020 VS 2024 VS 2031 (K Units)
 Figure 24. Global Atomic Layer Etching (ALE) Production Market Share by Region: 2020 VS 2024 VS 2031
 Figure 25. North America Atomic Layer Etching (ALE) Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 26. Europe Atomic Layer Etching (ALE) Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 27. China Atomic Layer Etching (ALE) Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 28. Japan Atomic Layer Etching (ALE) Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 29. Global Atomic Layer Etching (ALE) Consumption by Region: 2020 VS 2024 VS 2031 (K Units)
 Figure 30. Global Atomic Layer Etching (ALE) Consumption Market Share by Region: 2020 VS 2024 VS 2031
 Figure 31. North America Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 32. North America Atomic Layer Etching (ALE) Consumption Market Share by Country (2020-2031)
 Figure 33. U.S. Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 34. Canada Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 35. Europe Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 36. Europe Atomic Layer Etching (ALE) Consumption Market Share by Country (2020-2031)
 Figure 37. Germany Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 38. France Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 39. U.K. Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 40. Italy Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 41. Netherlands Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 42. Asia Pacific Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 43. Asia Pacific Atomic Layer Etching (ALE) Consumption Market Share by Region (2020-2031)
 Figure 44. China Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 45. Japan Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 46. South Korea Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 47. China Taiwan Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 48. Southeast Asia Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 49. India Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 50. Latin America, Middle East & Africa Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 51. Latin America, Middle East & Africa Atomic Layer Etching (ALE) Consumption Market Share by Country (2020-2031)
 Figure 52. Mexico Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 53. Brazil Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 54. Turkey Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 55. GCC Countries Atomic Layer Etching (ALE) Consumption and Growth Rate (2020-2031) & (K Units)
 Figure 56. Global Production Market Share of Atomic Layer Etching (ALE) by Type (2020-2031)
 Figure 57. Global Production Value Market Share of Atomic Layer Etching (ALE) by Type (2020-2031)
 Figure 58. Global Atomic Layer Etching (ALE) Price (US$/Unit) by Type (2020-2031)
 Figure 59. Global Production Market Share of Atomic Layer Etching (ALE) by Application (2020-2031)
 Figure 60. Global Production Value Market Share of Atomic Layer Etching (ALE) by Application (2020-2031)
 Figure 61. Global Atomic Layer Etching (ALE) Price (US$/Unit) by Application (2020-2031)
 Figure 62. Atomic Layer Etching (ALE) Value Chain
 Figure 63. Channels of Distribution (Direct Vs Distribution)
 Figure 64. Bottom-up and Top-down Approaches for This Report
 Figure 65. Data Triangulation
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