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Global EUV Mask Defect Inspection Equipment Market Research Report 2025
Published Date: April 2025
|
Report Code: QYRE-Auto-6Z18827
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Global EUV Mask Defect Inspection Equipment Market Research Report 2024
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Global EUV Mask Defect Inspection Equipment Market Research Report 2025

Code: QYRE-Auto-6Z18827
Report
April 2025
Pages:77
QYResearch
Buy Now with 15% Discount
DESCRIPTION
TABLE OF CONTENT
TABLES & FIGURES
FEATURED COMPANIES
Lasertec
KLA-Tencor
Advantest

EUV Mask Defect Inspection Equipment Market Size

The global market for EUV Mask Defect Inspection Equipment was valued at US$ 1645 million in the year 2024 and is projected to reach a revised size of US$ 3863 million by 2031, growing at a CAGR of 13.2% during the forecast period.

EUV Mask Defect Inspection Equipment Market

EUV Mask Defect Inspection Equipment Market

Mask, also known as Photomask or Reticle, is a graphic master used in the lithography process commonly used in microelectronics processing technology. As a carrier of graphic information, Mask transfers the graphic to the base material through the exposure process, thereby realizing the transfer of the graphic.
Mask defect detection is a key link in the semiconductor lithography process, which aims to check the Mask and identify and repair the defects on it. As a critical component in the lithography process, Mask is responsible for accurately transferring the circuit pattern to the wafer, and its quality is directly related to the accuracy of the wafer pattern and the performance of the final device. There are various types of defects, including particle contamination, pattern breakage, bridging problems, and defects in the mask material itself.
EUV Mask defect detection equipment is a special equipment that plays an important role in the high-end semiconductor process technology. Given the high precision required by EUV lithography technology, even the smallest defect on the Mask may significantly affect the quality of the circuit pattern on the wafer, and thus adversely affect the performance and yield of the chip. Therefore, the use of special detection equipment to strictly inspect the EUV Mask is an indispensable key link to ensure the quality of semiconductor manufacturing.
At present, optical detection is the mainstream in semiconductor detection technology. The types of semiconductor optical detection include pattern, non-pattern and mask detection. Among them, pattern defect detection is divided into bright field and dark field detection. Both are analyzed through optical signals. The difference is that the bright field is a vertically reflected light signal, while the dark field is a scattered light signal.
In the semiconductor lithography process, corresponding light sources need to be used for different masks. Different mask applications vary greatly, and can be generally divided into binary masks, phase-shift masks and EUV masks. EUV Mask is a new type of mask designed specifically for EUV (extreme ultraviolet) lithography technology. Given the extremely short wavelength of EUV and its easy absorption by a variety of materials, traditional refractive elements such as lenses cannot be used. Instead, according to the Bragg law, the reflection of the light beam is achieved through a multi-layer (ML) structure (unlike EUV, DUV uses transmitted light). This type of mask is widely used in 7nm, 5nm, 3nm and 2nm (TSMC plans to mass produce in 2025) high-end manufacturing processes.
At present, mask detection technology is mainly optical detection and SEM detection. Among them, the optical inspection companies are mainly Lasertec and KLA, while SEM inspection is Advantest. From the perspective of downstream applications, as long as the mask uses Pellicle, EUV Mask inspection equipment is required (in other words, as long as there is an EUV lithography machine, EUV inspection equipment must be used), but at present, not all EUV Masks of downstream terminal manufacturers will be used with Pellicle.
In DUV lithography or optical Mask technology, Pellicle plays a key role. The Mask inspection tool operates at an exposure wavelength of 193nm, and inspection is performed through this layer of film. For the wafer fab, this is a direct and efficient process. However, in extreme ultraviolet (EUV) lithography technology, the manufacturing process of the Mask needs to be carried out in a dedicated Mask workshop. At this point, the inspection of the Mask becomes more complicated because it requires a high-resolution system. In the wafer fab environment, the ideal situation is to use a layer of Pellicle to protect the Mask from particle contamination, while allowing the inspection system to work through this layer of Pellicle. If there are no defects, you can proceed; if defects are detected, you need to remove the pellicle and send the Mask to the Mask workshop for cleaning.
EUV Mask defect detection equipment is mainly used in Mask Shop and Fab. The Fab includes the mask production line and the wafer manufacturing production line. For the Fab, there are two main reasons for using EUV Mask defect detection equipment. First, once the pellicle is attached to the Mask, other types of equipment (such as electron beam or DUV equipment) except EUV detection equipment are difficult to achieve high-sensitivity detection effects. This is because the presence of pellicles interferes with the detection capabilities of these devices, making it difficult for them to accurately identify tiny defects. Secondly, EUV detection equipment has higher detection accuracy and can detect defects and particles that traditional DUV Mask detection methods cannot capture. Mask Shop has always had a relatively large share, reaching about 61% in 2023. However, with the acceleration of commercialization of smaller advanced process nodes, it is expected that the share of Fab will reach 42% by 2030.
At present, the EUV Mask defect detection equipment market is mainly monopolized by KLA and Lasertec. EUV Mask defect detection equipment is a high-precision and advanced equipment with a long delivery time. For example, Lasertec's delivery time is two years. In the next few years, the two leading companies will still maintain a monopoly in the EUV Mask defect detection market.

Report Scope

This report aims to provide a comprehensive presentation of the global market for EUV Mask Defect Inspection Equipment, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding EUV Mask Defect Inspection Equipment.
The EUV Mask Defect Inspection Equipment market size, estimations, and forecasts are provided in terms of output/shipments (Units) and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global EUV Mask Defect Inspection Equipment market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the EUV Mask Defect Inspection Equipment manufacturers, new entrants, and industry chain related companies in this market with information on the revenues, production, and average price for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Market Segmentation

Scope of EUV Mask Defect Inspection Equipment Market Report

Report Metric Details
Report Name EUV Mask Defect Inspection Equipment Market
Accounted market size in year US$ 1645 million
Forecasted market size in 2031 US$ 3863 million
CAGR 13.2%
Base Year year
Forecasted years 2025 - 2031
by Type
  • 5-7nm Process
  • 3nm and Below Process
by Application
  • Mask Shop
  • Fab
Production by Region
  • USA
  • Japan
Consumption by Region
  • North America (United States, Canada)
  • Europe (Germany, France, UK, Italy, Russia)
  • Asia-Pacific (China, Japan, South Korea, Taiwan)
  • Southeast Asia (India)
  • Latin America (Mexico, Brazil)
By Company Lasertec, KLA-Tencor, Advantest
Forecast units USD million in value
Report coverage Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

  • Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
  • Chapter 2: Detailed analysis of EUV Mask Defect Inspection Equipment manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
  • Chapter 3: Production/output, value of EUV Mask Defect Inspection Equipment by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
  • Chapter 4: Consumption of EUV Mask Defect Inspection Equipment in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
  • Chapter 5: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
  • Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
  • Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
  • Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
  • Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
  • Chapter 10: The main points and conclusions of the report.

FAQ for this report

How fast is EUV Mask Defect Inspection Equipment Market growing?

Ans: The EUV Mask Defect Inspection Equipment Market witnessing a CAGR of 13.2% during the forecast period 2025-2031.

What is the EUV Mask Defect Inspection Equipment Market size in 2031?

Ans: The EUV Mask Defect Inspection Equipment Market size in 2031 will be US$ 3863 million.

What is the EUV Mask Defect Inspection Equipment Market share by application?

Ans: Mask Shop has always had a relatively large share, reaching about 61% in 2023. However, with the acceleration of commercialization of smaller advanced process nodes, it is expected that the share of Fab will reach 42% by 2030.

Who are the main players in the EUV Mask Defect Inspection Equipment Market report?

Ans: The main players in the EUV Mask Defect Inspection Equipment Market are Lasertec, KLA-Tencor, Advantest

What are the Application segmentation covered in the EUV Mask Defect Inspection Equipment Market report?

Ans: The Applications covered in the EUV Mask Defect Inspection Equipment Market report are Mask Shop, Fab

What are the Type segmentation covered in the EUV Mask Defect Inspection Equipment Market report?

Ans: The Types covered in the EUV Mask Defect Inspection Equipment Market report are 5-7nm Process, 3nm and Below Process

Recommended Reports

EUV Lithography

Photomasks & Defect Inspection

EUV Mask & Reticles

1 EUV Mask Defect Inspection Equipment Market Overview
1.1 Product Definition
1.2 EUV Mask Defect Inspection Equipment by Type
1.2.1 Global EUV Mask Defect Inspection Equipment Market Value Growth Rate Analysis by Type: 2024 VS 2031
1.2.2 5-7nm Process
1.2.3 3nm and Below Process
1.3 EUV Mask Defect Inspection Equipment by Application
1.3.1 Global EUV Mask Defect Inspection Equipment Market Value Growth Rate Analysis by Application: 2024 VS 2031
1.3.2 Mask Shop
1.3.3 Fab
1.4 Global Market Growth Prospects
1.4.1 Global EUV Mask Defect Inspection Equipment Production Value Estimates and Forecasts (2020-2031)
1.4.2 Global EUV Mask Defect Inspection Equipment Production Capacity Estimates and Forecasts (2020-2031)
1.4.3 Global EUV Mask Defect Inspection Equipment Production Estimates and Forecasts (2020-2031)
1.4.4 Global EUV Mask Defect Inspection Equipment Market Average Price Estimates and Forecasts (2020-2031)
1.5 Assumptions and Limitations
2 Market Competition by Manufacturers
2.1 Global EUV Mask Defect Inspection Equipment Production Market Share by Manufacturers (2020-2025)
2.2 Global EUV Mask Defect Inspection Equipment Production Value Market Share by Manufacturers (2020-2025)
2.3 Global Key Players of EUV Mask Defect Inspection Equipment, Industry Ranking, 2023 VS 2024
2.4 Global EUV Mask Defect Inspection Equipment Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
2.5 Global EUV Mask Defect Inspection Equipment Average Price by Manufacturers (2020-2025)
2.6 Global Key Manufacturers of EUV Mask Defect Inspection Equipment, Manufacturing Base Distribution and Headquarters
2.7 Global Key Manufacturers of EUV Mask Defect Inspection Equipment, Product Offered and Application
2.8 Global Key Manufacturers of EUV Mask Defect Inspection Equipment, Date of Enter into This Industry
2.9 EUV Mask Defect Inspection Equipment Market Competitive Situation and Trends
2.9.1 EUV Mask Defect Inspection Equipment Market Concentration Rate
2.9.2 Global 5 and 10 Largest EUV Mask Defect Inspection Equipment Players Market Share by Revenue
2.10 Mergers & Acquisitions, Expansion
3 EUV Mask Defect Inspection Equipment Production by Region
3.1 Global EUV Mask Defect Inspection Equipment Production Value Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.2 Global EUV Mask Defect Inspection Equipment Production Value by Region (2020-2031)
3.2.1 Global EUV Mask Defect Inspection Equipment Production Value by Region (2020-2025)
3.2.2 Global Forecasted Production Value of EUV Mask Defect Inspection Equipment by Region (2026-2031)
3.3 Global EUV Mask Defect Inspection Equipment Production Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.4 Global EUV Mask Defect Inspection Equipment Production Volume by Region (2020-2031)
3.4.1 Global EUV Mask Defect Inspection Equipment Production by Region (2020-2025)
3.4.2 Global Forecasted Production of EUV Mask Defect Inspection Equipment by Region (2026-2031)
3.5 Global EUV Mask Defect Inspection Equipment Market Price Analysis by Region (2020-2025)
3.6 Global EUV Mask Defect Inspection Equipment Production and Value, Year-over-Year Growth
3.6.1 USA EUV Mask Defect Inspection Equipment Production Value Estimates and Forecasts (2020-2031)
3.6.2 Japan EUV Mask Defect Inspection Equipment Production Value Estimates and Forecasts (2020-2031)
4 EUV Mask Defect Inspection Equipment Consumption by Region
4.1 Global EUV Mask Defect Inspection Equipment Consumption Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
4.2 Global EUV Mask Defect Inspection Equipment Consumption by Region (2020-2031)
4.2.1 Global EUV Mask Defect Inspection Equipment Consumption by Region (2020-2025)
4.2.2 Global EUV Mask Defect Inspection Equipment Forecasted Consumption by Region (2026-2031)
4.3 North America
4.3.1 North America EUV Mask Defect Inspection Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.3.2 North America EUV Mask Defect Inspection Equipment Consumption by Country (2020-2031)
4.3.3 U.S.
4.3.4 Canada
4.4 Europe
4.4.1 Europe EUV Mask Defect Inspection Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.4.2 Europe EUV Mask Defect Inspection Equipment Consumption by Country (2020-2031)
4.4.3 Germany
4.4.4 France
4.4.5 U.K.
4.4.6 Italy
4.4.7 Netherlands
4.5 Asia Pacific
4.5.1 Asia Pacific EUV Mask Defect Inspection Equipment Consumption Growth Rate by Region: 2020 VS 2024 VS 2031
4.5.2 Asia Pacific EUV Mask Defect Inspection Equipment Consumption by Region (2020-2031)
4.5.3 China
4.5.4 Japan
4.5.5 South Korea
4.5.6 China Taiwan
4.5.7 Southeast Asia
4.5.8 India
4.6 Latin America, Middle East & Africa
4.6.1 Latin America, Middle East & Africa EUV Mask Defect Inspection Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.6.2 Latin America, Middle East & Africa EUV Mask Defect Inspection Equipment Consumption by Country (2020-2031)
4.6.3 Mexico
4.6.4 Brazil
4.6.5 Israel
5 Segment by Type
5.1 Global EUV Mask Defect Inspection Equipment Production by Type (2020-2031)
5.1.1 Global EUV Mask Defect Inspection Equipment Production by Type (2020-2025)
5.1.2 Global EUV Mask Defect Inspection Equipment Production by Type (2026-2031)
5.1.3 Global EUV Mask Defect Inspection Equipment Production Market Share by Type (2020-2031)
5.2 Global EUV Mask Defect Inspection Equipment Production Value by Type (2020-2031)
5.2.1 Global EUV Mask Defect Inspection Equipment Production Value by Type (2020-2025)
5.2.2 Global EUV Mask Defect Inspection Equipment Production Value by Type (2026-2031)
5.2.3 Global EUV Mask Defect Inspection Equipment Production Value Market Share by Type (2020-2031)
5.3 Global EUV Mask Defect Inspection Equipment Price by Type (2020-2031)
6 Segment by Application
6.1 Global EUV Mask Defect Inspection Equipment Production by Application (2020-2031)
6.1.1 Global EUV Mask Defect Inspection Equipment Production by Application (2020-2025)
6.1.2 Global EUV Mask Defect Inspection Equipment Production by Application (2026-2031)
6.1.3 Global EUV Mask Defect Inspection Equipment Production Market Share by Application (2020-2031)
6.2 Global EUV Mask Defect Inspection Equipment Production Value by Application (2020-2031)
6.2.1 Global EUV Mask Defect Inspection Equipment Production Value by Application (2020-2025)
6.2.2 Global EUV Mask Defect Inspection Equipment Production Value by Application (2026-2031)
6.2.3 Global EUV Mask Defect Inspection Equipment Production Value Market Share by Application (2020-2031)
6.3 Global EUV Mask Defect Inspection Equipment Price by Application (2020-2031)
7 Key Companies Profiled
7.1 Lasertec
7.1.1 Lasertec EUV Mask Defect Inspection Equipment Company Information
7.1.2 Lasertec EUV Mask Defect Inspection Equipment Product Portfolio
7.1.3 Lasertec EUV Mask Defect Inspection Equipment Production, Value, Price and Gross Margin (2020-2025)
7.1.4 Lasertec Main Business and Markets Served
7.1.5 Lasertec Recent Developments/Updates
7.2 KLA-Tencor
7.2.1 KLA-Tencor EUV Mask Defect Inspection Equipment Company Information
7.2.2 KLA-Tencor EUV Mask Defect Inspection Equipment Product Portfolio
7.2.3 KLA-Tencor EUV Mask Defect Inspection Equipment Production, Value, Price and Gross Margin (2020-2025)
7.2.4 KLA-Tencor Main Business and Markets Served
7.2.5 KLA-Tencor Recent Developments/Updates
7.3 Advantest
7.3.1 Advantest EUV Mask Defect Inspection Equipment Company Information
7.3.2 Advantest EUV Mask Defect Inspection Equipment Product Portfolio
7.3.3 Advantest EUV Mask Defect Inspection Equipment Production, Value, Price and Gross Margin (2020-2025)
7.3.4 Advantest Main Business and Markets Served
7.3.5 Advantest Recent Developments/Updates
8 Industry Chain and Sales Channels Analysis
8.1 EUV Mask Defect Inspection Equipment Industry Chain Analysis
8.2 EUV Mask Defect Inspection Equipment Raw Material Supply Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.3 EUV Mask Defect Inspection Equipment Production Mode & Process Analysis
8.4 EUV Mask Defect Inspection Equipment Sales and Marketing
8.4.1 EUV Mask Defect Inspection Equipment Sales Channels
8.4.2 EUV Mask Defect Inspection Equipment Distributors
8.5 EUV Mask Defect Inspection Equipment Customer Analysis
9 EUV Mask Defect Inspection Equipment Market Dynamics
9.1 EUV Mask Defect Inspection Equipment Industry Trends
9.2 EUV Mask Defect Inspection Equipment Market Drivers
9.3 EUV Mask Defect Inspection Equipment Market Challenges
9.4 EUV Mask Defect Inspection Equipment Market Restraints
10 Research Findings and Conclusion
11 Methodology and Data Source
11.1 Methodology/Research Approach
11.1.1 Research Programs/Design
11.1.2 Market Size Estimation
11.1.3 Market Breakdown and Data Triangulation
11.2 Data Source
11.2.1 Secondary Sources
11.2.2 Primary Sources
11.3 Author List
11.4 Disclaimer
FEATURED COMPANIES
Lasertec
KLA-Tencor
Advantest
List of Tables
 Table 1. Global EUV Mask Defect Inspection Equipment Market Value by Type, (US$ Million) & (2024 VS 2031)
 Table 2. Global EUV Mask Defect Inspection Equipment Market Value by Application, (US$ Million) & (2024 VS 2031)
 Table 3. Global EUV Mask Defect Inspection Equipment Production Capacity (Units) by Manufacturers in 2024
 Table 4. Global EUV Mask Defect Inspection Equipment Production by Manufacturers (2020-2025) & (Units)
 Table 5. Global EUV Mask Defect Inspection Equipment Production Market Share by Manufacturers (2020-2025)
 Table 6. Global EUV Mask Defect Inspection Equipment Production Value by Manufacturers (2020-2025) & (US$ Million)
 Table 7. Global EUV Mask Defect Inspection Equipment Production Value Share by Manufacturers (2020-2025)
 Table 8. Global Key Players of EUV Mask Defect Inspection Equipment, Industry Ranking, 2023 VS 2024
 Table 9. Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value in EUV Mask Defect Inspection Equipment as of 2024)
 Table 10. Global Market EUV Mask Defect Inspection Equipment Average Price by Manufacturers (USD/Unit) & (2020-2025)
 Table 11. Global Key Manufacturers of EUV Mask Defect Inspection Equipment, Manufacturing Base Distribution and Headquarters
 Table 12. Global Key Manufacturers of EUV Mask Defect Inspection Equipment, Product Offered and Application
 Table 13. Global Key Manufacturers of EUV Mask Defect Inspection Equipment, Date of Enter into This Industry
 Table 14. Global EUV Mask Defect Inspection Equipment Manufacturers Market Concentration Ratio (CR5 and HHI)
 Table 15. Mergers & Acquisitions, Expansion Plans
 Table 16. Global EUV Mask Defect Inspection Equipment Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Table 17. Global EUV Mask Defect Inspection Equipment Production Value (US$ Million) by Region (2020-2025)
 Table 18. Global EUV Mask Defect Inspection Equipment Production Value Market Share by Region (2020-2025)
 Table 19. Global EUV Mask Defect Inspection Equipment Production Value (US$ Million) Forecast by Region (2026-2031)
 Table 20. Global EUV Mask Defect Inspection Equipment Production Value Market Share Forecast by Region (2026-2031)
 Table 21. Global EUV Mask Defect Inspection Equipment Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)
 Table 22. Global EUV Mask Defect Inspection Equipment Production (Units) by Region (2020-2025)
 Table 23. Global EUV Mask Defect Inspection Equipment Production Market Share by Region (2020-2025)
 Table 24. Global EUV Mask Defect Inspection Equipment Production (Units) Forecast by Region (2026-2031)
 Table 25. Global EUV Mask Defect Inspection Equipment Production Market Share Forecast by Region (2026-2031)
 Table 26. Global EUV Mask Defect Inspection Equipment Market Average Price (USD/Unit) by Region (2020-2025)
 Table 27. Global EUV Mask Defect Inspection Equipment Market Average Price (USD/Unit) by Region (2026-2031)
 Table 28. Global EUV Mask Defect Inspection Equipment Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)
 Table 29. Global EUV Mask Defect Inspection Equipment Consumption by Region (2020-2025) & (Units)
 Table 30. Global EUV Mask Defect Inspection Equipment Consumption Market Share by Region (2020-2025)
 Table 31. Global EUV Mask Defect Inspection Equipment Forecasted Consumption by Region (2026-2031) & (Units)
 Table 32. Global EUV Mask Defect Inspection Equipment Forecasted Consumption Market Share by Region (2026-2031)
 Table 33. North America EUV Mask Defect Inspection Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 34. North America EUV Mask Defect Inspection Equipment Consumption by Country (2020-2025) & (Units)
 Table 35. North America EUV Mask Defect Inspection Equipment Consumption by Country (2026-2031) & (Units)
 Table 36. Europe EUV Mask Defect Inspection Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 37. Europe EUV Mask Defect Inspection Equipment Consumption by Country (2020-2025) & (Units)
 Table 38. Europe EUV Mask Defect Inspection Equipment Consumption by Country (2026-2031) & (Units)
 Table 39. Asia Pacific EUV Mask Defect Inspection Equipment Consumption Growth Rate by Region: 2020 VS 2024 VS 2031 (Units)
 Table 40. Asia Pacific EUV Mask Defect Inspection Equipment Consumption by Region (2020-2025) & (Units)
 Table 41. Asia Pacific EUV Mask Defect Inspection Equipment Consumption by Region (2026-2031) & (Units)
 Table 42. Latin America, Middle East & Africa EUV Mask Defect Inspection Equipment Consumption Growth Rate by Country: 2020 VS 2024 VS 2031 (Units)
 Table 43. Latin America, Middle East & Africa EUV Mask Defect Inspection Equipment Consumption by Country (2020-2025) & (Units)
 Table 44. Latin America, Middle East & Africa EUV Mask Defect Inspection Equipment Consumption by Country (2026-2031) & (Units)
 Table 45. Global EUV Mask Defect Inspection Equipment Production (Units) by Type (2020-2025)
 Table 46. Global EUV Mask Defect Inspection Equipment Production (Units) by Type (2026-2031)
 Table 47. Global EUV Mask Defect Inspection Equipment Production Market Share by Type (2020-2025)
 Table 48. Global EUV Mask Defect Inspection Equipment Production Market Share by Type (2026-2031)
 Table 49. Global EUV Mask Defect Inspection Equipment Production Value (US$ Million) by Type (2020-2025)
 Table 50. Global EUV Mask Defect Inspection Equipment Production Value (US$ Million) by Type (2026-2031)
 Table 51. Global EUV Mask Defect Inspection Equipment Production Value Market Share by Type (2020-2025)
 Table 52. Global EUV Mask Defect Inspection Equipment Production Value Market Share by Type (2026-2031)
 Table 53. Global EUV Mask Defect Inspection Equipment Price (USD/Unit) by Type (2020-2025)
 Table 54. Global EUV Mask Defect Inspection Equipment Price (USD/Unit) by Type (2026-2031)
 Table 55. Global EUV Mask Defect Inspection Equipment Production (Units) by Application (2020-2025)
 Table 56. Global EUV Mask Defect Inspection Equipment Production (Units) by Application (2026-2031)
 Table 57. Global EUV Mask Defect Inspection Equipment Production Market Share by Application (2020-2025)
 Table 58. Global EUV Mask Defect Inspection Equipment Production Market Share by Application (2026-2031)
 Table 59. Global EUV Mask Defect Inspection Equipment Production Value (US$ Million) by Application (2020-2025)
 Table 60. Global EUV Mask Defect Inspection Equipment Production Value (US$ Million) by Application (2026-2031)
 Table 61. Global EUV Mask Defect Inspection Equipment Production Value Market Share by Application (2020-2025)
 Table 62. Global EUV Mask Defect Inspection Equipment Production Value Market Share by Application (2026-2031)
 Table 63. Global EUV Mask Defect Inspection Equipment Price (USD/Unit) by Application (2020-2025)
 Table 64. Global EUV Mask Defect Inspection Equipment Price (USD/Unit) by Application (2026-2031)
 Table 65. Lasertec EUV Mask Defect Inspection Equipment Company Information
 Table 66. Lasertec EUV Mask Defect Inspection Equipment Specification and Application
 Table 67. Lasertec EUV Mask Defect Inspection Equipment Production (Units), Value (US$ Million), Price (USD/Unit) and Gross Margin (2020-2025)
 Table 68. Lasertec Main Business and Markets Served
 Table 69. Lasertec Recent Developments/Updates
 Table 70. KLA-Tencor EUV Mask Defect Inspection Equipment Company Information
 Table 71. KLA-Tencor EUV Mask Defect Inspection Equipment Specification and Application
 Table 72. KLA-Tencor EUV Mask Defect Inspection Equipment Production (Units), Value (US$ Million), Price (USD/Unit) and Gross Margin (2020-2025)
 Table 73. KLA-Tencor Main Business and Markets Served
 Table 74. KLA-Tencor Recent Developments/Updates
 Table 75. Advantest EUV Mask Defect Inspection Equipment Company Information
 Table 76. Advantest EUV Mask Defect Inspection Equipment Specification and Application
 Table 77. Advantest EUV Mask Defect Inspection Equipment Production (Units), Value (US$ Million), Price (USD/Unit) and Gross Margin (2020-2025)
 Table 78. Advantest Main Business and Markets Served
 Table 79. Advantest Recent Developments/Updates
 Table 80. Key Raw Materials Lists
 Table 81. Raw Materials Key Suppliers Lists
 Table 82. EUV Mask Defect Inspection Equipment Distributors List
 Table 83. EUV Mask Defect Inspection Equipment Customers List
 Table 84. EUV Mask Defect Inspection Equipment Market Trends
 Table 85. EUV Mask Defect Inspection Equipment Market Drivers
 Table 86. EUV Mask Defect Inspection Equipment Market Challenges
 Table 87. EUV Mask Defect Inspection Equipment Market Restraints
 Table 88. Research Programs/Design for This Report
 Table 89. Key Data Information from Secondary Sources
 Table 90. Key Data Information from Primary Sources
 Table 91. Authors List of This Report


List of Figures
 Figure 1. Product Picture of EUV Mask Defect Inspection Equipment
 Figure 2. Global EUV Mask Defect Inspection Equipment Market Value by Type, (US$ Million) & (2020-2031)
 Figure 3. Global EUV Mask Defect Inspection Equipment Market Share by Type: 2024 VS 2031
 Figure 4. 5-7nm Process Product Picture
 Figure 5. 3nm and Below Process Product Picture
 Figure 6. Global EUV Mask Defect Inspection Equipment Market Value by Application, (US$ Million) & (2020-2031)
 Figure 7. Global EUV Mask Defect Inspection Equipment Market Share by Application: 2024 VS 2031
 Figure 8. Mask Shop
 Figure 9. Fab
 Figure 10. Global EUV Mask Defect Inspection Equipment Production Value (US$ Million), 2020 VS 2024 VS 2031
 Figure 11. Global EUV Mask Defect Inspection Equipment Production Value (US$ Million) & (2020-2031)
 Figure 12. Global EUV Mask Defect Inspection Equipment Production Capacity (Units) & (2020-2031)
 Figure 13. Global EUV Mask Defect Inspection Equipment Production (Units) & (2020-2031)
 Figure 14. Global EUV Mask Defect Inspection Equipment Average Price (USD/Unit) & (2020-2031)
 Figure 15. EUV Mask Defect Inspection Equipment Report Years Considered
 Figure 16. EUV Mask Defect Inspection Equipment Production Share by Manufacturers in 2024
 Figure 17. Global EUV Mask Defect Inspection Equipment Production Value Share by Manufacturers (2024)
 Figure 18. EUV Mask Defect Inspection Equipment Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
 Figure 19. The Global 5 and 10 Largest Players: Market Share by EUV Mask Defect Inspection Equipment Revenue in 2024
 Figure 20. Global EUV Mask Defect Inspection Equipment Production Value by Region: 2020 VS 2024 VS 2031 (US$ Million)
 Figure 21. Global EUV Mask Defect Inspection Equipment Production Value Market Share by Region: 2020 VS 2024 VS 2031
 Figure 22. Global EUV Mask Defect Inspection Equipment Production Comparison by Region: 2020 VS 2024 VS 2031 (Units)
 Figure 23. Global EUV Mask Defect Inspection Equipment Production Market Share by Region: 2020 VS 2024 VS 2031
 Figure 24. USA EUV Mask Defect Inspection Equipment Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 25. Japan EUV Mask Defect Inspection Equipment Production Value (US$ Million) Growth Rate (2020-2031)
 Figure 26. Global EUV Mask Defect Inspection Equipment Consumption by Region: 2020 VS 2024 VS 2031 (Units)
 Figure 27. Global EUV Mask Defect Inspection Equipment Consumption Market Share by Region: 2020 VS 2024 VS 2031
 Figure 28. North America EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 29. North America EUV Mask Defect Inspection Equipment Consumption Market Share by Country (2020-2031)
 Figure 30. U.S. EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 31. Canada EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 32. Europe EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 33. Europe EUV Mask Defect Inspection Equipment Consumption Market Share by Country (2020-2031)
 Figure 34. Germany EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 35. France EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 36. U.K. EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 37. Italy EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 38. Netherlands EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 39. Asia Pacific EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 40. Asia Pacific EUV Mask Defect Inspection Equipment Consumption Market Share by Region (2020-2031)
 Figure 41. China EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 42. Japan EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 43. South Korea EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 44. China Taiwan EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 45. Southeast Asia EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 46. India EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 47. Latin America, Middle East & Africa EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 48. Latin America, Middle East & Africa EUV Mask Defect Inspection Equipment Consumption Market Share by Country (2020-2031)
 Figure 49. Mexico EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 50. Brazil EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 51. Israel EUV Mask Defect Inspection Equipment Consumption and Growth Rate (2020-2031) & (Units)
 Figure 52. Global Production Market Share of EUV Mask Defect Inspection Equipment by Type (2020-2031)
 Figure 53. Global Production Value Market Share of EUV Mask Defect Inspection Equipment by Type (2020-2031)
 Figure 54. Global EUV Mask Defect Inspection Equipment Price (USD/Unit) by Type (2020-2031)
 Figure 55. Global Production Market Share of EUV Mask Defect Inspection Equipment by Application (2020-2031)
 Figure 56. Global Production Value Market Share of EUV Mask Defect Inspection Equipment by Application (2020-2031)
 Figure 57. Global EUV Mask Defect Inspection Equipment Price (USD/Unit) by Application (2020-2031)
 Figure 58. EUV Mask Defect Inspection Equipment Value Chain
 Figure 59. Channels of Distribution (Direct Vs Distribution)
 Figure 60. Bottom-up and Top-down Approaches for This Report
 Figure 61. Data Triangulation
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