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Global EUV Lithography Market Research Report 2025
Published Date: September 2025
|
Report Code: QYRE-Auto-35I5832
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Global EUV Lithography Market Insights and Forecast to 2028
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Global EUV Lithography Market Research Report 2025

Code: QYRE-Auto-35I5832
Report
September 2025
Pages:68
QYResearch
Buy Now with 15% Discount
DESCRIPTION
TABLE OF CONTENT
TABLES & FIGURES
FEATURED COMPANIES
ASML (Netherlands)
Nikon (Japan)
Canon (Japan)
Gigaphoton Inc. (Japan)

EUV Lithography Market Size

EUVL) is expected to increase from USD 1.24 billion in 2017 to USD 10.31 billion by 2023, at a CAGR of 28.16% during the forecast period.

EUV Lithography Market

EUV Lithography Market

The global market for EUV Lithography was valued at US$ million in the year 2024 and is projected to reach a revised size of US$ million by 2031, growing at a CAGR of %during the forecast period.
North American market for EUV Lithography is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.
Asia-Pacific market for EUV Lithography is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.
The global market for EUV Lithography in Integrated Device Manufacturers (IDM) is estimated to increase from $ million in 2024 to $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.
The major global companies of EUV Lithography include ASML (Netherlands), Nikon (Japan), Canon (Japan), Gigaphoton Inc. (Japan), etc. In 2024, the world's top three vendors accounted for approximately % of the revenue.
This report aims to provide a comprehensive presentation of the global market for EUV Lithography, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding EUV Lithography.
The EUV Lithography market size, estimations, and forecasts are provided in terms of and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global EUV Lithography market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the EUV Lithography companies, new entrants, and industry chain related companies in this market with information on the revenues for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Market Segmentation

Scope of EUV Lithography Market Report

Report Metric Details
Report Name EUV Lithography Market
Accounted market size in 2023 USD 10.31 billion
CAGR 28.16%
Base Year 2023
Segment by Type
  • Light Source
  • Exposure Device
  • EUV Pod
  • Others
Segment by Application
  • Integrated Device Manufacturers (IDM)
  • Foundry
  • Others
By Region
  • North America (United States, Canada)
  • Europe (Germany, France, UK, Italy, Russia) Rest of Europe
  • Nordic Countries
  • Asia-Pacific (China, Japan, South Korea)
  • Southeast Asia (India, Australia)
  • Rest of Asia
  • Latin America (Mexico, Brazil)
  • Rest of Latin America
  • Middle East & Africa (Turkey, Saudi Arabia, UAE, Rest of MEA)
By Company ASML (Netherlands), Nikon (Japan), Canon (Japan), Gigaphoton Inc. (Japan)
Forecast units USD million in value
Report coverage Revenue and volume forecast, company share, competitive landscape, growth factors and trends

Chapter Outline

  • Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
  • Chapter 2: Introduces executive summary of global market size, regional market size, this section also introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by companies in the industry, and the analysis of relevant policies in the industry.
  • Chapter 3: Detailed analysis of EUV Lithography company competitive landscape, revenue market share, latest development plan, merger, and acquisition information, etc.
  • Chapter 4: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
  • Chapter 5: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
  • Chapter 6, 7, 8, 9, 10: North America, Europe, Asia Pacific, Latin America, Middle East and Africa segment by country. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and capacity of each country in the world.
  • Chapter 11: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
  • Chapter 12: The main points and conclusions of the report.

FAQ for this report

Who are the main players in the EUV Lithography Market report?

Ans: The main players in the EUV Lithography Market are ASML (Netherlands), Nikon (Japan), Canon (Japan), Gigaphoton Inc. (Japan)

What are the Application segmentation covered in the EUV Lithography Market report?

Ans: The Applications covered in the EUV Lithography Market report are Integrated Device Manufacturers (IDM), Foundry, Others

What are the Type segmentation covered in the EUV Lithography Market report?

Ans: The Types covered in the EUV Lithography Market report are Light Source, Exposure Device, EUV Pod, Others

1 Report Overview
1.1 Study Scope
1.2 Market Analysis by Type
1.2.1 Global EUV Lithography Market Size Growth Rate by Type: 2020 VS 2024 VS 2031
1.2.2 Light Source
1.2.3 Exposure Device
1.2.4 EUV Pod
1.2.5 Others
1.3 Market by Application
1.3.1 Global EUV Lithography Market Growth by Application: 2020 VS 2024 VS 2031
1.3.2 Integrated Device Manufacturers (IDM)
1.3.3 Foundry
1.3.4 Others
1.4 Assumptions and Limitations
1.5 Study Objectives
1.6 Years Considered
2 Global Growth Trends
2.1 Global EUV Lithography Market Perspective (2020-2031)
2.2 Global EUV Lithography Growth Trends by Region
2.2.1 Global EUV Lithography Market Size by Region: 2020 VS 2024 VS 2031
2.2.2 EUV Lithography Historic Market Size by Region (2020-2025)
2.2.3 EUV Lithography Forecasted Market Size by Region (2026-2031)
2.3 EUV Lithography Market Dynamics
2.3.1 EUV Lithography Industry Trends
2.3.2 EUV Lithography Market Drivers
2.3.3 EUV Lithography Market Challenges
2.3.4 EUV Lithography Market Restraints
3 Competition Landscape by Key Players
3.1 Global Top EUV Lithography Players by Revenue
3.1.1 Global Top EUV Lithography Players by Revenue (2020-2025)
3.1.2 Global EUV Lithography Revenue Market Share by Players (2020-2025)
3.2 Global EUV Lithography Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
3.3 Global Key Players Ranking by EUV Lithography Revenue
3.4 Global EUV Lithography Market Concentration Ratio
3.4.1 Global EUV Lithography Market Concentration Ratio (CR5 and HHI)
3.4.2 Global Top 10 and Top 5 Companies by EUV Lithography Revenue in 2024
3.5 Global Key Players of EUV Lithography Head office and Area Served
3.6 Global Key Players of EUV Lithography, Product and Application
3.7 Global Key Players of EUV Lithography, Date of Enter into This Industry
3.8 Mergers & Acquisitions, Expansion Plans
4 EUV Lithography Breakdown Data by Type
4.1 Global EUV Lithography Historic Market Size by Type (2020-2025)
4.2 Global EUV Lithography Forecasted Market Size by Type (2026-2031)
5 EUV Lithography Breakdown Data by Application
5.1 Global EUV Lithography Historic Market Size by Application (2020-2025)
5.2 Global EUV Lithography Forecasted Market Size by Application (2026-2031)
6 North America
6.1 North America EUV Lithography Market Size (2020-2031)
6.2 North America EUV Lithography Market Growth Rate by Country: 2020 VS 2024 VS 2031
6.3 North America EUV Lithography Market Size by Country (2020-2025)
6.4 North America EUV Lithography Market Size by Country (2026-2031)
6.5 United States
6.6 Canada
7 Europe
7.1 Europe EUV Lithography Market Size (2020-2031)
7.2 Europe EUV Lithography Market Growth Rate by Country: 2020 VS 2024 VS 2031
7.3 Europe EUV Lithography Market Size by Country (2020-2025)
7.4 Europe EUV Lithography Market Size by Country (2026-2031)
7.5 Germany
7.6 France
7.7 U.K.
7.8 Italy
7.9 Russia
7.10 Nordic Countries
8 Asia-Pacific
8.1 Asia-Pacific EUV Lithography Market Size (2020-2031)
8.2 Asia-Pacific EUV Lithography Market Growth Rate by Region: 2020 VS 2024 VS 2031
8.3 Asia-Pacific EUV Lithography Market Size by Region (2020-2025)
8.4 Asia-Pacific EUV Lithography Market Size by Region (2026-2031)
8.5 China
8.6 Japan
8.7 South Korea
8.8 Southeast Asia
8.9 India
8.10 Australia
9 Latin America
9.1 Latin America EUV Lithography Market Size (2020-2031)
9.2 Latin America EUV Lithography Market Growth Rate by Country: 2020 VS 2024 VS 2031
9.3 Latin America EUV Lithography Market Size by Country (2020-2025)
9.4 Latin America EUV Lithography Market Size by Country (2026-2031)
9.5 Mexico
9.6 Brazil
10 Middle East & Africa
10.1 Middle East & Africa EUV Lithography Market Size (2020-2031)
10.2 Middle East & Africa EUV Lithography Market Growth Rate by Country: 2020 VS 2024 VS 2031
10.3 Middle East & Africa EUV Lithography Market Size by Country (2020-2025)
10.4 Middle East & Africa EUV Lithography Market Size by Country (2026-2031)
10.5 Turkey
10.6 Saudi Arabia
10.7 UAE
11 Key Players Profiles
11.1 ASML (Netherlands)
11.1.1 ASML (Netherlands) Company Details
11.1.2 ASML (Netherlands) Business Overview
11.1.3 ASML (Netherlands) EUV Lithography Introduction
11.1.4 ASML (Netherlands) Revenue in EUV Lithography Business (2020-2025)
11.1.5 ASML (Netherlands) Recent Development
11.2 Nikon (Japan)
11.2.1 Nikon (Japan) Company Details
11.2.2 Nikon (Japan) Business Overview
11.2.3 Nikon (Japan) EUV Lithography Introduction
11.2.4 Nikon (Japan) Revenue in EUV Lithography Business (2020-2025)
11.2.5 Nikon (Japan) Recent Development
11.3 Canon (Japan)
11.3.1 Canon (Japan) Company Details
11.3.2 Canon (Japan) Business Overview
11.3.3 Canon (Japan) EUV Lithography Introduction
11.3.4 Canon (Japan) Revenue in EUV Lithography Business (2020-2025)
11.3.5 Canon (Japan) Recent Development
11.4 Gigaphoton Inc. (Japan)
11.4.1 Gigaphoton Inc. (Japan) Company Details
11.4.2 Gigaphoton Inc. (Japan) Business Overview
11.4.3 Gigaphoton Inc. (Japan) EUV Lithography Introduction
11.4.4 Gigaphoton Inc. (Japan) Revenue in EUV Lithography Business (2020-2025)
11.4.5 Gigaphoton Inc. (Japan) Recent Development
12 Analyst's Viewpoints/Conclusions
13 Appendix
13.1 Research Methodology
13.1.1 Methodology/Research Approach
13.1.1.1 Research Programs/Design
13.1.1.2 Market Size Estimation
13.1.1.3 Market Breakdown and Data Triangulation
13.1.2 Data Source
13.1.2.1 Secondary Sources
13.1.2.2 Primary Sources
13.2 Author Details
13.3 Disclaimer
FEATURED COMPANIES
ASML (Netherlands)
Nikon (Japan)
Canon (Japan)
Gigaphoton Inc. (Japan)
List of Tables
 Table 1. Global EUV Lithography Market Size Growth Rate by Type (US$ Million): 2020 VS 2024 VS 2031
 Table 2. Key Players of Light Source
 Table 3. Key Players of Exposure Device
 Table 4. Key Players of EUV Pod
 Table 5. Key Players of Others
 Table 6. Global EUV Lithography Market Size Growth by Application (US$ Million): 2020 VS 2024 VS 2031
 Table 7. Global EUV Lithography Market Size by Region (US$ Million): 2020 VS 2024 VS 2031
 Table 8. Global EUV Lithography Market Size by Region (2020-2025) & (US$ Million)
 Table 9. Global EUV Lithography Market Share by Region (2020-2025)
 Table 10. Global EUV Lithography Forecasted Market Size by Region (2026-2031) & (US$ Million)
 Table 11. Global EUV Lithography Market Share by Region (2026-2031)
 Table 12. EUV Lithography Market Trends
 Table 13. EUV Lithography Market Drivers
 Table 14. EUV Lithography Market Challenges
 Table 15. EUV Lithography Market Restraints
 Table 16. Global EUV Lithography Revenue by Players (2020-2025) & (US$ Million)
 Table 17. Global EUV Lithography Market Share by Players (2020-2025)
 Table 18. Global Top EUV Lithography Players by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in EUV Lithography as of 2024)
 Table 19. Ranking of Global Top EUV Lithography Companies by Revenue (US$ Million) in 2024
 Table 20. Global 5 Largest Players Market Share by EUV Lithography Revenue (CR5 and HHI) & (2020-2025)
 Table 21. Global Key Players of EUV Lithography, Headquarters and Area Served
 Table 22. Global Key Players of EUV Lithography, Product and Application
 Table 23. Global Key Players of EUV Lithography, Date of Enter into This Industry
 Table 24. Mergers & Acquisitions, Expansion Plans
 Table 25. Global EUV Lithography Market Size by Type (2020-2025) & (US$ Million)
 Table 26. Global EUV Lithography Revenue Market Share by Type (2020-2025)
 Table 27. Global EUV Lithography Forecasted Market Size by Type (2026-2031) & (US$ Million)
 Table 28. Global EUV Lithography Revenue Market Share by Type (2026-2031)
 Table 29. Global EUV Lithography Market Size by Application (2020-2025) & (US$ Million)
 Table 30. Global EUV Lithography Revenue Market Share by Application (2020-2025)
 Table 31. Global EUV Lithography Forecasted Market Size by Application (2026-2031) & (US$ Million)
 Table 32. Global EUV Lithography Revenue Market Share by Application (2026-2031)
 Table 33. North America EUV Lithography Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 34. North America EUV Lithography Market Size by Country (2020-2025) & (US$ Million)
 Table 35. North America EUV Lithography Market Size by Country (2026-2031) & (US$ Million)
 Table 36. Europe EUV Lithography Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 37. Europe EUV Lithography Market Size by Country (2020-2025) & (US$ Million)
 Table 38. Europe EUV Lithography Market Size by Country (2026-2031) & (US$ Million)
 Table 39. Asia-Pacific EUV Lithography Market Size Growth Rate by Region (US$ Million): 2020 VS 2024 VS 2031
 Table 40. Asia-Pacific EUV Lithography Market Size by Region (2020-2025) & (US$ Million)
 Table 41. Asia-Pacific EUV Lithography Market Size by Region (2026-2031) & (US$ Million)
 Table 42. Latin America EUV Lithography Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 43. Latin America EUV Lithography Market Size by Country (2020-2025) & (US$ Million)
 Table 44. Latin America EUV Lithography Market Size by Country (2026-2031) & (US$ Million)
 Table 45. Middle East & Africa EUV Lithography Market Size Growth Rate by Country (US$ Million): 2020 VS 2024 VS 2031
 Table 46. Middle East & Africa EUV Lithography Market Size by Country (2020-2025) & (US$ Million)
 Table 47. Middle East & Africa EUV Lithography Market Size by Country (2026-2031) & (US$ Million)
 Table 48. ASML (Netherlands) Company Details
 Table 49. ASML (Netherlands) Business Overview
 Table 50. ASML (Netherlands) EUV Lithography Product
 Table 51. ASML (Netherlands) Revenue in EUV Lithography Business (2020-2025) & (US$ Million)
 Table 52. ASML (Netherlands) Recent Development
 Table 53. Nikon (Japan) Company Details
 Table 54. Nikon (Japan) Business Overview
 Table 55. Nikon (Japan) EUV Lithography Product
 Table 56. Nikon (Japan) Revenue in EUV Lithography Business (2020-2025) & (US$ Million)
 Table 57. Nikon (Japan) Recent Development
 Table 58. Canon (Japan) Company Details
 Table 59. Canon (Japan) Business Overview
 Table 60. Canon (Japan) EUV Lithography Product
 Table 61. Canon (Japan) Revenue in EUV Lithography Business (2020-2025) & (US$ Million)
 Table 62. Canon (Japan) Recent Development
 Table 63. Gigaphoton Inc. (Japan) Company Details
 Table 64. Gigaphoton Inc. (Japan) Business Overview
 Table 65. Gigaphoton Inc. (Japan) EUV Lithography Product
 Table 66. Gigaphoton Inc. (Japan) Revenue in EUV Lithography Business (2020-2025) & (US$ Million)
 Table 67. Gigaphoton Inc. (Japan) Recent Development
 Table 68. Research Programs/Design for This Report
 Table 69. Key Data Information from Secondary Sources
 Table 70. Key Data Information from Primary Sources
 Table 71. Authors List of This Report


List of Figures
 Figure 1. EUV Lithography Picture
 Figure 2. Global EUV Lithography Market Size Comparison by Type (2020-2031) & (US$ Million)
 Figure 3. Global EUV Lithography Market Share by Type: 2024 VS 2031
 Figure 4. Light Source Features
 Figure 5. Exposure Device Features
 Figure 6. EUV Pod Features
 Figure 7. Others Features
 Figure 8. Global EUV Lithography Market Size by Application (2020-2031) & (US$ Million)
 Figure 9. Global EUV Lithography Market Share by Application: 2024 VS 2031
 Figure 10. Integrated Device Manufacturers (IDM) Case Studies
 Figure 11. Foundry Case Studies
 Figure 12. Others Case Studies
 Figure 13. EUV Lithography Report Years Considered
 Figure 14. Global EUV Lithography Market Size (US$ Million), Year-over-Year: 2020-2031
 Figure 15. Global EUV Lithography Market Size, (US$ Million), 2020 VS 2024 VS 2031
 Figure 16. Global EUV Lithography Market Share by Region: 2024 VS 2031
 Figure 17. Global EUV Lithography Market Share by Players in 2024
 Figure 18. Global Top EUV Lithography Players by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in EUV Lithography as of 2024)
 Figure 19. The Top 10 and 5 Players Market Share by EUV Lithography Revenue in 2024
 Figure 20. North America EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 21. North America EUV Lithography Market Share by Country (2020-2031)
 Figure 22. United States EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 23. Canada EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 24. Europe EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 25. Europe EUV Lithography Market Share by Country (2020-2031)
 Figure 26. Germany EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 27. France EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 28. U.K. EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 29. Italy EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 30. Russia EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 31. Nordic Countries EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 32. Asia-Pacific EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 33. Asia-Pacific EUV Lithography Market Share by Region (2020-2031)
 Figure 34. China EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 35. Japan EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 36. South Korea EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 37. Southeast Asia EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 38. India EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 39. Australia EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 40. Latin America EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 41. Latin America EUV Lithography Market Share by Country (2020-2031)
 Figure 42. Mexico EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 43. Brazil EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 44. Middle East & Africa EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 45. Middle East & Africa EUV Lithography Market Share by Country (2020-2031)
 Figure 46. Turkey EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 47. Saudi Arabia EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 48. UAE EUV Lithography Market Size YoY Growth (2020-2031) & (US$ Million)
 Figure 49. ASML (Netherlands) Revenue Growth Rate in EUV Lithography Business (2020-2025)
 Figure 50. Nikon (Japan) Revenue Growth Rate in EUV Lithography Business (2020-2025)
 Figure 51. Canon (Japan) Revenue Growth Rate in EUV Lithography Business (2020-2025)
 Figure 52. Gigaphoton Inc. (Japan) Revenue Growth Rate in EUV Lithography Business (2020-2025)
 Figure 53. Bottom-up and Top-down Approaches for This Report
 Figure 54. Data Triangulation
 Figure 55. Key Executives Interviewed
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