List of Tables
Table 1. Global DRIE Deep Silicon Etching Equipment Market Value by Type, (US$ Million) & (2023 VS 2030)
Table 2. Global DRIE Deep Silicon Etching Equipment Market Value by Application, (US$ Million) & (2023 VS 2030)
Table 3. Global DRIE Deep Silicon Etching Equipment Production by Manufacturers (2019-2024) & (Units)
Table 4. Global DRIE Deep Silicon Etching Equipment Production Market Share by Manufacturers (2019-2024)
Table 5. Global DRIE Deep Silicon Etching Equipment Production Value by Manufacturers (2019-2024) & (US$ Million)
Table 6. Global DRIE Deep Silicon Etching Equipment Production Value Share by Manufacturers (2019-2024)
Table 7. Global Key Players of DRIE Deep Silicon Etching Equipment, Industry Ranking, 2022 VS 2023
Table 8. Global Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value in DRIE Deep Silicon Etching Equipment as of 2023)
Table 9. Global Market DRIE Deep Silicon Etching Equipment Average Price by Manufacturers (K US$/Unit) & (2019-2024)
Table 10. Global Key Manufacturers of DRIE Deep Silicon Etching Equipment, Manufacturing Sites & Headquarters
Table 11. Global Key Manufacturers of DRIE Deep Silicon Etching Equipment, Product Type & Application
Table 12. Global Key Manufacturers of DRIE Deep Silicon Etching Equipment, Date of Enter into This Industry
Table 13. Global DRIE Deep Silicon Etching Equipment Manufacturers Market Concentration Ratio (CR5 and HHI)
Table 14. Mergers & Acquisitions, Expansion Plans
Table 15. Global DRIE Deep Silicon Etching Equipment Production Value Growth Rate by Region: 2019 VS 2023 VS 2030 (US$ Million)
Table 16. Global DRIE Deep Silicon Etching Equipment Production Value (US$ Million) by Region (2019-2024)
Table 17. Global DRIE Deep Silicon Etching Equipment Production Value Market Share by Region (2019-2024)
Table 18. Global DRIE Deep Silicon Etching Equipment Production Value (US$ Million) Forecast by Region (2025-2030)
Table 19. Global DRIE Deep Silicon Etching Equipment Production Value Market Share Forecast by Region (2025-2030)
Table 20. Global DRIE Deep Silicon Etching Equipment Production Comparison by Region: 2019 VS 2023 VS 2030 (Units)
Table 21. Global DRIE Deep Silicon Etching Equipment Production (Units) by Region (2019-2024)
Table 22. Global DRIE Deep Silicon Etching Equipment Production Market Share by Region (2019-2024)
Table 23. Global DRIE Deep Silicon Etching Equipment Production (Units) Forecast by Region (2025-2030)
Table 24. Global DRIE Deep Silicon Etching Equipment Production Market Share Forecast by Region (2025-2030)
Table 25. Global DRIE Deep Silicon Etching Equipment Market Average Price (K US$/Unit) by Region (2019-2024)
Table 26. Global DRIE Deep Silicon Etching Equipment Market Average Price (K US$/Unit) by Region (2025-2030)
Table 27. Global DRIE Deep Silicon Etching Equipment Consumption Growth Rate by Region: 2019 VS 2023 VS 2030 (Units)
Table 28. Global DRIE Deep Silicon Etching Equipment Consumption by Region (2019-2024) & (Units)
Table 29. Global DRIE Deep Silicon Etching Equipment Consumption Market Share by Region (2019-2024)
Table 30. Global DRIE Deep Silicon Etching Equipment Forecasted Consumption by Region (2025-2030) & (Units)
Table 31. Global DRIE Deep Silicon Etching Equipment Forecasted Consumption Market Share by Region (2019-2024)
Table 32. North America DRIE Deep Silicon Etching Equipment Consumption Growth Rate by Country: 2019 VS 2023 VS 2030 (Units)
Table 33. North America DRIE Deep Silicon Etching Equipment Consumption by Country (2019-2024) & (Units)
Table 34. North America DRIE Deep Silicon Etching Equipment Consumption by Country (2025-2030) & (Units)
Table 35. Europe DRIE Deep Silicon Etching Equipment Consumption Growth Rate by Country: 2019 VS 2023 VS 2030 (Units)
Table 36. Europe DRIE Deep Silicon Etching Equipment Consumption by Country (2019-2024) & (Units)
Table 37. Europe DRIE Deep Silicon Etching Equipment Consumption by Country (2025-2030) & (Units)
Table 38. Asia Pacific DRIE Deep Silicon Etching Equipment Consumption Growth Rate by Country: 2019 VS 2023 VS 2030 (Units)
Table 39. Asia Pacific DRIE Deep Silicon Etching Equipment Consumption by Region (2019-2024) & (Units)
Table 40. Asia Pacific DRIE Deep Silicon Etching Equipment Consumption by Region (2025-2030) & (Units)
Table 41. Latin America, Middle East & Africa DRIE Deep Silicon Etching Equipment Consumption Growth Rate by Country: 2019 VS 2023 VS 2030 (Units)
Table 42. Latin America, Middle East & Africa DRIE Deep Silicon Etching Equipment Consumption by Country (2019-2024) & (Units)
Table 43. Latin America, Middle East & Africa DRIE Deep Silicon Etching Equipment Consumption by Country (2025-2030) & (Units)
Table 44. Global DRIE Deep Silicon Etching Equipment Production (Units) by Type (2019-2024)
Table 45. Global DRIE Deep Silicon Etching Equipment Production (Units) by Type (2025-2030)
Table 46. Global DRIE Deep Silicon Etching Equipment Production Market Share by Type (2019-2024)
Table 47. Global DRIE Deep Silicon Etching Equipment Production Market Share by Type (2025-2030)
Table 48. Global DRIE Deep Silicon Etching Equipment Production Value (US$ Million) by Type (2019-2024)
Table 49. Global DRIE Deep Silicon Etching Equipment Production Value (US$ Million) by Type (2025-2030)
Table 50. Global DRIE Deep Silicon Etching Equipment Production Value Market Share by Type (2019-2024)
Table 51. Global DRIE Deep Silicon Etching Equipment Production Value Market Share by Type (2025-2030)
Table 52. Global DRIE Deep Silicon Etching Equipment Price (K US$/Unit) by Type (2019-2024)
Table 53. Global DRIE Deep Silicon Etching Equipment Price (K US$/Unit) by Type (2025-2030)
Table 54. Global DRIE Deep Silicon Etching Equipment Production (Units) by Application (2019-2024)
Table 55. Global DRIE Deep Silicon Etching Equipment Production (Units) by Application (2025-2030)
Table 56. Global DRIE Deep Silicon Etching Equipment Production Market Share by Application (2019-2024)
Table 57. Global DRIE Deep Silicon Etching Equipment Production Market Share by Application (2025-2030)
Table 58. Global DRIE Deep Silicon Etching Equipment Production Value (US$ Million) by Application (2019-2024)
Table 59. Global DRIE Deep Silicon Etching Equipment Production Value (US$ Million) by Application (2025-2030)
Table 60. Global DRIE Deep Silicon Etching Equipment Production Value Market Share by Application (2019-2024)
Table 61. Global DRIE Deep Silicon Etching Equipment Production Value Market Share by Application (2025-2030)
Table 62. Global DRIE Deep Silicon Etching Equipment Price (K US$/Unit) by Application (2019-2024)
Table 63. Global DRIE Deep Silicon Etching Equipment Price (K US$/Unit) by Application (2025-2030)
Table 64. Oxford Instruments DRIE Deep Silicon Etching Equipment Company Information
Table 65. Oxford Instruments DRIE Deep Silicon Etching Equipment Specification and Application
Table 66. Oxford Instruments DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 67. Oxford Instruments Main Business and Markets Served
Table 68. Oxford Instruments Recent Developments/Updates
Table 69. SPTS Technologies DRIE Deep Silicon Etching Equipment Company Information
Table 70. SPTS Technologies DRIE Deep Silicon Etching Equipment Specification and Application
Table 71. SPTS Technologies DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 72. SPTS Technologies Main Business and Markets Served
Table 73. SPTS Technologies Recent Developments/Updates
Table 74. Applied Materials DRIE Deep Silicon Etching Equipment Company Information
Table 75. Applied Materials DRIE Deep Silicon Etching Equipment Specification and Application
Table 76. Applied Materials DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 77. Applied Materials Main Business and Markets Served
Table 78. Applied Materials Recent Developments/Updates
Table 79. Lam Research DRIE Deep Silicon Etching Equipment Company Information
Table 80. Lam Research DRIE Deep Silicon Etching Equipment Specification and Application
Table 81. Lam Research DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 82. Lam Research Main Business and Markets Served
Table 83. Lam Research Recent Developments/Updates
Table 84. AMAT DRIE Deep Silicon Etching Equipment Company Information
Table 85. AMAT DRIE Deep Silicon Etching Equipment Specification and Application
Table 86. AMAT DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 87. AMAT Main Business and Markets Served
Table 88. AMAT Recent Developments/Updates
Table 89. PlasmaTherm DRIE Deep Silicon Etching Equipment Company Information
Table 90. PlasmaTherm DRIE Deep Silicon Etching Equipment Specification and Application
Table 91. PlasmaTherm DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 92. PlasmaTherm Main Business and Markets Served
Table 93. PlasmaTherm Recent Developments/Updates
Table 94. Tegal Corporation DRIE Deep Silicon Etching Equipment Company Information
Table 95. Tegal Corporation DRIE Deep Silicon Etching Equipment Specification and Application
Table 96. Tegal Corporation DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 97. Tegal Corporation Main Business and Markets Served
Table 98. Tegal Corporation Recent Developments/Updates
Table 99. Samco Inc. DRIE Deep Silicon Etching Equipment Company Information
Table 100. Samco Inc. DRIE Deep Silicon Etching Equipment Specification and Application
Table 101. Samco Inc. DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 102. Samco Inc. Main Business and Markets Served
Table 103. Samco Inc. Recent Developments/Updates
Table 104. Technics Plasma GmbH DRIE Deep Silicon Etching Equipment Company Information
Table 105. Technics Plasma GmbH DRIE Deep Silicon Etching Equipment Specification and Application
Table 106. Technics Plasma GmbH DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 107. Technics Plasma GmbH Main Business and Markets Served
Table 108. Technics Plasma GmbH Recent Developments/Updates
Table 109. SPTS Plasma DRIE Deep Silicon Etching Equipment Company Information
Table 110. SPTS Plasma DRIE Deep Silicon Etching Equipment Specification and Application
Table 111. SPTS Plasma DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 112. SPTS Plasma Main Business and Markets Served
Table 113. SPTS Plasma Recent Developments/Updates
Table 114. ULVAC DRIE Deep Silicon Etching Equipment Company Information
Table 115. ULVAC DRIE Deep Silicon Etching Equipment Specification and Application
Table 116. ULVAC DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 117. ULVAC Main Business and Markets Served
Table 118. ULVAC Recent Developments/Updates
Table 119. Alchimer DRIE Deep Silicon Etching Equipment Company Information
Table 120. Alchimer DRIE Deep Silicon Etching Equipment Specification and Application
Table 121. Alchimer DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 122. Alchimer Main Business and Markets Served
Table 123. Alchimer Recent Developments/Updates
Table 124. Corial DRIE Deep Silicon Etching Equipment Company Information
Table 125. Corial DRIE Deep Silicon Etching Equipment Specification and Application
Table 126. Corial DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 127. Corial Main Business and Markets Served
Table 128. Corial Recent Developments/Updates
Table 129. KLA-Tencor DRIE Deep Silicon Etching Equipment Company Information
Table 130. KLA-Tencor DRIE Deep Silicon Etching Equipment Specification and Application
Table 131. KLA-Tencor DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 132. KLA-Tencor Main Business and Markets Served
Table 133. KLA-Tencor Recent Developments/Updates
Table 134. Nova Measuring Instruments DRIE Deep Silicon Etching Equipment Company Information
Table 135. Nova Measuring Instruments DRIE Deep Silicon Etching Equipment Specification and Application
Table 136. Nova Measuring Instruments DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 137. Nova Measuring Instruments Main Business and Markets Served
Table 138. Nova Measuring Instruments Recent Developments/Updates
Table 139. Plasmetrex DRIE Deep Silicon Etching Equipment Company Information
Table 140. Plasmetrex DRIE Deep Silicon Etching Equipment Specification and Application
Table 141. Plasmetrex DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 142. Plasmetrex Main Business and Markets Served
Table 143. Plasmetrex Recent Developments/Updates
Table 144. Hitachi High-Tech Corporation DRIE Deep Silicon Etching Equipment Company Information
Table 145. Hitachi High-Tech Corporation DRIE Deep Silicon Etching Equipment Specification and Application
Table 146. Hitachi High-Tech Corporation DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 147. Hitachi High-Tech Corporation Main Business and Markets Served
Table 148. Hitachi High-Tech Corporation Recent Developments/Updates
Table 149. SEMIFAB DRIE Deep Silicon Etching Equipment Company Information
Table 150. SEMIFAB DRIE Deep Silicon Etching Equipment Specification and Application
Table 151. SEMIFAB DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 152. SEMIFAB Main Business and Markets Served
Table 153. SEMIFAB Recent Developments/Updates
Table 154. Sentech Instruments DRIE Deep Silicon Etching Equipment Company Information
Table 155. Sentech Instruments DRIE Deep Silicon Etching Equipment Specification and Application
Table 156. Sentech Instruments DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 157. Sentech Instruments Main Business and Markets Served
Table 158. Sentech Instruments Recent Developments/Updates
Table 159. PVA TePla AG DRIE Deep Silicon Etching Equipment Company Information
Table 160. PVA TePla AG DRIE Deep Silicon Etching Equipment Specification and Application
Table 161. PVA TePla AG DRIE Deep Silicon Etching Equipment Production (Units), Value (US$ Million), Price (K US$/Unit) and Gross Margin (2019-2024)
Table 162. PVA TePla AG Main Business and Markets Served
Table 163. PVA TePla AG Recent Developments/Updates
Table 164. Key Raw Materials Lists
Table 165. Raw Materials Key Suppliers Lists
Table 166. DRIE Deep Silicon Etching Equipment Distributors List
Table 167. DRIE Deep Silicon Etching Equipment Customers List
Table 168. DRIE Deep Silicon Etching Equipment Market Trends
Table 169. DRIE Deep Silicon Etching Equipment Market Drivers
Table 170. DRIE Deep Silicon Etching Equipment Market Challenges
Table 171. DRIE Deep Silicon Etching Equipment Market Restraints
Table 172. Research Programs/Design for This Report
Table 173. Key Data Information from Secondary Sources
Table 174. Key Data Information from Primary Sources
Table 175. Authors List of This Report
List of Figures
Figure 1. Product Picture of DRIE Deep Silicon Etching Equipment
Figure 2. Global DRIE Deep Silicon Etching Equipment Market Value by Type, (US$ Million) & (2023 VS 2030)
Figure 3. Global DRIE Deep Silicon Etching Equipment Market Share by Type: 2023 VS 2030
Figure 4. Single-chip Product Picture
Figure 5. Multi-chip Product Picture
Figure 6. Global DRIE Deep Silicon Etching Equipment Market Value by Application, (US$ Million) & (2023 VS 2030)
Figure 7. Global DRIE Deep Silicon Etching Equipment Market Share by Application: 2023 VS 2030
Figure 8. MEMS
Figure 9. IC Manufacturing
Figure 10. Optical and Optoelectronic Devices
Figure 11. Biomedical Field
Figure 12. Other
Figure 13. Global DRIE Deep Silicon Etching Equipment Production Value (US$ Million), 2019 VS 2023 VS 2030
Figure 14. Global DRIE Deep Silicon Etching Equipment Production Value (US$ Million) & (2019-2030)
Figure 15. Global DRIE Deep Silicon Etching Equipment Production Capacity (Units) & (2019-2030)
Figure 16. Global DRIE Deep Silicon Etching Equipment Production (Units) & (2019-2030)
Figure 17. Global DRIE Deep Silicon Etching Equipment Average Price (K US$/Unit) & (2019-2030)
Figure 18. DRIE Deep Silicon Etching Equipment Report Years Considered
Figure 19. DRIE Deep Silicon Etching Equipment Production Share by Manufacturers in 2023
Figure 20. DRIE Deep Silicon Etching Equipment Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2019 VS 2023
Figure 21. The Global 5 and 10 Largest Players: Market Share by DRIE Deep Silicon Etching Equipment Revenue in 2023
Figure 22. Global DRIE Deep Silicon Etching Equipment Production Value Comparison by Region: 2019 VS 2023 VS 2030 (US$ Million)
Figure 23. Global DRIE Deep Silicon Etching Equipment Production Value Market Share by Region: 2019 VS 2023 VS 2030
Figure 24. Global DRIE Deep Silicon Etching Equipment Production Comparison by Region: 2019 VS 2023 VS 2030 (Units)
Figure 25. Global DRIE Deep Silicon Etching Equipment Production Market Share by Region: 2019 VS 2023 VS 2030
Figure 26. North America DRIE Deep Silicon Etching Equipment Production Value (US$ Million) Growth Rate (2019-2030)
Figure 27. Europe DRIE Deep Silicon Etching Equipment Production Value (US$ Million) Growth Rate (2019-2030)
Figure 28. China DRIE Deep Silicon Etching Equipment Production Value (US$ Million) Growth Rate (2019-2030)
Figure 29. Japan DRIE Deep Silicon Etching Equipment Production Value (US$ Million) Growth Rate (2019-2030)
Figure 30. Global DRIE Deep Silicon Etching Equipment Consumption by Region: 2019 VS 2023 VS 2030 (Units)
Figure 31. Global DRIE Deep Silicon Etching Equipment Consumption Market Share by Region: 2019 VS 2023 VS 2030
Figure 32. North America DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 33. North America DRIE Deep Silicon Etching Equipment Consumption Market Share by Country (2019-2030)
Figure 34. U.S. DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 35. Canada DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 36. Europe DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 37. Europe DRIE Deep Silicon Etching Equipment Consumption Market Share by Country (2019-2030)
Figure 38. Germany DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 39. France DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 40. U.K. DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 41. Italy DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 42. Netherlands DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 43. Asia Pacific DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 44. Asia Pacific DRIE Deep Silicon Etching Equipment Consumption Market Share by Region (2025-2030)
Figure 45. China DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 46. Japan DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 47. South Korea DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 48. China Taiwan DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 49. Southeast Asia DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 50. India DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 51. Latin America, Middle East & Africa DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 52. Latin America, Middle East & Africa DRIE Deep Silicon Etching Equipment Consumption Market Share by Country (2019-2030)
Figure 53. Mexico DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 54. Brazil DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 55. Turkey DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 56. GCC Countries DRIE Deep Silicon Etching Equipment Consumption and Growth Rate (2019-2030) & (Units)
Figure 57. Global Production Market Share of DRIE Deep Silicon Etching Equipment by Type (2019-2030)
Figure 58. Global Production Value Market Share of DRIE Deep Silicon Etching Equipment by Type (2019-2030)
Figure 59. Global DRIE Deep Silicon Etching Equipment Price (K US$/Unit) by Type (2019-2030)
Figure 60. Global Production Market Share of DRIE Deep Silicon Etching Equipment by Application (2019-2030)
Figure 61. Global Production Value Market Share of DRIE Deep Silicon Etching Equipment by Application (2019-2030)
Figure 62. Global DRIE Deep Silicon Etching Equipment Price (K US$/Unit) by Application (2019-2030)
Figure 63. DRIE Deep Silicon Etching Equipment Value Chain
Figure 64. DRIE Deep Silicon Etching Equipment Production Process
Figure 65. Channels of Distribution (Direct Vs Distribution)
Figure 66. Bottom-up and Top-down Approaches for This Report
Figure 67. Data Triangulation
